Ramil Yaldaei

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
3 Oct 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	206.55	592	122.28 k	9,148
15 May 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	233.63	545	127.33 k	9,576
15 May 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	233.63	194	45.32 k	10,121
1 Mar 24	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	1,688	0.00	10,315
1 Mar 24	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	844	0.00	844
1 Mar 24	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	844	0.00	844
3 Oct 23	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	125.39	421	52.79 k	8,547

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.