14 patents
Utility
Three-dimensional sensor with counterposed channels
14 Mar 23
A method of determining dimensional information of a target surface includes generating a first point cloud corresponding to a first plurality of reconstructed surface points of the target surface generated by a first imaging system-illumination source pair of a phase profilometry system; generating a second point cloud corresponding to a second plurality of reconstructed surface points of the target surface generated by a second imaging system-illumination source pair of the phase profilometry system; generating an initial estimate of the target surface based on the first and second point clouds; and refining the initial surface estimate using positions of the first and second point clouds and geometry of the first and second imaging system-illumination source pairs to generate a final point cloud.
Paul R. Haugen, Evan J. Ribnick, Carl E. Haugan, Eric P. Rudd
Filed: 7 Dec 20
Utility
Wireless substrate-like teaching sensor for semiconductor processing
11 Oct 22
A wireless substrate-like sensor for teaching transfer coordinates to a robotic substrate handling system is provided.
Ferris J. Chen, David W. Duquette, Robert M. Mark
Filed: 19 Apr 19
Utility
Structured light projection for specular surfaces
23 Aug 22
A system for generating a three-dimensional height image of a reflective target includes an illumination source configured to generate a patterned illumination on the reflective target, and an imaging system configured to acquire an image of the patterned illumination on the reflective target, the illumination source and camera being aligned relative to the target such that the camera acquires a specular image of the patterned illumination.
Eric P. Rudd, Carl E. Haugan, Paul R. Haugen
Filed: 24 Jan 19
Utility
Automatic programming of solder paste inspection system
16 Nov 21
A system for measuring solder paste stencil aperture positions and sizes is provided.
Douglas G. Butler, Carl E. Haugan
Filed: 22 Jan 14
Utility
Structured light projection for specular surfaces
27 Jul 21
A system for generating a three-dimensional height image of a reflective test target includes an illumination source configured to generate a patterned illumination on the test target, an imaging system configured to acquire an image of the patterned illumination on the test target, and a variable focus optical system configured to cause the camera to image the test target with at least two distinct focus positions, the illumination source and camera being aligned relative to the test target such that the camera acquires a specular image of the patterned illumination.
Eric P. Rudd, Carl E. Haugan, Paul R. Haugen
Filed: 24 Jan 19
Utility
Three-dimensional sensor with counterposed channels
8 Jun 21
An optical phase profilometry system includes a first operative coaxial camera-projector pair aligned at a first angle relative to a target surface that projects a first illumination on the target surface and a second operative coaxial camera-projector pair aligned at a second angle relative to the target surface that projects a second illumination on the target surface.
Paul R. Haugen, Carl E. Haugen, Eric P. Rudd, Timothy A. Skunes
Filed: 17 Oct 19
Utility
Three-dimensional Sensor with Counterposed Channels
25 Mar 21
A method of determining dimensional information of a target surface includes generating a first point cloud corresponding to a first plurality of reconstructed surface points of the target surface generated by a first imaging system-illumination source pair of a phase profilometry system; generating a second point cloud corresponding to a second plurality of reconstructed surface points of the target surface generated by a second imaging system-illumination source pair of the phase profilometry system; generating an initial estimate of the target surface based on the first and second point clouds; and refining the initial surface estimate using positions of the first and second point clouds and geometry of the first and second imaging system-illumination source pairs to generate a final point cloud.
Paul R. Haugen, Evan J. Ribnick, Carl E. Haugan, Eric P. Rudd
Filed: 7 Dec 20
Utility
Three-dimensional sensor with counterposed channels
4 Jan 21
A method of determining dimensional information of a target surface includes generating a first point cloud corresponding to a first plurality of reconstructed surface points of the target surface generated by a first imaging system-illumination source pair of a phase profilometry system; generating a second point cloud corresponding to a second plurality of reconstructed surface points of the target surface generated by a second imaging system-illumination source pair of the phase profilometry system; generating an initial estimate of the target surface based on the first and second point clouds; and refining the initial surface estimate using positions of the first and second point clouds and geometry of the first and second imaging system-illumination source pairs to generate a final point cloud.
Paul R. Haugen, Evan J. Ribnick, Carl E. Haugan, Eric P. Rudd
Filed: 16 Oct 19
Utility
Sensor interface for single-use containers
16 Nov 20
A single-use sensor interface for coupling a single-use container to a re-usable sensing instrument is provided.
Paul R. Fadell, Joshua M. Price
Filed: 22 Dec 16
Utility
Inline particle sensor
12 Oct 20
An inline particle sensor includes a sensor head configured to mount within a fitting, the sensor head including a laser source sealed and isolated from a sensing volume and configured to emit a laser beam through the sensing volume and a detector arranged to detect particles in the sensing volume that pass through the laser beam.
Felix J. Schuda, Ferris J. Chen
Filed: 9 Apr 19
Utility
Wafer-like Sensor
13 May 20
A wafer-like semiconductor sensor includes a wafer-like base formed of a plurality of layers of chemically-hardened glass and an electronics module mounted to a recessed pocket in the base and containing a sensor.
Felix J. Schuda, Mark C. Leclair
Filed: 7 Nov 19
Utility
Three-dimensional Sensor with Counterposed Channels
22 Apr 20
A method of determining dimensional information of a target surface includes generating a first point cloud corresponding to a first plurality of reconstructed surface points of the target surface generated by a first imaging system-illumination source pair of a phase profilometry system; generating a second point cloud corresponding to a second plurality of reconstructed surface points of the target surface generated by a second imaging system-illumination source pair of the phase profilometry system; generating an initial estimate of the target surface based on the first and second point clouds; and refining the initial surface estimate using positions of the first and second point clouds and geometry of the first and second imaging system-illumination source pairs to generate a final point cloud.
Paul R. Haugen, Evan J. Ribnick, Carl E. Haugan, Eric P. Rudd
Filed: 16 Oct 19
Utility
Wireless Substrate-like Teaching Sensor for Semiconductor Processing
23 Oct 19
A wireless substrate-like sensor for teaching transfer coordinates to a robotic substrate handling system is provided.
Ferris J. Chen, David W. Duquette, Robert M. Mark
Filed: 18 Apr 19
Utility
Inline Particle Sensor
16 Oct 19
An inline particle sensor includes a sensor head configured to mount within a fitting, the sensor head including a laser source sealed and isolated from a sensing volume and configured to emit a laser beam through the sensing volume and a detector arranged to detect particles in the sensing volume that pass through the laser beam.
Felix J. Schuda, Ferris J. Chen
Filed: 9 Apr 19
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