Ibis Technology (IBIS) 10-K 2006 FY Annual report

EXHIBIT 32.1

CERTIFICATION PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

(18 U.S.C. SECTION 1350)

In connection with the accompanying Annual Report of Ibis Technology Corporation (the “Company”) on Form 10-K for the fiscal year ended December 31, 2006 (the “Report”), I, Charles M. McKenna, Ph.D., Chief Executive Officer of the Company, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that to my knowledge:

(1)  The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2)  The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company

Dated: March 26, 2007

/s/ Charles M. McKenna, Ph.D.

Charles M. McKenna, Ph.D.

President and Chief Executive Officer