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Filing tables
Filing exhibits
- S-4/A Registration of securities issued in business combination transactions
- 8.1 Opinion of Wilson Sonsini Goodrich & Rosati, Professional Corporation
- 8.2 Opinion of Fredrikson & Byron, P.a.
- 8.3 Opinion of Wilson Sonsini Goodrich & Rosati, Professional Corporation
- 23.1 Consent of Deloitte & Touche, LLP, Independent Registered Public Accounting Firm
- 23.2 Consent of Bdo Seidman, LLP, Independent Registered Public Accounting Firm
- 23.3 Consent of KPMG LLP, Independent Registered Public Accounting Firm
- 23.5 Consent of Fredrikson & Byron, P.a.
- 99.1 Consent of Adams Harkness, Inc.
- 99.2 Consent of Needham & Company, Inc.
- 99.4 Form of Proxy of Nanometrics Incorporated
- 99.5 Form of Proxy of August Technology Corporation
ONTO similar filings
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- 8 Jun 05 Registration of securities issued in business combination transactions (amended)
- 28 Mar 05 Registration of securities issued in business combination transactions
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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in this Amendment No. 1 to Registration Statement No. 333-123630 of Nanometrics Incorporated on Form S-4 of our report dated March 29, 2004, relating to the financial statements and financial statement schedule of Nanometrics Incorporated for the years ended January 3, 2004 and December 28, 2002, appearing in the Annual Report on Form 10-K of Nanometrics Incorporated for the year ended January 1, 2005 and to the reference to us under the heading “Experts” in this Joint Proxy Statement/Prospectus, which is part of such Registration Statement.
/s/ DELOITTE & TOUCHE LLP
San Jose, California
June 8, 2005