103 patents
Page 6 of 6
Utility
Monitoring System and Method for Verifying Measurements In Pattened Structures
6 Nov 19
A method and system are presented for monitoring measurement of parameters of patterned structures based on a predetermined fitting model.
BOAZ BRILL, BORIS SHERMAN, IGOR TUROVETS
Filed: 19 May 19
Utility
Optical System and Method for Measuring Parameters of Patterned Structures In Micro-electronic Devices
6 Nov 19
An optical system and method are presented for use in measurements on an upper surface of a layered sample when located in a measurement plane.
DANNY GROSSMAN, SHAHAR GOV, MOSHE VANHOTSKER, GUY ENGEL, ELAD DOTAN
Filed: 22 Nov 16
Utility
Method and System for Optical Metrology In Patterned Structures
16 Oct 19
Determining parameters of a patterned structure located on top of an underneath layered structure, where input data is provided which includes first measured data PMD being a function ƒ of spectral intensity Iλ and phase ϕ, PMD=ƒ(Iλ; ϕ), corresponding to a complex spectral response of the underneath layered structure, and second measured data Smeas indicative of specular reflection spectral response of a sample formed by the patterned structure and the underneath layered structure, and where a general function F is also provided describing a relation between a theoretical optical response Stheor of the sample and a modeled optical response Smodel of the patterned structure and the complex spectral response PMD of the underneath layered structure, such that Stheor=F(Smodel; PMD), where the general function is then utilized for comparing the second measured data Smeas and the theoretical optical response Stheor, and determining parameter(s) of interest of the top structure.
Boris Levant, Yanir Hainick, Vladimir Machavariani, Roy Koret, Gilad Barak
Filed: 29 Apr 19