MKS Instruments (MKSI) 10-K2011 FY Annual report

Filed: 24 Feb 12, 12:00am

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New words: ASU, authoritative, Berlinghieri, bought, categorize, Certification, closure, Colella, consecutive, entirety, floor, GAAP, GE, Gerald, Guarantee, hereto, herewith, honor, Instance, Interactive, iv, Language, Leo, Linkbase, MDA, methodology, pattern, radio, retrospectively, Rule, Schema, Smith, Stewart, strongest, Taxonomy, thousand, TPE, unnecessary, VSOE, William, wording, XBRL

Removed: AAA, aerospace, ALD, APC, automotive, bank, climate, concurrent, DC, deployment, enhanced, Frameworkissued, helium, Hemscott, HVAC, integrity, leak, LIBOR, liquidated, modified, noted, ofRegulation, onForm, organized, page, PV, rating, reversal, RF, smallest, tightening, turmoil

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EXHIBIT 21.1

SUBSIDIARIES OF THE REGISTRANT


SUBSIDIARY		JURISDICTION OF INCORPORATION
ASTeX GmbH		Germany
MKS (Bermuda) Ltd.		Bermuda
MKS Denmark APS		Denmark
MKS Germany Holding GmbH		Germany
MKS Instruments (Asia) Ltd.		Bermuda
MKS Instruments (China) Company Ltd.		China
MKS Instruments Deutschland GmbH		Germany
MKS Instruments France S.A.S.		France
MKS Instruments (Hong Kong) Ltd.		Hong Kong
MKS Instruments (Shanghai) Ltd.		Shanghai
MKS Instruments (Singapore) Pte. Ltd.		Singapore
MKS Instruments U.K. Limited		United Kingdom
MKS Japan, Inc.		Japan
MKS Korea Co., Ltd.		Korea
MKS Luxembourg S.A.R.L.		Luxembourg
MKS MSC, Inc.		Massachusetts
MKS Taiwan Technology Ltd.		Taiwan
MKS Technology Limited		United Kingdom
MKS Tega Ltd.		Israel
MKS Tenta Products Ltd.		Israel
MKS Umetrics AB		Sweden
Orion Metrology, Inc.		California
Spectra Sensortech, Ltd.		United Kingdom
Telvac Engineering Limited		United Kingdom
Tianjin Yield Co, Ltd.		China
Umetrics, Inc.		New Jersey
Umetrics (UK) Ltd.		UK
Yield Dynamics, LLC		California

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