1619 patents
Page 2 of 81
Utility
Sputtering Target
4 Jan 24
A sputtering target includes a gallium nitride-based crystalline body composed of a plurality of gallium nitride-based monocrystalline grains whose c-axes are orientated in a direction normal to a predetermined surface.
Kentaro NONAKA, Yoshinori ISODA, Katsuhiro IMAI
Filed: 12 Sep 23
Utility
Member for Semiconductor Manufacturing Apparatus
4 Jan 24
A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface; a conductive base plate; a gas common passage provided inside the base plate; gas outlet passages provided to reach the wafer placement surface from the gas common passage; at least one gas inlet passage provided to communicate with the gas common passage from a lower surface of the base plate; and an insulating sleeve disposed in a base plate through-hole.
Mitsuru KOJIMA, Hiroshi TAKEBAYASHI, Jyunya WAKI
Filed: 9 Mar 23
Utility
Composite Substrate, Method for Producing Composite Substrate, and Method for Producing Gallium Oxide Crystal Film
4 Jan 24
A composite substrate includes: a base substrate and an α-Ga2O3 crystal film that is provided on the base substrate, has a thickness of 10 μm or more, and has at least one alkali metal element content of 1.2×1015 atoms/cm3 or more and 1.0×1018 atoms/cm3 or less.
Jun YOSHIKAWA, Miho MAEDA, Hiroyuki SHIBATA
Filed: 19 Sep 23
Utility
Member for Semiconductor Manufacturing Apparatus
4 Jan 24
A member for a semiconductor manufacturing apparatus, the member has a wafer placement surface and includes: a plurality of gas outflow passages each having an opening on the wafer placement surface; a common gas passage that is in communication with the plurality of gas outflow passages; and at least one gas inflow passage that is in communication with the common gas passage from a surface of the member for a semiconductor manufacturing apparatus that is on an opposite side from the wafer placement surface, the number of the at least one gas inflow passage being smaller than the number of the gas outflow passages in communication with the common gas passage.
Mitsuru KOJIMA, Hiroshi TAKEBAYASHI, Jyunya WAKI
Filed: 9 Mar 23
Utility
Gas Sensor Element and Gas Sensor
4 Jan 24
A sensor element includes: an element body including an oxygen-ion-conductive solid electrolyte layer; and a protective layer that covers at least part of the element body and is a porous body having a plurality of pores thereinside.
Ryo ONISHI, Kaoru SHIBUTANI
Filed: 14 Sep 23
Utility
Member for Semiconductor Manufacturing Apparatus
4 Jan 24
A member for semiconductor manufacturing apparatus of the present invention includes an AlN ceramic substrate with a surface provided with projections for wafer placement.
Yusuke OGISO
Filed: 15 Sep 23
Utility
Gas separation method and gas separator
2 Jan 24
A gas separator includes a separation membrane complex in which a separation membrane with pores having a mean pore diameter less than or equal to 1 nm is formed on a porous support, and a gas supply part that supplies a mixed gas including CO2 and another gas from the side of the separation membrane to the separation membrane complex.
Kenichi Noda, Kenji Yajima, Katsuya Shimizu
Filed: 17 Mar 21
Utility
Support, zeolite membrane complex, method of producing zeolite membrane complex, and separation method
2 Jan 24
A porous cylindrical support for use in supporting a zeolite membrane has a generally cylindrical inside surface having a central axis extending in the longitudinal direction and a generally cylindrical outside surface that surrounds the inside surface.
Kenichi Noda
Filed: 15 Mar 21
Utility
Method for producing honeycomb structure
2 Jan 24
A method for producing a honeycomb structure 1 having a slit 12 includes: a first step of preparing a honeycomb structure 1 being free from slit, and forming the slit 12 leaving at least a part of the outer peripheral wall 10 or the partition wall 11; after the first step, a second step of filling the slit 12 with a joining material 13; and after the second step, a third step of removing at least a part of the outer peripheral wall 10 or the partition wall 11 left in the first step to obtain the honeycomb structure 1 having the slit 12 that divides the honeycomb structure 1.
Yuto Naito
Filed: 29 Oct 21
Utility
Flow path member for heat exchanger, and heat exchanger
2 Jan 24
A flow path member for a heat exchanger includes: an inner cylinder capable of housing a heat recovery member through which a first fluid can flow; an outer cylinder having a feed port capable of feeding a second fluid and a discharge port capable of discharging the second fluid, the outer cylinder being disposed so as to be spaced on a radially outer side of the inner cylinder such that a flow path for the second fluid is formed between the outer cylinder and the inner cylinder; a feed pipe connected to the feed port; and a discharge pipe connected to the discharge port.
Tatsuya Akahani, Tatsuo Kawaguchi, Makoto Yoshihara
Filed: 15 Sep 21
Utility
Group-III element nitride semiconductor substrate
2 Jan 24
Group-III element nitride semiconductor substrate including a first surface and a second surface that are easy to visually distinguish from each other.
Katsuhiro Imai, Masahiro Sakai, Hiroki Kobayashi
Filed: 17 Feb 23
Utility
Lithium ion conductive material, all-solid-state secondary battery, and method of manufacturing solid electrolyte
2 Jan 24
A lithium ion conductive material has a composition formula of Lia(OH)bFcBr, where 1.8≤a≤2.3, b=a−c−1, 0.01≤c≤0.11, and includes an antiperovskite-type crystal phase.
