4 patents
Utility
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same
27 Apr 21
A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing.
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser
Filed: 10 Dec 18
Utility
Method for manufacture of a multi-layer plate device
11 May 20
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces.
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser
Filed: 29 Jan 17
Utility
Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same
16 Mar 20
An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C. to 750 C.
Brent Donald Alfred Elliot, Frank Balma, Michael Parker, Jason Stephens, Guleid Hussen
Filed: 1 Nov 16
Utility
High temperature resistant silicon joint for the joining of ceramics
11 Nov 19
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces.
Brent Elliot, Alfred Grant Elliott
Filed: 20 Dec 15
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