60 patents
Page 2 of 3
Utility
Resonator electrode shields
3 Jan 23
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 14 May 21
Utility
Clock generator with dual-path temperature compensation
13 Dec 22
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 7 Dec 21
Utility
Bonding process with inhibited oxide formation
1 Nov 22
First and second contacts are formed on first and second wafers from disparate first and second conductive materials, at least one of which is subject to surface oxidation when exposed to air.
Paul M. Hagelin, Charles I. Grosjean
Filed: 30 Dec 20
Utility
Temperature stable MEMS resonator
11 Oct 22
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member.
Paul M. Hagelin, Charles I. Grosjean
Filed: 30 Jun 21
Utility
Resonator electrode shields
13 Sep 22
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 11 Mar 21
Utility
Low Allan-Deviation oscillator
3 May 22
An oscillator includes a resonator, sustaining circuit and detector circuit.
Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
Filed: 12 Mar 21
Utility
Frequency-modulating sensor array
3 May 22
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition.
Paul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Filed: 12 Sep 17
Utility
MEMS with over-voltage protection
26 Apr 22
A semiconductor device includes first and second exposed electrical contacts and a cavity having a microelectromechanical system (MEMS) structure therein.
Nicholas Miller, Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge
Filed: 29 Jun 20
Utility
Temperature-reporting oscillator
8 Feb 22
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer.
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany, Charles I. Grosjean
Filed: 1 Oct 20
Utility
Clock generator with dual-path temperature compensation
18 Jan 22
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 11 Mar 21
Utility
Microelectromechanical resonator
18 Jan 22
A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers.
Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill
Filed: 10 Jan 19
Utility
Phase locked loop with phase error signal used to control effective impedance
18 Jan 22
Phase-locked loop circuitry to generate an output signal, the phase-locked loop circuitry comprising oscillator circuitry, switched resistor loop filter, coupled to the input of the oscillator circuitry (which, in one embodiment, includes a voltage-controlled oscillator), including a switched resistor network including at least one resistor and at least one capacitor, wherein an effective resistance of the switched resistor network is responsive to and increases as a function of one or more pulsing properties of a control signal (wherein pulse width and frequency (or period) are pulsing properties of the control signal), phase detector circuitry, having an output which is coupled to the switched resistor loop filter, to generate the control signal (which may be periodic or non-periodic).
Michael H. Perrott
Filed: 11 Mar 21
Utility
Capacitor-referenced temperature sensing
18 Jan 22
The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
Michael H. Perrott, Shungneng Lee
Filed: 29 Oct 20
Utility
MEMS cavity with non-contaminating seal
11 Jan 22
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 21 May 20
Utility
Fixed-beacon time transfer system
4 Jan 22
In various time-transfer systems, one or more fixed-position time beacons broadcast radio-frequency (RF) time-transfer messages to time-keeping modules disposed in remote radio heads and other strategic locations to achieve highly reliable and accurate synchronized time, phase, and frequency transfer over a metropolitan or other wide-field area.
Markus Lutz, Sassan Tabatabaei, Charles I. Grosjean, Paul M. Hagelin, Aaron Partridge
Filed: 17 Oct 19
Utility
Temperature stable mems resonator
3 Aug 21
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member.
Paul M. Hagelin, Charles I. Grosjean
Filed: 4 Dec 19
Utility
Resonator electrode shields
18 May 21
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 11 Sep 19
Utility
Low allan-deviation oscillator
11 May 21
An oscillator includes a resonator, sustaining circuit and detector circuit.
Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
Filed: 3 Mar 20
Utility
Clock generator with dual-path temperature compensation
13 Apr 21
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 5 Feb 20
Utility
Manufacturing of integrated circuit resonator
9 Feb 21
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 16 Jun 20