Miyuki Kojima, Keita Miyanishi, Yosuke Sato, Yuji Katsuda
Filed: 16 Sep 20
Utility
Air electrode/separator assembly and metal-air secondary battery
2 Jan 24
Provided is an air electrode/separator assembly including: a hydroxide ion conductive dense separator; an interface layer containing a hydroxide ion conductive material and an electron conductive material and covering one side of the hydroxide ion conductive dense separator; and an air electrode layer provided on the interface layer and including an outermost catalyst layer composed of a porous current collector and a layered double hydroxide (LDH) covering a surface thereof.
Ozora Kano, Naomi Hashimoto, Naomi Saito
Filed: 29 Oct 21
Utility
Method of Evaluating Separation Membrane Module
28 Dec 23
A method of evaluating a separation membrane module includes a step of supplying a performance degradation gas having a property of reducing permeance of a separation membrane to a primary side of the separation membrane, and a step of, after the previous step, supplying an evaluation fluid to the primary side of the separation membrane to measure a flow rate of the evaluation fluid to a secondary side of the separation membrane.
Katsuya SHIMIZU, Makiko ICHIKAWA, Kenichi NODA, Naoto KINOSHITA
Filed: 13 Sep 23
Utility
Separation Membrane Complex and Method of Producing Separation Membrane Complex
28 Dec 23
A separation membrane complex includes a porous support, an intermediate membrane which is a polycrystalline membrane formed on a surface of the support and has pores that are originated from a framework structure and have an average pore diameter smaller than that of pores in the vicinity of the surface of the support, and a separation membrane which is formed on the intermediate membrane and is an inorganic membrane having a regular pore structure.
Makoto MIYAHARA, Kenichi NODA
Filed: 13 Sep 23
Utility
Wafer Placement Table
28 Dec 23
A wafer placement table includes a ceramic substrate that has a wafer placement surface on an upper surface, a first cooling substrate formed of a composite material of metal and ceramic or a low thermal expansion metal material, a metal joining layer that joins ceramic substrate and the first cooling substrate to each other, a second cooling substrate in which a refrigerant flow path is formed, a heat dissipation sheet disposed between the first cooling substrate and the second cooling substrate, a screw hole that opens in the lower surface of the first cooling substrate, a through hole that is provided at a position facing the screw hole and that extends through the second cooling substrate in an up-down direction, and a screw member that is inserted into the through hole from a lower surface of the second cooling substrate and that is screwed into the screw hole.
Tatsuya KUNO, Masaki ISHIKAWA
Filed: 30 Jun 23
Utility
Solid Electrolyte, Method of Producing Solid Electrolyte, and Battery
28 Dec 23
A solid electrolyte is composed primarily of a component expressed by a composition formula of Lia+dMbXcAeOf by using values a to f that are greater than 0, where M is an element serving as a trivalent cation, X is a halogen element, and A is a sulfur element or a phosphorus element, wherein 0.8c≤(a+3b)≤1.2c and 1.6f≤(d+n×e)≤2.4f are satisfied, where when A is a sulfur element, n is 4 or 6, and when A is a phosphorus element, n is 5.
Yosuke SATO, En YAGI, Satoshi OZAKI, Toshihiro YOSHIDA, Yuji KATSUDA, Mizuki HIROSE, Reona MIYAZAKI
Filed: 6 Sep 23
Utility
Wafer Placement Table
28 Dec 23
A wafer placement table includes an upper substrate including a ceramic substrate and having a wafer placement surface, a lower substrate disposed on a lower surface of the upper substrate including a refrigerant flow path or a refrigerant flow-path groove, a through hole extending through the lower substrate in an up-down direction to intersect with the refrigerant flow path or the refrigerant flow-path groove, a screw hole provided in the lower surface of the upper substrate, at a position facing the through hole, a screw member inserted from a lower surface of the lower substrate into the through hole and screwed into the screw hole, and a refrigerant-leakage prevention member that prevents the refrigerant from leaking out to the lower surface of the lower substrate through the through hole into which the screw member is inserted.
Tatsuya Kuno, Masaki Ishikawa, Seiya Inoue
Filed: 9 Feb 23
Utility
Honeycomb Filter
21 Dec 23
A honeycomb filter comprising a pillar-shaped honeycomb structure having a porous partition wall disposed so as to surround a plurality of cells which serve as a fluid through channel extending from an inflow end face to an outflow end face and a porous plugging portion provided at either an end on the inflow end face side or an end on the outflow end face side of the cell, wherein in a processed image obtained by binarizing an electron microscope image of a visual field area of 480 μm×640 μm of the plugging portion, the plugging portion is composed of a plurality of particles, and the number of the particles having an area of 0.25 μm2 or more is 1000 or more and 3500 or less.
Tadato ITO, Sho INOTSUME
Filed: 13 Jun 23
Utility
Lithium Secondary Battery
21 Dec 23
A lithium secondary battery includes a positive electrode composed of a sintered body containing lithium cobaltate, a negative electrode, and a separator composed of a sintered body containing magnesia interposed between the positive electrode and the negative electrode.
Shunsuke MIZUKAMI, Yukinobu YURA, Ken SHIMAOKA, Takumi KATO, Yuki TANAKA, Aiko TAKAMATSU, Kengo OISHI
Filed: 5 Sep 23