15 patents
Utility
Method for Operating a Group of Pressure Sensors
23 Nov 23
Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1′ with a first pressure measurement range and a second pressure sensor 1″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data.
Bernhard ANDREAUS, Rolf ENDERES, Christian BERG, Martin WÜEST
Filed: 14 Oct 20
Utility
Operating Method for a Group of Pressure Sensors
16 Nov 23
A method for operating a group of pressure sensors is provided.
Christian BERG, Rolf ENDERES, Martin WÜEST, Bernhard ANDREAUS
Filed: 14 Oct 20
Utility
Method of Detecting Radicals Using Mass Spectrometry
6 Jul 23
A method for detecting radicals in process gases in a semiconductor fabrication assembly is provided where the semiconductor fabrication includes a plasma source and a mass spectrometer with an ion source.
Norbert Mueller
Filed: 31 May 22
Utility
Time-of-flight Mass Spectrometer Assembly with a Secondary Flange
6 Jul 23
A time-of-flight mass spectrometer assembly includes a flange with a vacuum chamber facing surface and an environment facing surface.
Mario Weder, Michael Vollero, Nigel Sousou
Filed: 10 May 22
Utility
System and Method for Monitoring Semiconductor Processes
4 May 23
A system and method for monitoring a semiconductor process includes a plurality of sensors and a microcontroller.
Matan Lapidot, Mohamed Buhary Rinzan, Chunhua Song
Filed: 2 Mar 21
Utility
Method for Determining a Pressure In a Pressure Measurement Cell and a Measurement Cell Assembly
27 Apr 23
The invention relates to a method and to a measurement cell assembly for determining a pressure in a pressure cell (2) are given, wherein the method consists in that a measurement signal (x) is determined, which is at least proportional to a measured pressure in the pressure cell (2), and in that the measurement signal (x) is filtered by means of a first filter unit (10) having a low-pass characteristic in order to produce an output signal (y), wherein the low-pass characteristics of the first filter unit (10) is defined by means of a first damping factor (α1).
Felix MULLIS
Filed: 18 Feb 20
Utility
a Method for Displaying Concentration Data of a Substance and an Associated Apparatus
23 Mar 23
A method for displaying gas concentration values on a graphical display of a leak detector comprises detecting a presence of a gas using a gas sensor.
Elliot Gerard
Filed: 2 Jul 19
Utility
Vacuum-tight Electrical Feedthrough
27 Oct 22
Stefan KAISER, Bernhard ANDREAUS
Filed: 20 Sep 19
Utility
Method for Detecting Pressure, and Pressure Sensor
20 Oct 22
Carsten STRIETZEL, Urs WÄLCHLI, Stefan KAISER, Christian RIESCH, Bernhard ANDREAUS, Mario WEDER
Filed: 20 Sep 19
Utility
Unconsumed Precursor Monitoring
8 Sep 22
A monitoring device for monitoring a fabrication process in a fabrication system.
Mohamed Buhary Rinzan, Chunhua Song, Steve James Lakeman
Filed: 16 May 22
Utility
Ion Source Assembly with Multiple Ionization Volumes for Use In a Mass Spectrometer
26 May 22
An ion source assembly for use in a mass spectrometer comprises a first anode defining a first ionization volume and a first electron source positioned proximate the first anode and configured to generate electrons that pass through the first anode and into the first ionization volume.
Michael F. Vollero
Filed: 24 Jun 21
Utility
Gas Analyzer and Membranes Therefor
14 Oct 21
A gas analyzer and a method for performing mass spectrometry analysis includes a membrane configured to receive an input flow of carrier gas.
Shawn M. Briglin
Filed: 13 Apr 21
Utility
Chemical Analysis Device and Method
2 Dec 20
Methods and systems for chemical analysis.
Kenneth C. Wright, Jaime L. Winfield, Peter Santariello
Filed: 20 Aug 20
Utility
Monitoring Thin Film Deposition
14 Oct 20
A system for monitoring thin film deposition is described.
Mohamed B. Rinzan
Filed: 24 Jun 20
Utility
Chemical Analysis Device and Method
13 Nov 19
Methods and systems for chemical analysis.
Kenneth C. Wright, Jaime L. Winfield, Peter Santafiello
Filed: 7 May 19
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