713 patents
Page 6 of 36
Utility
Group 13 element nitride layer, free-standing substrate and functional element
21 Mar 23
A layer of a crystal of a group 13 nitride selected from gallium nitride, aluminum nitride, indium nitride and the mixed crystals thereof has an upper surface and a bottom surface.
Takayuki Hirao, Hirokazu Nakanishi, Mikiya Ichimura, Takanao Shimodaira, Masahiro Sakai, Takashi Yoshino
Filed: 21 Feb 20
Utility
Heater, method of manufacturing the same, and system
21 Mar 23
A heater may include: a conductive ceramic cylinder tube in which cell-arrays are concentrically arranged, each cell-array including cells which are arranged in a circumferential direction of the ceramic cylinder tube; an inner electrode electrically coupled to an inner wall portion of the ceramic cylinder tube; and an outer electrode electrically coupled to an outer wall portion of the ceramic cylinder tube.
Yukio Miyairi, Masaaki Masuda, Xavier Bartolo
Filed: 21 Oct 19
Utility
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21 Mar 23
A gas sensor includes: a sensor element; a plurality of element pads formed on a rear end portion of the sensor element; and a plurality of contact members holding the rear end portion of the sensor element and electrically connected respectively to the plurality of element pads.
Shotaro Niizuma, Yusuke Watanabe, Toshihiro Hirakawa, Hayami Aota
Filed: 16 Sep 20
Utility
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21 Mar 23
An electrostatic chuck assembly includes a ceramic body having a wafer placement surface that is a circular surface, and an F/R placement surface that is formed around the wafer placement surface and is positioned at a lower level than the wafer placement surface, a wafer attraction electrode embedded inside the ceramic body and positioned in a facing relation to the wafer placement surface, an F/R attraction electrode embedded inside the ceramic body and positioned in a facing relation to the F/R placement surface, a concave-convex region formed in the F/R placement surface to hold gas, a focus ring placed on the F/R placement surface, and a pair of elastic annular sealing members arranged between the F/R placement surface and the focus ring on the inner peripheral side and the outer peripheral side of the F/R placement surface, and surrounding the concave-convex region in a sandwiching relation.
Tatsuya Kuno, Ikuhisa Morioka, Kenichiro Aikawa
Filed: 23 Apr 20
Utility
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14 Mar 23
A gas sensor includes a sensor element, an elastic insulating member, a plurality of lead wires, a plurality of metal terminals, and a ceramic housing.
Shotaro Niizuma, Yusuke Watanabe, Toshihiro Hirakawa, Hayami Aota
Filed: 10 Nov 20
Utility
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7 Mar 23
An electrostatic chuck heater includes a ceramic plate, an electrostatic electrode, first and second zone heater electrodes, and first and second zone gas grooves.
Joyo Ito
Filed: 14 Jan 21
Utility
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7 Mar 23
A wafer placement table includes: a ceramic member having a wafer placement surface; a mesh electrode buried in the ceramic member; a conductive connection member in contact with the mesh electrode and exposed to outside from a surface of the ceramic member on the opposite side of the wafer placement surface; and an external current-carrying member joined to a surface of the connection member exposed to outside.
Yutaka Unno, Shuichiro Motoyama
Filed: 11 Jun 20
Utility
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28 Feb 23
A honeycomb filter includes a pillar-shaped honeycomb substrate having a porous partition wall and a plugging portion provided so as to plug end at any one of the inflow end face side or the outflow end face side of the cell, wherein in a section orthogonal to the extending direction of the cell, the shape of the cell is hexagonal, the partition wall includes a first partition wall disposed between the inflow cell and the outflow cell and a second partition wall disposed between the inflow cells, and the first partition wall has a porous trapping layer on its surface for trapping particulate matter in exhaust gas, and the second partition wall has no trapping layer on its surface or has a trapping layer thinner than the trapping layer disposed on the surface of the first partition wall.
Takashi Aoki, Yasuyuki Furuta, Takahiro Honda, Koji Kuzutani
Filed: 23 Mar 22
Utility
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28 Feb 23
A heat exchanging member including a hollow pillar shaped honeycomb structure having partition walls defining cells, the cells penetrating from a first end face to a second end face to form flow paths for a first fluid, an inner peripheral wall, and an outer peripheral wall; and a covering member being configured to cover the outer peripheral wall of the pillar shaped honeycomb structure.
