3 patents
Utility
Deposition Processing Systems Having Active Temperature Control and Associated Methods
18 Aug 22
Several embodiments of the present technology are directed to actively controlling a temperature of a substrate in a chamber during manufacturing of a material or thin film.
Angus McFadden, Jason Wright
Filed: 15 Apr 22
Utility
Methods of Manufacturing Electrostatic Chucks
16 Sep 20
A method of depositing material to manufacture an electrostatic chuck is provided.
Angus McFadden, Jason Wright
Filed: 9 Mar 20
Utility
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29 Apr 20
Techniques for depositing a functionally integrated coating structure on a substrate are provided.
Nader Kalkhoran, Eric Tobin, Tim Egge, Jason Burns, Rick Oliver, Angus McFadden, Jason Wright
Filed: 29 May 18
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