9 patents
Utility
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same
27 Apr 21
A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing.
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser
Filed: 10 Dec 18
Utility
Electrostatic Chuck For Clamping In High Temperature Semiconductor Processing And Method Of Making Same
11 Nov 20
An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.
Brent Donald Alfred Elliot, Frank Balma, Michael Parker, Jason Stephens, Guleid Hussen
Filed: 12 Mar 20
Utility
Semiconductor Substrate Support With Multiple Electrodes And Method For Making Same
1 Jul 20
A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining.
Michael Parker
Filed: 22 Aug 18
Utility
High Speed Low Temperature Method for Manufacturing and Repairing Semiconductor Processing Equipment and Equipment Produced Using Same
10 Jun 20
A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing.
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser
Filed: 9 Dec 18
Utility
Method for manufacture of a multi-layer plate device
11 May 20
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces.
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser
Filed: 29 Jan 17
Utility
Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same
16 Mar 20
An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C. to 750 C.
Brent Donald Alfred Elliot, Frank Balma, Michael Parker, Jason Stephens, Guleid Hussen
Filed: 1 Nov 16
Utility
Low Temperature Method For Hermetically Joining Non-Diffusing Ceramic Materials In Multi-Layer Plate Devices
29 Jan 20
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces.
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser
Filed: 7 May 19
Utility
Method for Repairing Heaters and Chucks Used In Semiconductor Processing
4 Dec 19
A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint.
BRENT ELLIOT, FRANK BALMA, ALEXANDER VEYTSER, MICHAEL PARKER, JEFF CUNHA
Filed: 17 May 18
Utility
High temperature resistant silicon joint for the joining of ceramics
11 Nov 19
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces.
Brent Elliot, Alfred Grant Elliott
Filed: 20 Dec 15
- Prev
- 1
- Next
Patents are sorted by USPTO publication date, most recent first