Tatsuo Kawaguchi, Takeshi Sakuma, Daisuke Kimura, Yutaro Fumoto
Filed: 21 May 19
Utility
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28 Feb 23
A sensor element for a gas sensor includes: an element base being a ceramic structure including a sensing part to sense a gas component to be measured; and a leading-end protective layer being a porous layer to surround a predetermined range from a leading end portion on a side of the sensing part of the element base.
Takashi Hino, Ryo Hayase
Filed: 24 Mar 20
Utility
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21 Feb 23
A gas sensor includes: a sensor element; a ceramic housing holding a rear end portion of the sensor element and provided with metal terminals electrically connected to the sensor element; and an elastic insulating member that is fixed in the rear of the sensor element and into which a plurality of lead wires electrically connected to the metal terminals are inserted.
Yusuke Watanabe, Shotaro Niizuma, Hayami Aota, Toshihiro Hirakawa
Filed: 26 Aug 20
Utility
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14 Feb 23
A housing of a separation apparatus includes therein a zeolite membrane complex.
Kenichi Noda
Filed: 26 Jun 20
Utility
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14 Feb 23
A coating material for a silicon carbide-based honeycomb structure, the coating material including from 20 to 75% by mass of ceramic powder (A), the ceramic powder (A) including from 55 to 95% by mass of silicon carbide and from 5 to 30% by mass of silicon dioxide as chemical components.
Suguru Kodama
Filed: 25 Mar 19
Utility
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14 Feb 23
A manufacturing method of a ceramic formed body, including: a mixing step in which a raw material for forming a ceramic formed body is dryly mixed, and then, a liquid is added to the obtained dry mixture to wetly mix the mixture; a kneading step in which a mixture obtained in the mixing step is kneaded; an injection step in which supercritical carbon dioxide in the state of supercritical fluid is injected into a kneaded product obtained in the kneading step; and a forming step in which a forming raw material containing the supercritical carbon dioxide obtained in the kneading step and the injection step is extruded to form the ceramic formed body.
Yuichi Tajima, Ryuji Yamaguti
Filed: 21 Aug 18
Utility
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14 Feb 23
A porous composite includes a porous base material, and a porous collection layer.
Shogo Takeno, Kousuke Ujihara, Kenji Morimoto
Filed: 28 Dec 20
Utility
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14 Feb 23
A sensor element includes an element base made of an oxygen-ion conductive solid electrolyte, an internal space provided inside the element base, an electrochemical pump cell that pumps oxygen in and out between the internal space and outside, and a porous thermal shock resistant layer provided to an outermost peripheral part in a predetermined range at one end part of the element base, at which a gas inlet is provided.
Takashi Hino
Filed: 28 Mar 18
Utility
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14 Feb 23
A sensor element includes: an element base made of an oxygen-ion conductive solid electrolyte; an internal space provided inside the element base; an electrochemical pump cell configured to pump oxygen in and out between the internal space and outside; a porous thermal shock resistant layer provided to an outermost peripheral part in a predetermined range at one end part of the element base, at which a gas inlet is provided; and a buffer layer adjacent to the thermal shock resistant layer on a pump surface and a heater surface.
Takashi Hino
Filed: 28 Mar 18
Utility
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7 Feb 23
A base material for a membrane filter contains 90% by mass or more of aluminum oxide and 0.1% by mass or more and 10% by mass or less of titanium oxide.
Koji Hieda
Filed: 11 Aug 20
Utility
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7 Feb 23
A honeycomb filter includes a honeycomb structure having a porous partition wall disposed to surround a plurality of cells; and a plugging portion provided at one end of the cell, wherein the honeycomb structure has an inflow side region including a range of up to at least 30% with respect to the total length of the honeycomb structure with the inflow end face as the starting point and an outflow side region including a range of up to at least 20% with respect to the total length of the honeycomb structure with the outflow end face as the starting point, in the extending direction of the cell of the honeycomb structure, an average pore diameter of the partition wall in the inflow side region is 9 to 14 μm and an average pore diameter of the partition wall in the outflow side region is 15 to 20 μm.
Sachiko Ishida, Fumihiko Yoshioka
Filed: 15 Dec 21
Utility
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7 Feb 23
A thermal insulation member is directly or indirectly sandwiched between a first object and a second object and thereby suppresses or interrupts heat transfer between the first object and the second object.
Akinobu Oribe, Takahiro Tomita, Hiroharu Kobayashi
Filed: 22 Feb 19