14 patents
Utility
Laminar flow restrictor and seal for same
12 Dec 23
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright, Matthew Eric Kovacic, Christopher Bryant Davis
Filed: 31 Mar 22
Utility
Flow control system, method, and apparatus
14 Nov 23
A gas flow control system for delivering a plurality of gas flows.
Daniel T. Mudd, Sean Joseph Penley, Michael Maeder, Patti J. Mudd
Filed: 7 Sep 21
Utility
Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
7 Nov 23
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Stephen Carson
Filed: 13 May 21
Utility
Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
11 Jul 23
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication.
Stephen Carson, Randolph Treur
Filed: 12 May 21
Utility
Laminar flow restrictor
2 May 23
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright
Filed: 5 Aug 20
Utility
Seal for a flow restrictor
21 Feb 23
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Matthew Eric Kovacic, Zachariah Ezekiel McIntyre, Sean Joseph Penley, Christopher Bryant Davis
Filed: 5 Aug 20
Utility
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
23 Aug 22
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Penley, Michael Maeder, Daniel T. Mudd, Patti J. Mudd
Filed: 30 Apr 20
Utility
Fluid delivery system
26 Oct 21
A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring.
Chris Melcer, Philip Ryan Barros, Haruyuki Kubota, Randolph Treur, Todd Cushman
Filed: 10 Mar 21
Utility
Liquid delivery system
26 Oct 21
A fluid delivery system may include a substrate block having an upper surface; a first substrate port in the upper surface; a second substrate port in the upper surface; a substrate fluid passageway extending between the first substrate port and the second substrate port; a substrate ring defining the second substrate port; and a substrate seal channel formed in the upper surface and surrounding the substrate ring.
Chris Melcer, Phillip Ryan Barros, Haruyuki Kubota, Randolph Treur, Todd Cushman
Filed: 4 Oct 18
Utility
Flow control system, method, and apparatus
12 Oct 21
A mass flow control apparatus having a monolithic base.
Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder, Patti J. Mudd
Filed: 21 Sep 20
Utility
Fluid control system
17 Aug 21
An improved fluid delivery system and method that directly controls the concentration of constituent components in a fluid mixture delivered, for example, to a process chamber.
Philip Ryan Barros, Greg Patrick Mulligan, Chris Melcer
Filed: 19 Feb 18
Utility
Apparatus for splitting flow of process gas and method of operating same
16 Nov 20
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Penley, Marshall B Grill
Filed: 21 Feb 19
Utility
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
8 Jun 20
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Penley, Michael Maeder, Daniel T. Mudd, Patti J. Mudd
Filed: 26 Sep 17
Utility
Apparatus for controlling flow and method of calibrating same
25 May 20
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication.
Sean Penley, Michael Maeder
Filed: 28 Dec 17
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