2 patents
Utility
Apparatus for Preventing Contamination of Self-plasma Chamber
26 Aug 20
The present invention relates to a technology for increasing the reliability of measurement by preventing the contamination of a self-plasma chamber provided in order to monitor a deposition operation performed in a process chamber, and has a shielding means capable of preventing an inflow of negative electrode material, which is generated by a sputtering phenomenon, into a discharge chamber when a positive charge of plasma, which is generated in the self-plasma chamber, collides with a negative electrode.
Dong Ho Cha
Filed: 6 Aug 18
Utility
Method for Preparing Powdered Composite Carbide of Tungsten and Titanium
1 Jul 20
A method according to an embodiment of the present invention is for preparing powdered composite carbide of tungsten and titanium in which tungsten trioxide (WO3), titanium dioxide (TiO2) and carbon (C), each being in powdered form are mixed with a reducing agent powder to obtain a reaction mixture in the mixing step, followed by the synthesis step in which the reaction mixture is heated at a temperature of about 600° C. to 1200° C. to obtain the reaction products, and the washing step in which the reaction products are washed with water.
Hyun Ho LEE, Byeong HO CHOI
Filed: 6 Nov 18
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