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Filing tables
Filing exhibits
- S-4 Registration of securities issued in business combination transactions
- 5.1 Opinion of Wilson Sonsini Goodrich & Rosati Regarding the Validity of Securities
- 8.1 Opinion of Wilson Sonsini Goodrich & Rosati Relating to Tax Matters
- 8.2 Opinion of Fredrikson & Byron, P.a.
- 23.1 Consent of Deloitte & Touche LLP
- 23.2 Consent of Bdo Seidman, LLP
- 23.3 Consent of KPMG LLP
- 23.5 Consent of Fredrickson & Bryon, P.a.
- 99.1 Consent of Adams Harkness, Inc.
- 99.2 Consent of Needham & Company, Inc.
- 99.4 Form of Proxy of Nanometrics Incorporated
- 99.5 Form of Proxy of August Technology Corporation
- 99.6 Complaint of John E. Silliman V. August Technology Corporation, Et.al.
- 99.7 Complaint of Robert Etem, Et.al. V. August Technology Corporation, Et.al.
ONTO similar filings
- 22 May 06 Registration of securities issued in business combination transactions (amended)
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- 8 Jun 05 Registration of securities issued in business combination transactions (amended)
- 28 Mar 05 Registration of securities issued in business combination transactions
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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in this Registration Statement on Form S-4 of our report dated March 29, 2004, relating to the financial statements and financial statement schedule of Nanometrics Incorporated for the years ended January 3, 2004 and December 28, 2002, appearing on the Annual Report on Form 10-K of Nanometrics Incorporated for the year ended January 1, 2005. We also consent to the reference to us under the heading “Experts” in this joint Proxy Statement/Prospectus, which is part of this Registration Statement.
/s/ DELOITTE & TOUCHE LLP
San Jose, California
March 25, 2005