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- 10-K Annual report
- 10.15 Amendment No. 2 to Deferred Compensation Plan 2008 Restatement
- 10.40 Form of Restricted Stock Units
- 10.41 Form of Restricted Stock Units Award
- 10.42 Form of Stock Appreciation Rights Agreement
- 21 Subsidiaries of the Company
- 23 Consent of Independent Registered Public Accounting Firm
- 24.1 Power of Attorney for Frederick Ball
- 24.2 Power of Attorney for Richard J. Faubert
- 24.3 Power of Attorney for Edward C. Grady
- 24.4 Power of Attorney for Barry L. Harmon
- 24.7 Power of Attorney for David Nierenberg
- 24.8 Power of Attorney for Jon D. Tompkins
- 24.9 Power of Attorney for Robert R. Walker
- 31.1 Certification of the Chief Executive Officer Pursuant to Section 302
- 31.2 Certification of the Chief Financial Officer Pursuant to Section 302
- 32.1 Certification of Chief Executive Officer Pursuant to 18 U.s.c. Section 1350
- 32.2 Certification of Chief Financial Officer Pursuant to 18 U.s.c. Section 1350
EXHIBIT 23
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
The Board of Directors
Electro Scientific Industries, Inc.:
We consent to the incorporation by reference in the registration statements (Nos. 033-65477, 333-35927, 333-84552 and 333-88727) on Form S-3 and registration statements (Nos. 033-63705, 333-16485, 333-16487, 333-29513, 333-35917, 333-46443, 333-55060, 333-67356, 333-88411, 333-122660, 333-122661, 333-122662, 333-137878, 333-137879, 333-146107, 333-151804, 333-155978 and 333-162876) on Form S-8 of Electro Scientific Industries, Inc. and subsidiaries of our reports dated June 12, 2012, with respect to the consolidated balance sheets of Electro Scientific Industries, Inc. as of March 31, 2012 and April 2, 2011, and the related consolidated statements of operations, shareholders’ equity and comprehensive income (loss), and cash flows for each of the years in the three-year period ended March 31, 2012, and the effectiveness of internal control over financial reporting as of March 31, 2012, which reports appear in the March 31, 2012 annual report on Form 10-K of Electro Scientific Industries, Inc. and subsidiaries.
/s/ KPMG LLP
Portland, Oregon
June 12, 2012