Zygo (ZIGO) Inactive 10-K2011 FY Annual report

Filed: 13 Sep 11, 12:00am

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Readability	8th grade Avg

New words: absorption, AccuFlat, accuracy, aerial, air, amid, aperture, appeal, ASC, Atomic, attorney, Baldwin, Basila, beam, broader, brought, Bruker, calcium, ceramic, chain, challenging, civilian, clarify, clear, Clinical, coast, combat, comparison, complement, compliant, correction, correctly, Counsel, covenant, CUNO, dermatology, deterministic, dimension, disaggregated, disaster, disease, diversification, DNA, downgrade, driver, DynaFiz, earthquake, East, EPO, EPS, exacting, eye, fighter, FLIR, fluorescent, fluoride, Frameworkissued, freeform, French, fused, gathering, genomic, grinding, hard, Hawk, hired, hurricane, illumination, impractical, inInternal, ion, isolation, iv, Jordan, LeCroy, machinery, metal, micro, microscope, millimeter, mission, Moore, navigation, northeastern, Output, parameter, perturb, plastic, Predator, proceeding, Professor, progressive, prohibited, prominent, proper, QPZ, Ratheon, reassessed, refined, relief, repatriation, restoration, restoring, resumed, Richmond, rotary, rubber, scanning, School, Secretary, shortly, silica, smart, space, spectral, stand, stockpile, strength, Strike, suffer, sustainable, sustained, synergistic, tactical, teaching, terrorism, Tomich, traditionally, transparent, tsunami, ultraviolet, unaffected, uncontrolled, visible, visualize, vulnerable, war, weigh, white, wing, ZeGage, ZeScope

Removed: achievement, acquirer, airborne, aircraft, assure, auction, bargain, battlefield, biomedical, border, canceled, cell, commencing, deep, deposit, die, discussed, Drug, EMI, enrolled, evidenced, fast, fathom, finance, fire, FMI, Food, forfeited, forfeiture, found, GPI, GSI, head, homeland, human, inclusion, individual, interference, interpretation, labeled, lapse, magnetic, mainstream, marketplace, Mattson, maturing, mm, Moir, monitoring, NIF, nm, paragraph, parent, path, PE, perimeter, photolithographic, prototype, regulated, released, remote, resource, retained, satellite, satisfactory, seaport, sector, sensing, sight, singulation, sophisticated, sorting, stealth, target, top, tracking, ubiquity, unqualified, Veeco, weapon, week, withheld

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EXHIBIT 21

SUBSIDIARIES OF ZYGO CORPORATION (DELAWARE)

Zygo KK (Japan)

100% owned by Registrant (effective as of October 1, 1999)

Zygo PTE LTD (Singapore)

100% owned by Registrant (effective as of January 1, 1998)

ZygoLamda Metrology Instrument (Shanghai) Co., Ltd. (China)

66% owned by Zygo PTE LTD (effective as of April 3, 2008)

Zygo Germany, GmbH (Germany)

100% owned by Registrant (effective as of December 1, 2006)

ZygoLOT GmbH (Germany)

60% owned by Zygo Germany, GmbH (effective as of December 28, 2006)

Six Brookside Drive (Connecticut)

100% owned by Registrant (effective as of January 9, 1998)

Zygo Canada Inc. (Canada)

100% owned by Registrant (effective as of February 22, 2008)

Zygo Singapore Inspection Systems PTE. LTD. (Singapore)

100% owned by Zygo Canada Inc. (effective as of February 28, 2008)

Zemetrics (Arizona)

100% owned by Registrant (effective as of January 22, 2010)

Zygo Richmond, Inc. (California)

100% owned by Registrant (effective as of November 12, 2010)