192 patents
Page 2 of 10
Utility
Ion source with gas delivery for high-fidelity analysis
26 Sep 23
In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas.
James Edward Blessing
Filed: 6 Jan 22
Utility
Valve Apparatuses and Related Methods for Reactive Process Gas Isolation and Facilitating Purge During Isolation
21 Sep 23
An isolation valve assembly is provided that includes a valve body having an inlet and an outlet, a sealing body disposed within an interior cavity of the valve body, and an actuatable closure element disposed within the valve body.
Andrew Cowe, Ron Collins
Filed: 25 May 23
Utility
Nano-Textured Attenuator for Use with Laser Beam Profiling and Laser Beam Characterization Systems and Method of Use
21 Sep 23
The present application discloses a nano-textured attenuator which includes a body defining an input aperture, a measurement aperture, and at least one beam dump aperture.
Kevin Kirkham, Kenneth Ferree
Filed: 9 Apr 23
Utility
Method for monitoring the total amount of sulphur containing compounds in a metal plating bath
19 Sep 23
The present invention relates to a method for monitoring the total amount of sulphur containing compounds in a metal or metal alloy plating bath, wherein the sulphur containing compounds contain at least one sulphur atom having an oxidation state below +6, the method comprising the steps (a), (b), optionally (c), and (d).
Andreas Kirbs, Christian Wendeln, Edith Steinhäuser, Sebastian Zarwell, Kevin-Sigurt Gottschalk, Mayumi Nishikido
Filed: 2 Dec 16
Utility
Zoom Lens With Dual-Rail Guide System
14 Sep 23
The present application discloses a zoom lens assembly having a first static lens group and a second static lens group defining an assembly optical axis secured to a lens support.
Nahum Ahituv
Filed: 10 Mar 22
Utility
Endpoint detection of deposition cleaning in a pumping line and a processing chamber
5 Sep 23
A method is provided for cleaning of a processing system comprising a wafer processing chamber and a pumping line in fluid connection with the wafer processing chamber.
Gordon Hill
Filed: 11 Aug 20
Utility
Low profile heater apparatus and method of manufacture
22 Aug 23
A novel low profile heater apparatus and method of manufacture is disclosed, which provides a lower assembly including a first sheet, a heating sheet including at least one heating element, a dielectric sheet, an intermediate sheet and one or more electrical leads configured to supply electrical power to the heating element, the electrical leads extending through a lead sleeve of an upper assembly.
Jeffrey D. Kiernan
Filed: 19 Mar 20
Utility
Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use
22 Aug 23
The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the compound stream flowing within the sampling tube based on the measured temperature change of the sampling tube.
Johannes Chiu, Xing Chen, Chiu-Ying Tai, Michael Harris, Atul Aupta
Filed: 25 Jan 22
Utility
Heated Throttle Valve Apparatus and Methods of Use and Manufacture
17 Aug 23
A heated throttle valve apparatus is disclosed herein, which includes a valve system with a valve driver configured to provide a rotational force to a valve assembly via a thermal isolating drive coupler configured to prevent the transfer of thermal energy from the valve assembly to the valve driver.
Robert M. CURRY, Andrew B. COWE
Filed: 21 Apr 23
Utility
System and method of power generation with phase linked solid-state generator modules
8 Aug 23
A method of generating power with a power generation system.
Francesco Braghiroli
Filed: 22 May 20
Utility
Processing Apparatus, System and Method for Conveying Therethrough Parts to Be Treated and Device for Interconnecting a First Line and a Second Line of the System
3 Aug 23
A device for interconnecting a first line (1 a) and a second line (1 b) of an overhead conveying system for conveying parts to be treated through a processing apparatus by means of at least one product carrier (7) comprising a transporter (19) and a part depending downwards from the transporter (19), in use, the transporter (19) comprising at least one runner (36,37) supported on at least one track (10a,b) comprises a main support structure (47).
Josef UNTERLUGGAUER, Matthias RITTER, Olaf LORENZ, Zhenhan HUANG
Filed: 9 Jul 21
Utility
Adaptive pulse shaping with post match sensor
1 Aug 23
A RF generator includes a RF power source and a RF control module coupled to the RF power source.
Jonathan W. Smyka, Aaron T. Radomski, Peter Paul, Aaron M. Burry
Filed: 9 Aug 21
Utility
Electroless Nickel or Cobalt Plating Solution
27 Jul 23
Kadir TUNA, Thiago PUGLIESI GARCIA
Filed: 10 Jun 21
Utility
Laser Measurement Apparatus Having a Removable and Replaceable Beam Dump
20 Jul 23
The present application discloses an apparatus configured to measure characteristics of high power beams of laser energy used in material processing.
Oleg Zinoviev, Karol Sanilevici, Alexandr Superfin
Filed: 14 Jan 22
Utility
Pulse And Bias Synchronization Methods And Systems
13 Jul 23
A radio frequency (RF) generator includes a RF power source configured to output an RF power signal, and a controller coupled to the RF power source.
Mariusz OLDZIEJ, Aaron RADOMSKI, Aaron BURRY, Michael KIRK
Filed: 20 Dec 22
Utility
an Aqueous Basic Etching Composition for the Treatment of Surfaces of Metal Substrates
13 Jul 23
Lars KOHLMANN, Heiko BRUNNER
Filed: 10 Jun 21
Utility
Demagnetizing Coils For Linearity Improvement Of Current Ratio Of Plasma Processing Systems
6 Jul 23
A RF power generator has a RF power source configured to generate an output signal.
Dinh-Vuong LE, Jaechul JUNG, Hohyoung LEE, Jeongseok JANG, Ngoc-Hung NGUYEN
Filed: 30 Dec 21
Utility
Device and System for Transporting a Plurality of Parts to Be Treated Through an Apparatus for Wet-chemical Treatment
6 Jul 23
A device for transporting parts through an apparatus for wet-chemical treatment includes a transporter including at least one runner for supporting the transporter for movement along a track in a first direction (x).
Steffen SEUß, Christian THOMAS, Josef UNTERLUGGAUER, Olaf LORENZ, Stefan BUTTER, Patrick ZASCHKA
Filed: 18 May 21
Utility
Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content
4 Jul 23
Systems and methods are described for supplying a rinsing liquid including ultrapure water and an ammonia gas.
Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
Filed: 7 Apr 20
Utility
Method and apparatus for plasma generation
30 May 23
A plasma source is provided that includes a body defining an input port, an output port, and at least one discharge section extending along a central longitudinal axis between the input port and the output port.
Gordon Hill, Andrew Cowe, Ron Collins, Larry Bourget
Filed: 2 Aug 21