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EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
SUBSIDIARY | JURISDICTION OF INCORPORATION | |||
Alter S.r.l. | Italy | |||
ASTeX GmbH | Germany | |||
MKS Denmark ApS | Denmark | |||
MKS German Holding GmbH | Germany | |||
MKS Instruments (Asia) Ltd. | Bermuda | |||
MKS Instruments (China) Company Limited | China | |||
MKS Instruments Deutschland GmbH | Germany | |||
MKS Instruments Holdings Ltd. | United Kingdom | |||
MKS Instruments (Hong Kong) Limited | Hong Kong | |||
MKS Instruments (Shanghai) Limited | China | |||
MKS Instruments (Singapore) Pte. Ltd. | Singapore | |||
MKS Instruments UK.Limited | United Kingdom | |||
MKS Japan, Inc. | Japan | |||
MKS Korea Ltd. | Korea | |||
MKS Luxembourg S.a.r.l. | Luxembourg | |||
MKS Spectra Holdings Limited | United Kingdom | |||
MKS Taiwan Technology Limited | Taiwan | |||
MKS Technology Limited | United Kingdom | |||
MKS Tega Ltd. | Israel | |||
MKS Tenta Products Ltd. | Israel | |||
MKS Umetrics AB | Sweden | |||
Orion Metrology, Inc. | California | |||
Plasmart, Inc. | Korea | |||
Telvac Engineering Limited | United Kingdom | |||
Umetrics, Inc. | New Jersey | |||
Umetrics UK Limited | United Kingdom |