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- 10-K Annual report
- 21 Subsidiaries of the Company
- 23 Consent of Independent Registered Public Accounting Firm
- 24.1 Power of Attorney for Frederick Ball
- 24.2 Power of Attorney for Richard J. Faubert
- 24.3 Power of Attorney for Barry L. Harmon
- 24.4 Power of Attorney for W. Arthur Porter
- 24.5 Power of Attorney for Gerald F. Taylor
- 24.6 Power of Attorney for Keith L. Thomson
- 24.7 Power of Attorney for Jon D. Tompkins
- 24.8 Power of Attorney for Robert R. Walker
- 31.1 Certification of the Chief Executive Officer Pursuant to Section 302
- 31.2 Certification of the Interim Chief Financial Officer Pursuant to Section 302
- 32.1 Certification of Chief Executive Officer Pursuant to 18 U.s.c. Section 1350
- 32.2 Certification of Interim Chief Financial Officer Pursuant to 18 U.s.c.
EXHIBIT 23
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
The Board of Directors
Electro Scientific Industries, Inc.:
We consent to the incorporation by reference in the registration statements (Nos. 33-58292, 33-65477, 333-35927, 333-84552 and 333-88727) on Form S-3 and registration statements (Nos. 2-91731, 33-2623, 33-2624, 33-34098, 33-37148, 33-46970, 33-70584, 33-63705, 333-16485, 333-16487, 333-29513, 333-35917, 333-46443, 333-55060, 333-67356 and 333-88411) on Form S-8 of Electro Scientific Industries, Inc. of our reports dated August 14, 2006, with respect to the consolidated balance sheets of Electro Scientific Industries, Inc. as of June 3, 2006 and May 28, 2005 and the related consolidated statements of operations, shareholders’ equity and comprehensive income, and cash flows for each of the years in the three-year period ended June 3, 2006, management’s assessment of the effectiveness of internal control over financial reporting as of June 3, 2006 and the effectiveness of internal control over financial reporting as of June 3, 2006, which reports appear in the June 3, 2006 annual report on Form 10-K of Electro Scientific Industries, Inc.
/s/ KPMG LLP
Portland, Oregon
August 14, 2006