1619 patents
Page 35 of 81
Utility
Ceramic Heater with Shaft
27 Jan 22
A ceramic heater with a shaft includes: a ceramic plate in which resistance heating elements are embedded; a hollow ceramic shaft bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; multiple vertical grooves provided in an internal circumferential surface of the ceramic shaft in an axial direction; conductive films provided in the multiple vertical grooves, respectively; and connection members that each electrically connect a terminal of the resistance heating elements to a corresponding one of the conductive films.
Tatsuya KUNO, Hiroshi TAKEBAYASHI, Kenichiro AIKAWA
Filed: 13 Oct 21
Utility
Ceramic Heater with Shaft
27 Jan 22
A ceramic heater with a shaft includes a ceramic plate in which an RF electrode and a resistance heating element are embedded; a hollow ceramic shaft provided on a surface on an opposite side of a wafer placement surface of the ceramic plate; an RF power supply rod which is housed in an inner space of the ceramic shaft, and a heating element power supply rod which is housed in the inner space of the ceramic shaft, wherein an outer circumferential surface of a portion of at least one of the RF power supply rod and the heating element power supply rod is covered with an insulating thin film which is an aerosol deposition film or a thermal spray film, the portion being located in the inner space of the ceramic shaft.
Kenichiro AIKAWA, Hiroshi Takebayashi, Tatsuya Kuno
Filed: 4 Oct 21
Utility
Bonded Substrate and Manufacturing Method of Bonded Substrate
27 Jan 22
A second main surface of the copper plate is opposite a first main surface of the copper plate, and is bonded to a silicon nitride ceramic substrate by the bonding layer.
Takashi EBIGASE, Izumi MASUDA, Takeshi KAKU
Filed: 6 Oct 21
Utility
Monolithic separation membrane structure
25 Jan 22
A monolithic separation membrane structure according to the present invention includes a porous support body and a separation membrane.
Makoto Teranishi, Kenji Yajima, Hideyuki Suzuki
Filed: 12 Sep 18
Utility
ERI-structure zeolite membrane and membrane structure
25 Jan 22
A peak intensity of a (002) plane is greater than or equal to 0.5 times a peak intensity of a (100) plane in an X-ray diffraction pattern obtained by irradiation of X-rays to a membrane surface of the ERI membrane.
Takeshi Hagio, Kenichi Noda, Makoto Miyahara, Katsuya Shimizu, Aya Miura, Ryotaro Yoshimura
Filed: 17 Sep 19
Utility
Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body
25 Jan 22
The composite sintered body includes AlN and MgAl2O4.
En Yagi, Yuji Katsuda
Filed: 15 Mar 19
Utility
Gas sensor
25 Jan 22
A sensor element includes: a main pump cell constituted by an inner electrode provided to face a first inner space into which a measurement gas is introduced, an external electrode provided on an element surface, and a solid electrolyte therebetween; and a measurement pump cell constituted by a measurement electrode provided to face a second inner space communicated with the first inner space, an external electrode, and a solid electrolyte therebetween.
Yusuke Watanabe, Takayuki Sekiya, Shota Kageyama
Filed: 24 Jul 19
Utility
Power Semiconductor Module and Manufacturing Method for Power Semiconductor Module
20 Jan 22
A frame is made of a first material.
Yuhji UMEDA, Yoshio TSUKIYAMA, Haruhiko ITO
Filed: 1 Oct 21
Utility
Ceramic body defect inspecting apparatus and defect inspecting method
18 Jan 22
A plurality of illumination elements configured to irradiate an inspection target region with illumination light obliquely at an identical angle in respective directions different from each other and equiangularly spaced from each other around an image capturing part are sequentially turned on and off.
Anna Koseki, Akihiro Mizutani, Takafumi Terahai
Filed: 8 May 19
Utility
Gas sensor and protective cover
18 Jan 22
A gas sensor includes a sensor element, an inner protective cover having inside a sensor element chamber and having an element chamber inlet and an element chamber outlet, and an outer protective cover having an outer inlet and an outer outlet.
