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Filing tables
Filing exhibits
- 10-K Annual report
- 10.16 Management Incentive Bonus Plans for Named Executive Officers
- 21.1 Subsidiaries of the Registrant
- 23.1 Consent of Pricewaterhousecoopers LLP
- 31.1 Certification of Principal Executive Officer Pursuant to Section 302
- 31.2 Certification of Principal Financial Officer Pursuant to Section 302
- 32.1 Certification of the CEO and CFO Pursuant to Section 906
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EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
SUBSIDIARY | JURISDICTION OF INCORPORATION | |
ASTeX GmbH | Germany | |
MKS (Bermuda) Ltd. | Bermuda | |
MKS Denmark APS | Denmark | |
MKS Germany Holding GmbH | Germany | |
MKS Instruments (Asia) Ltd. | Bermuda | |
MKS Instruments (China) Company Ltd. | China | |
MKS Instruments Deutschland GmbH | Germany | |
MKS Instruments France S.A.S. | France | |
MKS Instruments (Hong Kong) Ltd. | Hong Kong | |
MKS Instruments (Shanghai) Ltd. | Shanghai | |
MKS Instruments (Singapore) Pte. Ltd. | Singapore | |
MKS Instruments U.K. Limited | United Kingdom | |
MKS Japan, Inc. | Japan | |
MKS Korea Co., Ltd. | Korea | |
MKS Luxembourg S.A.R.L. | Luxembourg | |
MKS MSC, Inc. | Massachusetts | |
MKS Taiwan Technology Ltd. | Taiwan | |
MKS Technology Limited | United Kingdom | |
MKS Tega Ltd. | Israel | |
MKS Tenta Products Ltd. | Israel | |
MKS Umetrics AB | Sweden | |
Orion Metrology, Inc. | California | |
Spectra Sensortech, Ltd. | United Kingdom | |
Telvac Engineering Limited | United Kingdom | |
Tianjin Yield Co, Ltd. | China | |
Umetrics, Inc. | New Jersey | |
Umetrics (UK) Ltd. | UK | |
Yield Dynamics, LLC | California |