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Filing tables
Filing exhibits
- 10-K Annual report
- 10.16 Management Incentive Bonus Plans for Named Executive Officers
- 21.1 Subsidiaries of the Registrant
- 23.1 Consent of Pricewaterhousecoopers LLP
- 31.1 Certification of Principal Executive Officer Pursuant to Section 302
- 31.2 Certification of Principal Financial Officer Pursuant to Section 302
- 32.1 Certification of the CEO and CFO Pursuant to Section 906
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MKSI similar filings
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EXHIBIT 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (No. 333-78069, 333-78071, 333-78073, 333-31224, 333-54486, 333-54488, 333-54490, 333-90498, 333-90500, 333-90502, 333-116385, 333-116387, 333-116389, 333-127221, and 333-161211) and Form S-3 (No. 333-34450 and 333-109753) of MKS Instruments, Inc. of our report dated February 24, 2012 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.
/s/ PricewaterhouseCoopers LLP
Boston, Massachusetts
February 24, 2012