192 patents
Utility
Load-Lock Gauge
18 Jan 24
A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber.
Gerardo A. Brucker
Filed: 27 Sep 23
Utility
Laser measurement apparatus having a removable and replaceable beam dump
16 Jan 24
The present application discloses an apparatus configured to measure characteristics of high power beams of laser energy used in material processing.
Oleg Zinoviev, Karol Sanilevici, Alexandr Superfin
Filed: 14 Jan 22
Utility
Black Plated Substrate
11 Jan 24
The present invention relates to a black plated substrate comprising a base-substrate and deposited thereon a layer stack, wherein the layer stack comprises a black chromium plating layer comprising on its surface a conversion layer having a depth of 30 nm or more, characterized in that the conversion layer does not comprise metallic chromium or comprises metallic chromium only up to 2 at.-%, based on the element chromium and the total number of chromium atoms in the conversion layer.
Berkem ÖZKAYA, Philipp WACHTER, Michael JONAT
Filed: 10 Dec 21
Utility
Method for Etching at Least One Surface of a Plastic Substrate
4 Jan 24
The present invention relates to a method for etching at least one surface of a plastic substrate, the method comprising steps (A) to (C), wherein step (B) comprises a contacting with a pre-treatment composition comprising one or more than one fluorine-free surface active compound, and step (C) comprises a contacting with an etching composition comprising chromic acid, wherein after step (B) and prior to step (C) no rinsing is applied, and the etching composition is substantially free of fluorine-containing surface active compounds.
Frank BAYER, Carl Christian FELS, Philip HARTMANN
Filed: 23 Nov 21
Utility
Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein
28 Nov 23
Systems and methods are described for dissolving ammonia gas in deionized water.
Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
Filed: 28 Aug 20
Utility
Thermopile Laser Sensor with Response Time Acceleration and Methods of Use and Manufacture
23 Nov 23
The present application discloses an improved thermopile laser sensor apparatus and methods of use.
Ephraim GREENFIELD, Julian MARSDEN, Ephraim ROTEM
Filed: 28 Sep 21
Utility
Impedance matching in a RF power generation system
21 Nov 23
An impedance matching network including a mixing module.
Kwang Ho Kim, Jaechul Jung, Changhee Lee, Hohyoung Lee, Jongmin Kim
Filed: 15 Oct 21
Utility
Methods and Systems for Feedback Control in Plasma Processing Using Radical Sensing
16 Nov 23
An apparatus for feedback control in plasma processing systems using radical sensing, and a method for feedback control in plasma processing systems using radical sensing, the apparatus comprising at least one process gas supply system configured to output at least one process gas, at least one plasma source configured to receive the at least one process gas and generate at least one radical flow, at least one process chamber in communication with the at least one plasma source, wherein the process chamber receives the at least one radical flow and directs at least a portion of the at least one radical flow to one or more devices, the process chamber configured to output at least one process chamber output, at least one gas analyzer in communication with and configured to sample at least one of the at least one process gas, at least one radical flow, at least one radical flow within the at least one process chamber, and the at least one process chamber output, and at least one controller in communication with at least one of the process gas supply system, at least one plasma source, and at least one process chamber, the controller configured to generate at least one control signal based on data from the at least one gas analyzer and selectively control at least one of the process gas supply system, at least one plasma source, and at least one process chamber.
Keith K. Koai, Chenglong Yang, Guy Rosenzweig, Jimmy Liu, Michael Harris, James Blessing
Filed: 9 Nov 22
Utility
Thermal Conductivity Gauge
16 Nov 23
A thermal conductivity gauge measures gas pressure within a chamber.
Gerardo A. Brucker, Timothy C. Swinney
Filed: 19 Apr 23
Utility
Method for Metallizing a Non-metallic Substrate and Pre-treatment Composition
9 Nov 23
The present invention relates to a method for metallizing a non-metallic substrate, the method comprising the steps (A) to (C), wherein step (A) is a pre-treatment step for etching and step (C) the metallization step.
Brigitte DYRBUSCH, Franziska FINN, Carl Christian FELS
Filed: 23 Aug 21
Utility
Intermodulation distortion mitigation using electronic variable capacitor
7 Nov 23
A matching network for a system having a non-linear load and powered by a first RF power supply operating at a first frequency and a second RF power supply operating at a second frequency.
Jin Huh, Aaron T. Radomski, Duy Nguyen, Soohan Kim
Filed: 13 Dec 21
Utility
Thermal conductivity pressure gauge with heated chamber wall
7 Nov 23
A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients.
Gerardo A. Brucker, Timothy C. Swinney
Filed: 3 Nov 21
Utility
Load-lock gauge
31 Oct 23
A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber.
Gerardo A. Brucker
Filed: 21 Jan 21
Utility
a Method for Activating a Surface of a Non-conductive or Carbon-fibres Containing Substrate for Metallization
26 Oct 23
The present invention relates to a method for treating a surface of a non-conductive or carbon-fibers containing substrate using a conditioning step a selector treatment step and an activating step.
André BEYER, Laurence John GREGORIADES, Stefan KEMPA, Julia LEHMANN, Yvonne WELZ
Filed: 26 Aug 21
Utility
Coatings for Use In Remote Plasma Source Applications and Method of Their Manufacture
19 Oct 23
A method of coating a plasma channel of a plasma source, comprises providing at least one electrolyte having one or more chelating agents therein, treating at least one surface to produce a processed surface, smoothing the surface of the processed surface with at least one post processing technique to produce at least one smoothed processed surface, and cleaning the smoothed surface.
Chiu-Ying TAI, Michael HARRIS
Filed: 13 Apr 23
Utility
Compostion for Depositing a Palladium Coating on a Substrate
12 Oct 23
Donny LAUTAN, Dmytro VOLOSHYN, Isabel-Roda HIRSEKORN, Dirk TEWS, Robert SPREEMANN
Filed: 31 Aug 21
Utility
Adaptive Pulse Shaping With Post Match Sensor
12 Oct 23
A power generator includes a power source and a control module coupled to the power source.
Jonathan SMYKA, Aaron RADOMSKI, Peter PAUL, Aaron BURRY
Filed: 13 Jun 23
Utility
Real-Time, Non-Invasive IEDF Plasma Sensor
12 Oct 23
A controller for a plasma generation system includes a model evaluation module receives a sensed value that varies in accordance with a state of a plasma controlled by a RF power generator.
Linnell MARTINEZ, David MILLER, Eldridge MOUNT, IV, Peter PAUL, Aaron RADOMSKI
Filed: 7 Apr 22
Utility
Copper Electroplating Bath
5 Oct 23
The invention relates to aqueous acidic plating baths for electrodeposition of copper and copper alloys in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications.
Heiko BRUNNER, Sandra HEYDE, Peter HAACK, Angela LLAVONA-SERRANO
Filed: 29 Jun 21
Utility
Method and Apparatus for Mass Flow Verification
28 Sep 23
Devices and methods for mass flow verification are provided.
Junhua Ding, Michael L'Bassi
Filed: 23 Mar 22