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Filing tables
Filing exhibits
- S-4 Registration of securities issued in business combination transactions
- 5.1 Opinion of Wilson Sonsini Goodrich & Rosati, Professional Corporation
- 23.1 Consent of Deloitte & Touche Independent Registered Public Accounting Firm
- 23.2 Consent of Bdo Seidman, LLP, Independent Registered Public Accounting Firm
- 23.3 Consent of Pricewaterhousecoopers LLP, Independent Accountants
- 99.1 Consent of Cowen & Co., LLC.
- 99.2 Consent of Merrill, Lynch, Pierce, Fenner & Smith Incorporated
- 99.3 Consent of Persons Named to Become Directors
- 99.4 Form of Proxy of Nanometrics Incorporated
- 99.5 Form of Proxy of Accent Optical Technologies Inc.
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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in this Registration Statement of Nanometrics Incorporated on Form S-4 of our report dated March 29, 2004, relating to the financial statements and financial statement schedule of Nanometrics Incorporated for the year ended January 3, 2004, appearing in the Annual Report on Form 10-K of Nanometrics Incorporated for the year ended December 31, 2005 and to the reference to us under the heading “Experts” in the Joint Proxy Statement/Prospectus, which is part of this Registration Statement.
/s/ Deloitte & Touche LLP
San Jose, California
April 4, 2006