Zygo (ZIGO) Inactive 10-K2012 FY Annual report

Filed: 13 Sep 12, 12:00am

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New words: Albany, andVeriFire, andZeScope, Berliner, Canadian, catastrophic, CNSE, College, compact, consortium, COSO, Domain, effort, EUV, expressed, Fourier, German, GmbH, greatly, Gunther, ineffective, legislation, manual, mix, motorized, Nanoscale, NanoTech, newest, OurVeriFire, penalty, predominant, prepaid, pursue, qualitative, receipt, reinstated, roadmap, robust, ruler, Science, SEMATECH, stable, stitch, straight, symbiotic, theMini, TheMiniinterferometer, theNano, theNewView, theverifire, theZeGage, touchscreen, true, unchanged, uncompleted, Unforeseen, user, XY, yearend, York, yuan, ZygoLot, ZygoNewView, ZygoVeriFire

Removed: absolute, art, assistance, attestation, automated, Bruce, cancelled, case, collectibility, conceived, concentrate, continually, deem, detect, displacement, distribution, edge, Elcan, emerging, enumerated, ESI, establishment, exclusive, executed, execution, favor, fee, finalized, foot, forecasted, FPD, identifying, implemented, injection, injector, Institute, intent, LLC, matching, matter, measuring, merge, merger, MetroPro, nano, NewView, notably, Oregon, par, partnership, precedent, recommendation, refunded, reorganization, repeatably, requirement, Robinson, salary, satisfaction, scope, sealing, sensor, serviced, shaped, Shephard, square, submit, submitted, summarizing, termination, tolerance, unifire, UV, Walter, withdrawal, Zetetic, Zirkon

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EXHIBIT 21

SUBSIDIARIES OF ZYGO CORPORATION (DELAWARE)

Zygo KK (Japan)
100% owned by Registrant (effective as of October 1, 1999)

Zygo PTE LTD (Singapore)
100% owned by Registrant (effective as of January 1, 1998)

ZygoLamda Metrology Instrument (Shanghai) Co., Ltd. (China)
66% owned by Zygo PTE LTD (effective as of April 3, 2008)

Zygo Germany, GmbH (Germany)
100% owned by Registrant (effective as of December 1, 2006)

ZygoLOT GmbH (Germany)
60% owned by Zygo Germany, GmbH (effective as of December 28, 2006)

Six Brookside Drive (Connecticut)
100% owned by Registrant (effective as of January 9, 1998)

Zygo Canada Inc. (Canada)
100% owned by Registrant (effective as of February 22, 2008)

Zemetrics (Arizona)
100% owned by Registrant (effective as of January 22, 2010)

Zygo Richmond, Inc. (California)
100% owned by Registrant (effective as of November 12, 2010)

Zygo Taiwan Co., LTD (Taiwan)
100% owned by Registrant (effective as of July 21, 2012)