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Content analysis
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New words:
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Removed:
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Filing tables
Filing exhibits
- 10-K Annual report
- 10.1 Form of Indemnification Agreement
- 21 Subsidiaries of the Registrant
- 23.1 Consent of Independent Registered Public Accounting Firm
- 31.1 Certification of Peo Pursuant to Section 302
- 31.2 Certification of Pfo Pursuant to Section 302
- 32.1 Certification of Peo and Pfo Pursuant to Section 906
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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, and 333-136557) of Nanometrics Incorporated of our reports dated March 14, 2007, relating to the consolidated financial statements and financial statement schedule, and the effectiveness of Nanometrics Incorporated’s internal control over financial reporting, which appear in this Form 10-K.
/s/ BDO Seidman, LLP
San Francisco, California
March 14, 2007