60 patents
Page 3 of 3
Utility
Bonding process with inhibited oxide formation
2 Feb 21
First and second contacts are formed on first and second wafers from disparate first and second conductive materials, at least one of which is subject to surface oxidation when exposed to air.
Paul M. Hagelin, Charles I. Grosjean
Filed: 4 Dec 19
Utility
Piezo-actuated MEMS resonator with surface electrodes
12 Jan 21
A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer.
Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller, Charles I. Grosjean
Filed: 6 Apr 18
Utility
Temperature-compensated timing signal generator
30 Nov 20
The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
Michael H. Perrott, Shungneng Lee
Filed: 28 Nov 18
Utility
Temperature-reporting oscillator
9 Nov 20
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer.
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany, Charles I. Grosjean
Filed: 1 May 19
Utility
MEMS with small-molecule barricade
12 Oct 20
A MEMS element within a semiconductor device is enclosed within a cavity bounded at least in part by hydrogen-permeable material.
Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge
Filed: 1 Feb 18
Utility
Encapsulated microelectromechanical structure
7 Sep 20
A semiconductor layer having an opening and a MEMS resonator formed in the opening is disposed between first and second substrates to encapsulate the MEMS resonator.
Aaron Partridge, Markus Lutz, Pavan Gupta
Filed: 9 Sep 19
Utility
MEMS with over-voltage protection
10 Aug 20
A semiconductor device includes first and second exposed electrical contacts and a cavity having a microelectromechanical system (MEMS) structure therein.
Nicholas Miller, Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin, Aaron Partridge
Filed: 1 Mar 18
Utility
Package structure for micromechanical resonator
27 Jul 20
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights.
Pavan Gupta, Aaron Partridge, Markus Lutz
Filed: 1 Apr 19
Utility
Integrated circuit with oscillator signal based on switched-resistance circuitry
20 Jul 20
Phase-locked loop circuitry to generate an output signal, the phase-locked loop circuitry comprising oscillator circuitry, switched resistor loop filter, coupled to the input of the oscillator circuitry (which, in one embodiment, includes a voltage-controlled oscillator), including a switched resistor network including at least one resistor and at least one capacitor, wherein an effective resistance of the switched resistor network is responsive to and increases as a function of one or more pulsing properties of a control signal (wherein pulse width and frequency (or period) are pulsing properties of the control signal), phase detector circuitry, having an output which is coupled to the switched resistor loop filter, to generate the control signal (which may be periodic or non-periodic).
Michael H. Perrott
Filed: 7 Jul 19
Utility
MEMS cavity with non-contaminating seal
29 Jun 20
A semiconductor device includes a first silicon layer disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers.
Michael Julian Daneman, Charles I. Grosjean, Paul M. Hagelin
Filed: 13 Feb 18
Utility
MEMS resonator
8 Jun 20
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Charles I. Grosjean, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll
Filed: 13 Aug 17
Utility
Low Allan-Deviation oscillator
13 Apr 20
An oscillator includes a resonator, sustaining circuit and detector circuit.
Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
Filed: 25 Jul 18
Utility
Temperature sensor based on ratio of clock signals from respective MEMS resonators
13 Apr 20
In a high resolution temperature sensor, first and second MEMS resonators generate respective first and second clock signals and a locked-loop reference clock generator generates a reference clock signal having a frequency that is phase-locked to at least one of the first and second clock signals.
Aaron Partridge, Samira Zaliasl, Meisam Heidarpour Roshan, Sassan Tabatabaei
Filed: 3 Mar 19
Utility
Clock generator with dual-path temperature compensation
16 Mar 20
In a timing signal generator having a resonator, one or more temperature-sense circuits generate an analog temperature signal and a digital temperature signal indicative of temperature of the resonator.
Saleh Heidary Shalmany, Kamran Souri, Sassan Tabatabaei, U{hacek over (g)}ur Sönmez
Filed: 7 Jun 18
Utility
Bonding process with inhibited oxide formation
20 Jan 20
First and second contacts are formed on first and second wafers from disparate first and second conductive materials, at least one of which is subject to surface oxidation when exposed to air.
Paul M. Hagelin, Charles I. Grosjean
Filed: 16 Dec 18
Utility
Temperature stable MEMS resonator
20 Jan 20
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member.
Paul M. Hagelin, Charles I. Grosjean
Filed: 7 Mar 18
Utility
Dual-resonator semiconductor die
11 Nov 19
A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface.
Charles I. Grosjean, Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz
Filed: 5 Sep 17
Utility
Micromachined thermistor
28 Oct 19
A micromachined apparatus includes micromachined thermistor having first and second ends physically and thermally coupled to a substrate via first and second anchor structures to enable a temperature-dependent resistance of the micromachined thermistor to vary according to a time-varying temperature of the substrate.
Carl Arft, Aaron Partridge, Paul M. Hagelin
Filed: 7 Mar 18
Utility
Encapsulated microelectromechanical structure
21 Oct 19
In a MEMS device, an oxide layer is disposed between first and second semiconductor layers and MEMS resonator is formed within a cavity in the first semiconductor layer.
Aaron Partridge, Markus Lutz, Pavan Gupta
Filed: 20 Aug 18
Utility
Resonator electrode shields
7 Oct 19
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure.
David Raymond Pedersen, Aaron Partridge, Thor Juneau
Filed: 20 May 18