9 patents
Utility
Variable-zoom imaging apparatus
12 Dec 23
Disclosed is a variable-zoom imaging apparatus that includes: i) imaging optics configured to form an image in an imaging area of an object positioned in an object area; ii) an adjustable aperture stop to adjustably set a numerical aperture NA for the image formed by the imaging optics; iii) an electronic detector comprising an array of detector elements positioned in the imaging area to detect the image; and iv) image processing circuitry coupled to the electronic detector to produce a digital representation of the image based on signals from at least some of the detector elements.
Bruce E. Truax
Filed: 29 Jun 21
Utility
Method of reducing roughness and/or defects on an optical surface and mirror formed by same
14 Mar 23
A method of making a mirror for use with extreme ultraviolet or x-ray radiation includes: i) providing a base substrate having a curved surface, wherein the curved surface deviates from a curvature of a target mirror surface at high spatial frequencies corresponding to spatial periods less than 2 mm; and ii) securing a first side of a thin plate to the curved surface of the base substrate to cover the curved surface, wherein the plate has a thickness thin enough to conform to the curvature of the target mirror surface and thick enough to attenuate deviations at the high spatial frequencies on a second side of the thin plate opposite the first side that are caused by the deviations on the curved surface of the base substrate.
John Matthew Kincade
Filed: 4 Nov 20
Utility
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6 Dec 22
A method of making a mirror for use with extreme ultraviolet (EUV) or X-ray radiation is disclosed.
John Matthew Kincade
Filed: 20 Oct 20
Utility
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13 Sep 22
A method for figuring an optical surface of an optical element to achieve a target profile for the optical surface includes: applying a removal process to an extended region of the optical surface extending along a first direction to remove material from the extended region of the optical surface; adjusting a position of the optical surface relative to the removal process along a second direction perpendicular to the first direction to remove material from additional extended regions of the optical surface extending along the first direction at each of different positions of the optical surface along the second direction; and repeating the applying of the removal process and the adjusting of the optical surface relative to the removal process for each of multiple rotational orientations of the optical surface about a third direction perpendicular to the first and second directions to achieve the target profile of the optical surface.
Andrew Nelson
Filed: 25 Feb 20
Utility
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30 Mar 21
A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
Leslie L. Deck
Filed: 11 Jul 19
Utility
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12 Jan 21
A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
Leslie L. Deck
Filed: 8 Nov 17
Utility
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23 Nov 20
Method and apparatus for determining the wavelength of a light beam are provided.
Leslie L. Deck
Filed: 23 Jun 19
Utility
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16 Mar 20
Techniques for removing interferometry signal phase variations caused by distortion and other effects in a multi-layer stack include: providing an electronic processor sample interferometry data acquired for the stack using a low coherence imaging interferometry system; transforming, by the electronic processor, the sample interferometry data to a frequency domain; identifying a non-linear phase variation from the sample interferometry data in the frequency domain, in which the non-linear phase variation is a result of dispersion introduced into a measurement beam by the test sample; and removing the non-linear phase variation from the sample interferometry data thereby producing compensated interferometry data.
Leslie L. Deck, Peter J. de Groot
Filed: 26 Feb 19
Utility
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21 Oct 19
An optical method for determining an orientation of surface texture of a mechanical part includes: i) acquiring data for a first areal surface topography image using a surface topography measurement instrument, wherein the first image corresponds to a first field of view of the mechanical part for the surface topography measurement instrument; ii) rotating the mechanical part with respect to a rotation axis provided by a rotatable mount used to secure the mechanical part to provide a second field of view of the mechanical part for the surface topography measurement instrument, wherein the first and second fields of view overlap to provide image information about a common region of the mechanical part; iii) acquiring data for a second areal surface topography image using the surface topography measurement instrument, wherein the second image corresponds to the second field of view; and iv) processing the data from the images.
Peter J. de Groot, Leslie L. Deck
Filed: 30 Jan 18
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