17 patents
Utility
Time-of-flight mass spectrometer assembly with a secondary flange
16 Jan 24
A time-of-flight mass spectrometer assembly includes a flange with a vacuum chamber facing surface and an environment facing surface.
Mario Weder, Michael Vollero, Nigel Sousou
Filed: 10 May 22
Utility
Method for displaying concentration data of a substance and an associated apparatus
12 Dec 23
A method for displaying gas concentration values on a graphical display of a leak detector comprises detecting a presence of a gas using a gas sensor.
Elliot Gerard
Filed: 2 Jul 19
Utility
Method of detecting radicals using mass spectrometry
10 Oct 23
A method for detecting radicals in process gases in a semiconductor fabrication assembly is provided where the semiconductor fabrication includes a plasma source and a mass spectrometer with an ion source.
Norbert Mueller
Filed: 31 May 22
Utility
Method for the controlled removal of a protective layer from a surface of a component
11 Jul 23
Bernhard Andreaus, Claudio Christoffel, Philip Spring
Filed: 14 May 18
Utility
Ion source assembly with multiple ionization volumes for use in a mass spectrometer
23 May 23
An ion source assembly for use in a mass spectrometer comprises a first anode defining a first ionization volume and a first electron source positioned proximate the first anode and configured to generate electrons that pass through the first anode and into the first ionization volume.
Michael F. Vollero
Filed: 24 Jun 21
Utility
Gas analyzer and membranes therefor
31 Jan 23
A gas analyzer and a method for performing mass spectrometry analysis includes a membrane configured to receive an input flow of carrier gas.
Shawn M. Briglin
Filed: 13 Apr 21
Utility
Unconsumed precursor monitoring
17 May 22
A monitoring device for monitoring a fabrication process in a fabrication system.
Mohamed Buhary Rinzan, Chunhua Song, Steve James Lakeman
Filed: 24 Aug 18
Utility
Chemical analysis device and method
22 Mar 22
Methods and systems for chemical analysis.
Kenneth C. Wright, Jaime L. Winfield, Peter Santariello
Filed: 21 Aug 20
Utility
Process monitoring using crystal with reactance sensor
16 Nov 21
Devices, systems and methods for process monitoring are presented.
Mohamed Buhary Rinzan
Filed: 17 Mar 17
Utility
Ionization vacuum measuring cell
2 Nov 21
The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other.
Martin Wüest
Filed: 23 Sep 15
Utility
Method for processing a measurement signal from a pressure measurement cell, and a measurement cell arrangement
8 Jun 21
Method for determining a pressure in a pressure cell, the method consisting in determining a measuring signal (x) that is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measuring signal (x) using a filter unit (10) comprising a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measuring signal determining a change over time of the measuring signal (x), and setting the transfer function as a function of the change over time of the measuring signal (x).
Felix Mullis
Filed: 10 Feb 16
Utility
Vacuum bell probe and method for leak detection
18 May 21
A vacuum bell probe for detecting leaks in underground gas pipes may include a flexible suction cup having a bottom side forming a suction opening.
Fredrik Enquist, Henrik Vennerberg
Filed: 13 Feb 17
Utility
Wide range gas detection using an infrared gas detector
14 Dec 20
Method for wide range gas detection using a gas detection system comprising a sample gas inlet, a reference gas inlet, a gas modulation valve and a gas analyzer, wherein the gas modulation valve alternatingly connects the sample gas inlet to the gas analyzer during a sample gas time period and the reference gas inlet to the gas analyzer during a reference gas time period, characterized in that the sample gas time period is shorter than the reference gas time period such that the sample gas concentration in the gas analyzer is reduced.
Johan Hellgren, Fredrik Enquist, Henrik Vennerberg
Filed: 5 Jan 17
Utility
Optical detection of tracer gases in a gas discharge cell having unexposed electrodes
21 Sep 20
Tracer gas sensing device comprising a gas discharge cell having cell walls defining a discharge volume and a tracer gas inlet into the discharge volume, an optical spectrometer arrangement having a radiation source on a first side of the discharge cell for emitting radiation into the discharge cell and a radiation detector on a second side of the discharge cell opposite to the first side for detecting radiation which was emitted by the radiation source through the discharge volume, and electrodes on opposing sides of the discharge cell for generating a plasma within the discharge cell, said electrodes being unexposed plasma electrodes.
Vladimir Schwartz, Boris Chernodbrod
Filed: 13 Oct 16
Utility
Chemical analysis device and method
24 Aug 20
Methods and systems for chemical analysis.
Kenneth C. Wright, Jaime L. Winfield, Peter Santariello
Filed: 7 May 19
Utility
Monitoring thin film deposition
6 Jul 20
A system for monitoring thin film deposition is described.
Mohamed Buhary Rinzan
Filed: 2 Oct 14
Utility
Creating a mini environment for gas analysis
9 Dec 19
Systems and methods for in-situ leak detection and endpoint detection of wafer dry etch or chamber clean in chambers, e.g., vacuum chambers used in semiconductor processing.
Chenglong Yang
Filed: 4 Oct 16
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