3 patents
Utility
Chemical Planarization
11 May 23
Examples are disclosed that relate to planarizing substrates without use of an abrasive.
Sudhanshu Misra, Suryadevara Babu
Filed: 30 Dec 22
Utility
Tools for Chemical Planarization
16 Mar 23
Examples are disclosed that relate to planarizing substrates without use of an abrasive.
Sudhanshu Misra, Suryadevara Babu
Filed: 31 Aug 22
Utility
Pad Surface Regeneration and Metal Recovery
10 Nov 22
A method comprises planarizing a substrate material with a functionalized chemical planarization pad.
Sudhanshu Misra, Babu Suryadevara
Filed: 26 Apr 22
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