23 patents
Page 2 of 2
Utility
Fused Alumina Grains, Method for Producing Fused Alumina Grains, Grindstone, and Coated Abrasive
29 Jul 20
Provided are electrofused alumina grains capable of preventing grain binding on production and of achieving high grinding performance.
So MIYAISHI, Kazuaki TAKANO, Satoshi YAMAOKA
Filed: 24 Oct 18
Utility
SiC EPITAXIAL GROWTH APPARATUS
3 Jun 20
A SiC epitaxial growth apparatus according to an embodiment includes a mounting stand on which a SiC wafer is mounted, and a furnace body which is configured to cover the mounting stand, and the furnace body includes a raw material gas supply port which is positioned so as to face the mounting stand and is configured to supply a raw material gas to the growth space, a first purge gas supply port which surrounds a vicinity of the raw material gas supply port and is configured to supply a purge gas to the growth space, and a second purge gas supply port which surrounds a vicinity of the first purge gas supply port and is configured to supply a purge gas to the growth space.
Yoshikazu Umeta, Hironori Atsumi
Filed: 28 Nov 19
Utility
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11 Dec 19
This SiC epitaxial wafer includes: a SiC single crystal substrate of which a main surface has an off-angle of 0.4° to 5° with respect to (0001) plane; and an epitaxial layer provided on the SiC single crystal substrate, wherein the epitaxial layer has a basal plane dislocation density of 0.1 pieces/cm2 or less that is a density of basal plane dislocations extending from the SiC single crystal substrate to an outer surface and an intrinsic 3C triangular defect density of 0.1 pieces/cm2 or less.
Keisuke FUKADA, Naoto ISHIBASHI, Akira BANDO, Masahiko ITO, Isaho KAMATA, Hidekazu TSUCHIDA, Kazukuni HARA, Masami NAITO, Hideyuki UEHIGASHI, Hiroaki FUJIBAYASHI, Hirofumi AOKI, Toshikazu SUGIURA, Katsumi SUZUKI
Filed: 24 Dec 17