Yosuke Adachi, Takeshi Omori
Filed: 30 Sep 20
Utility
Gas Sensor and Method for Controlling Gas Sensor
13 Jan 22
Provided are a gas sensor and a method for controlling the gas sensor, wherein the gas sensor comprises: a heater unit which performs a temperature adjustment of heating and keeping a sensor element warm; a pump drive control unit which controls pump driving for at least a gas-to-be measured flow unit; a measurement pump cell which detects a concentration of a specific gas in the gas to be measured, on the basis of an electromotive force generated between a reference electrode and a measurement electrode; a heater control unit which controls the heater unit; and a pump stop unit which stops the pump driving by the pump drive control unit after the heater control unit stops energizing the heater unit.
Takayuki SEKIYA, Yusuke WATANABE
Filed: 28 Sep 21
Utility
Gas Sensor Element and Gas Sensor
13 Jan 22
A gas sensor element includes an element body including an oxygen-ion-conductive solid electrolyte layer; and a protective layer that covers at least part of the element body, and has a thermal conductivity ratio R of 1.6 or higher, the thermal conductivity ratio R (=λs/λt) being a surface direction thermal conductivity λs [W/m K] to a thickness direction thermal conductivity λt [W/m K].
Ryo ONISHI, Yasuhide KOJIMA, Yusuke WATANABE
Filed: 23 Sep 21
Utility
Gas Sensor
13 Jan 22
A gas sensor detects a specific gas concentration in a measurement-object gas and includes an element body and one or more pump cells.
Takayuki SEKIYA, Yusuke WATANABE
Filed: 23 Sep 21
Utility
Electrostatic chuck having an annular outer region covered by an insulating film
11 Jan 22
An electrostatic chuck has a structure in which an electrostatic electrode is embedded in a disk-like ceramic plate and attracts a wafer that is placed on the ceramic plate and that has a diameter smaller than that of the ceramic plate by Johnsen-Rahbek force.
Reo Watanabe, Nobuyuki Kondou, Yutaka Unno
Filed: 9 Dec 19
Utility
Aluminophosphate-metal oxide bonded body and production method for same
11 Jan 22
An aluminophosphate-metal oxide bonded body including a metal oxide having a bonding surface on a part of the surface thereof, and aluminophosphate that is disposed on the bonding surface of the metal oxide, wherein an alkali metal, an alkaline earth metal or both of these is/are disposed on the bonding surface of the metal oxide, and the content rate of the alkali metal, alkaline earth metal or both is from 0.3 to 30.0% by mass with respect to all of the substances that are disposed on the bonding surface of the metal oxide.
Takeshi Hagio, Makoto Miyahara, Tetsuya Uchikawa, Makiko Ichikawa, Kenichi Noda, Kenji Yajima
Filed: 28 Sep 15
Utility
Heater for Semiconductor Manufacturing Apparatus
6 Jan 22
A heater for a semiconductor manufacturing apparatus, the heater includes an AlN ceramic substrate and a heating element embedded inside the AlN ceramic substrate.
Keita YAMANA, Kazuhiro NOBORI, Kengo TORII
Filed: 22 Sep 21
Utility
Composite Substrate for Electro-optic Element and Method for Manufacturing the Same
6 Jan 22
A composite substrate for an electro-optic element is disclosed.
Yudai UNO, Tomoyoshi TAI, Jungo KONDO
Filed: 21 Sep 21
Utility
Porous material, cell structure, and method of producing porous material
4 Jan 22
A porous material includes aggregate particles and a binding material.
Mika Tsuboi, Yunie Izumi, Takahiro Tomita
Filed: 19 Mar 19
Utility
Honeycomb structure
4 Jan 22
A honeycomb structure includes a plurality of prismatic columnar shaped honeycomb segments; a bonding layer bonding side faces of the honeycomb segments; and a circumferential wall disposed to surround a honeycomb segment bonded body having the honeycomb segments arranged in a grid pattern and bonded with the bonding layer, wherein the honeycomb segments has a porous partition wall disposed to surround a plurality of cells, the cells in other than outermost circumference have a hexagonal shape in a section orthogonal to the cell extending direction, the honeycomb segments include first and second honeycomb segment, the second honeycomb segment is different from the first in at least one of: a shape in the section; a size; and an arrangement direction of the cells and an extended line of one diagonal line imaginarily depicted in the cells in the first honeycomb segment and that in the second are configured to be orthogonal.
Hirotaka Yamamoto, Yudai Kurimoto
Filed: 9 Mar 20
Utility
Positive electrode structure for secondary battery
4 Jan 22
Provided is a positive electrode structure for a secondary battery.
Junki Matsuya, Kenshin Kitoh, Takeshi Yagi
Filed: 3 Mar 21