Exhibit 99.6
Annual General Shareholders Meeting
Presented by
Henk Bodt, Chairman Supervisory Board
Eric Meurice, President and CEO
Peter Wennink, EVP and CFO
Veldhoven, March 23, 2006
Safe Harbor
"Safe Harbor" Statement under the U.S. Private Securities
Litigation Reform Act of 1995: the matters discussed in this
document may include forward-looking statements that are
subject to risks and uncertainties including, but not limited to,
economic conditions, product demand and semiconductor
equipment industry capacity, worldwide demand and
manufacturing capacity utilization for semiconductors, the
principal product of our customer base, competitive products
and pricing, manufacturing efficiencies, new product
development, ability to enforce patents, the outcome of
intellectual property litigation, availability of raw materials and
critical manufacturing equipment, trade environment, and other
risks indicated in the risk factors included in ASML’s Annual
Report on Form 20-F and other filings with the U.S. Securities
and Exchange Commission.
/ Slide 2
Agenda
ASML opportunities and priorities
Financial performance
/ Slide 3
ASML Products: Integrated Circuits Lithography
Two TWINSCANTM scanner
stages operate at a speed of
550 mm/s with an accuracy
of 2 nanometer,
which compares to two 747
jumbo jets flying at 1000 km/hr
the exact same route to an
accuracy of 0.001 millimeter
Reticle stage
Wafer stages
The reticle stage
accelerates from 0 to
100 km/hour in 1.6 seconds,
leaving every sports car behind.
/ Slide 4
-
1,000
2,000
3,000
4,000
5,000
6,000
7,000
8,000
ASML’s market opportunity – WW Lithography
Source: Average of Dataquest, VLSI Research and ASML fab based model
Average WW litho sales
ASML’s potential
Status quo
Growth potential
toward 4-5 B€
range
ASML’s
opportunity
window
Assuming 8% -10% semiconductor unit CAGR
/ Slide 5
ASML market share evolution
Source: ASML
0%
10%
20%
30%
40%
50%
60%
6” & early i-line
KrF &
Step & Scan
Market share growth through :
Technology leadership
Operational excellence – cost of
ownership and support
8” & I-line
1984
1986
1988
1990
1992
1994
1996
1998
2000
2002
2004
2006
Immersion
12” & ArF
/ Slide 6
Priorities for further execution
Technology leadership reinforcement through increased
R&D investment
Cycle time and Cost of Ownership reduction
Customer satisfaction
Corporate responsibility
Leading to improved performance on
growth, profitability and liquidity
/ Slide 7
Technology leadership with immersion and EUV
13 immersion systems delivered to customers by end of
2005
Showed first results of TWINSCAN XT:1700 hyper NA
imaging at 42 nm/1 micron depth of focus. Volume ramp
planned in Q2 2006
21 systems in backlog or pending by end of 05 with 20 - 25
immersion tools expected to ship in 2006
All major customers engaged for R&D work
6th customer in Japan added in Q4 2005 – last 2 on immersion
2 EUV alpha tools to ship in 2006
/ Slide 8
EUV system
/ Slide 9
Best EUV results: all images taken at 0.25NA, s=0.5
Resist: MET-2D, ~18 mJ/cm2
NA=0.25
= 0.5 (conventional illumination)
no process development yet
LER = 2.7 nm
50 nm hp
40 nm hp
LER = 5.1 nm
35 nm hp
FIB Cross
section: 50
nm L/S resist
profile
limited
scumming is
observed
/ Slide 10
Cycle time and Cost of Ownership
24 hrs/day - 7 days per week work shifts agreed with
Works Council and unions with 3 year hour bank to
manage the semiconductor cycle - in place since Feb 06
Continued improvement of cycle time through work shifts,
assembly re-engineering, additional capacity and supplier
cooperation programs
Confirmed leadership in productivity of TWINSCAN
Further cost reduction on TWINSCAN platform with 10%
lower cost in 2005
/ Slide 11
VLSI Research rates ASML among the top
equipment companies for customer satisfaction
/ Slide 12
ASML: A good corporate citizen
Environment, health and safety in 2005
EHS awareness training for approximately 2,400 employees
Safety incident rate reduced by 20% to 0.8 per 100 employees compared to
our industry’s average of 4.7
ISO 14001 certification worldwide
94 internal and external EHS audits with no major non-compliance
Total energy consumption decreased by 3% in 2005 compared to 2004
Total inert gas consumption decreased by 4%
Hazardous waste materials decreased by 9%
Social responsibility in 2005
More than 4,500 job-oriented training programs completed by our
employees worldwide
Annual benchmark of compensation and benefit packages
Improved cover of the GRI guidelines
/ Slide 13
Agenda
ASML opportunities and priorities
Financial performance
/ Slide 14
Solid 2005 execution on growth, profitability and
liquidity
Revenue of € 2,529 million – 3% growth while
semiconductor equipment industry shrinks by 9%
Net profit of € 311 million (12.3% of sales) - Operating
profit 17.8%
Cash generation from operations of € 711 million
/ Slide 15
1589
830
759
1959
179
609
351
820
2673
1180
1493
318
329
370
526
1543
453
616
2465
785
611
685
763
2529
533
548
Total revenues M€
0
500
1000
1500
2000
2500
3000
2000
2001
2002
2003
2004
2005
Q1
Q2
Q3
Q4
H1
H2
/ Slide 16
Profit & Loss statement M€
Numbers have been rounded for readers’ convenience
1 ASML, Nikon Corporation and Carl Zeiss SMT AG agreed to a comprehensive settlement of legal
proceedings and cross-license of patents related to lithography equipment. This agreement resulted in:
an increase of M€ 49 in our R&D costs and consequently a decrease in operating income from
continuing operations.
a decrease of M€ 33 in our total net income.
2 SG&A costs include a positive adjustment of M € 6 for restructuring expenses.
2003
2004
2005
Sales in Units (new and used)
169
282
196
Net sales
1543
2465
2529
Gross margin
Gross margin %
369
23.9%
906
36.7%
974
38.5%
R&D costs
287
331
1
324
SG&A costs
237
196
2
201
Operating income
Operating income %
(155)
-
10%
379
15.4%
44
9
17.8%
Net income
Net income %
(160)
-
10.3%
235
1
9.6%
311
12.3%
/ Slide 17
Cash flow M€
Numbers have been rounded for readers’ convenience
2003
2004
2005
Net income
(125)
235
311
Depreciation and amortization
157
93
99
Effects of changes in assets and
liabilities
513
(77)
301
Cash flow from recurring operations
545
251
711
Cash flow from investing activities
(49)
(60)
(61)
(68)
19
3
Effect of changes in exchange rates
on cash
(69)
(9)
23
Net cash flow
359
200
676
Cash flow from financing activities
/ Slide 18
Reserves and dividend policy
The Company has set a cash target at about €1 billion net cash to
Finance internal growth
Withstand potential downturn
Allow for potential investments
The Company will return cash to shareholders when accumulated
cash is expected to remain above the minimum target set
Currently, the Company considers potential share buy-backs as
the appropriate operational instrument to return cash to
shareholders rather than dividends because of (1) ASML’s growth
opportunity and (2) the cyclicality of the lithography market. Our
opinion may be different as the industry and company matures
At this time, the Company is setting up the mechanism to execute
share buy backs when appropriate
/ Slide 19
2005 – A year of solid execution
Market share
Technology leadership
Operational and financial performance
And a springboard to continuous success…
/ Slide 20
Commitment