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Exhibit 15.1
Deloitte Accountants B.V.
Orlyplein 10
1043 DP Amsterdam
P.O. Box 58110
1040 HC Amsterdam
Netherlands
Tel: +31 (20) 582 5000
Fax: +31 (20) 582 4026
www.deloitte.nl
To the Board of Directors and Shareholders of
ASM International N.V.
Jan van Eycklaan 10
3723 BC BILTHOVEN
Consent of Independent Registered Public Accounting Firm
We consent to the incorporation by reference in Registration Statement No. 033-07111, 033-07109, 333-87262, 333-11060, 033-6184, 033-6185, 033-6186, 033-78628 and 033-93026 on Form S-8 and Registration Statement No. 333-08080, 333-11502, 333-11234, 333-107339, and 333-124479 on Form F-3 of our report dated February 21, 2006, relating to the financial statements of ASM International N.V. appearing in this Annual Report on Form 20-F of ASM International N.V. for the year ended December 31, 2005.
Amsterdam, the Netherlands, March 17, 2006
Deloitte Accountants B.V.
J.G.C.M. Buné
Deloitte Accountants B.V. is registered with the Trade Register of the Chamber of Commerce and Industry in Rotterdam number 24362853. | Member of Deloitte Touche Tohmatsu |