2001 patents
Page 11 of 101
Utility
Method for Producing a Gallium Oxide Semiconductor Film and a Film Forming Apparatus
17 Aug 23
A method for producing a gallium oxide semiconductor film by a mist CVD method, including, a mist-forming step in which a raw material solution containing gallium is misted in a mist-forming unit to generate mist, a carrier gas supply step of supplying a carrier gas for transferring the mist to the mist-forming unit, a transferring step of transferring the mist from the mist-forming unit to a film forming chamber using the carrier gas via a supply pipe connecting the mist-forming unit and the film forming chamber, a rectification step of rectifying flow of the mist and the carrier gas supplied to a surface of a substrate in the film forming chamber so as to flow along the surface of the substrate, a film forming step of heat-treating the rectified mist to form a film on the substrate, and an exhaust step of exhausting waste gas upward from the substrate.
Takenori WATABE
Filed: 17 May 21
Utility
Resist Composition and Pattern Forming Process
17 Aug 23
A resist composition comprising a sulfonim salt having an acid labile group of aromatic group-containing cyclic secondary or tertiary ester type in the cation as the acid generator exhibits a high sensitivity and reduced LWR or improved CDU.
Jun Hatakeyama, Masahiro Fukushima
Filed: 10 Jan 23
Utility
Composition for Forming Protective Film Against Alkaline Aqueous Hydrogen Peroxide, Substrate for Producing Semiconductor Apparatus, Method for Forming Protective Film, and Method for Forming Pattern
17 Aug 23
Keisuke NIIDA, Takashi SAWAMURA, Daisuke KORI, Seiichiro TACHIBANA
Filed: 18 Jan 23
Utility
Granulated composite, rapid release tablet and method for producing same
15 Aug 23
Provided is a rapid release tablet excellent in binding capability and disintegrability and also excellent in storage stability and the like.
Yasuyuki Hirama, Naosuke Maruyama
Filed: 14 Oct 19
Utility
Method for producing polymer tube containing liquid and being sealed at constant intervals and apparatus for producing polymer tube
15 Aug 23
Provided are a method and an apparatus for extruding into a tube and filling the tube at a high speed and simultaneously sealing the tube.
Ryuichi Saguchi, Tomoaki Kaji, Masahiko Naruse
Filed: 4 Aug 20
Utility
Hydrophilic Group-modified Organopolysiloxane and Production Method Thereof
10 Aug 23
Koichiro KOBAYASHI, Yuichi MUKAWA
Filed: 11 Jun 21
Utility
Two-component Type Room Temperature Fast-curing Organopolysiloxane Composition, Cured Product Thereof and Article
10 Aug 23
Takahiro YAMAGUCHI, Akitsugu FUJIWARA, Tokuo SATOU
Filed: 1 Jul 21
Utility
Base Substrate for Group Iii-v Compound Crystals and Production Method for Same
10 Aug 23
A base substrate (1) for a group III-V compound crystal according to the present invention includes: a ceramic core layer (2); an impurity encapsulating layer (3) configured to encapsulate the ceramic core layer (2); a bonding layer (4) on the impurity encapsulating layer; and a processed layer (5) on the bonding layer.
Yoshihiro KUBOTA, Kazutoshi NAGATA
Filed: 7 May 21
Utility
Bismuth-substituted Rare Earth Iron Garnet Single Crystal Film Production Method, Faraday Rotator, and Optical Isolator
10 Aug 23
In a bismuth-substituted rare earth iron garnet single crystal film production method, the bismuth-substituted rare earth iron garnet single crystal film expressed by the composition formula (Ln3-aBia)(Fe5-bAb)O12 is grown using a substrate of paramagnetic garnet with a lattice constant of Ls.
Toshiaki WATANABE, Satoru FUKUDA
Filed: 26 Mar 21
Utility
Thermally Conductive Resin Composition
10 Aug 23
Naoyuki KUSHIHARA, Masahiro KANETA, Kazuaki SUMITA
Filed: 6 Feb 23
Utility
Diamond Substrate and Method for Manufacturing the Same
10 Aug 23
A method for manufacturing diamond substrate of using source gas containing hydrocarbon gas and hydrogen gas to form diamond crystal on an underlying substrate by CVD method, to form a diamond crystal layer having nitrogen-vacancy centers in at least part of the diamond crystal, nitrogen or nitride gas is mixed in the source gas, wherein the source gas is: 0.005 volume % or more and 6.000 volume % or less of the hydrocarbon gas; 93.500 volume % or more and less than 99.995 volume % of the hydrogen gas; and 5.0×10−5 volume % or more and 5.0×10−1 volume % or less of the nitrogen gas or the nitride gas, and the diamond crystal layer having the nitrogen-vacancy centers is formed.
Hitoshi NOGUCHI, Norio TOKUDA, Tsubasa MATSUMOTO
Filed: 14 Apr 23
Utility
Resist Composition and Pattern Forming Process
10 Aug 23
A resist composition comprising a base polymer comprising repeat units having a salt structure consisting of a sulfonic acid anion bonded to a polymer backbone and a sulfonium cation having an acid labile group of aromatic group-containing cyclic secondary or tertiary ester type as the acid generator exhibits a high sensitivity and reduced LWR or improved CDU.
Jun Hatakeyama, Masahiro Fukushima
Filed: 31 Jan 23
Utility
Addition-curable Organopolysiloxane Composition, Release Paper and Release Film
10 Aug 23
One of the purposes of the present invention is to provide an addition-curable organopolysiloxane composition which cures sufficiently with a minor amount of platinum group metal catalyst to exert satisfactory adhesion and provides a cured film having a release force comparable to the prior art cured film, and to provide an addition-curable organopolysiloxane composition which allows the sufficient progress of addition cure even on a substrate comprising a catalyst poison component so as to be suitable for providing a release coating for silicone rubber and release paper or release film.
Toshiaki Ihara, Tsuneo Kimura
Filed: 3 Jun 21
Utility
Resist Composition and Pattern Forming Process
10 Aug 23
A resist composition comprising a base polymer comprising repeat units having a salt structure consisting of a sulfonic acid anion bonded to a polymer backbone and a sulfonium cation having an acid labile group of aromatic group-containing tertiary ester type as the acid generator exhibits a high sensitivity and reduced LWR or improved CDU.
Jun Hatakeyama, Masahiro Fukushima
Filed: 31 Jan 23
Utility
Method for Producing Doping Raw-material Solution for Film Formation, Method for Producing Laminate, Doping Raw-material Solution for Film Formation, and Semiconductor Film
10 Aug 23
A method for producing a doping raw-material solution for film formation includes a step of firstly mixing a solute including a halogen-containing organic dopant compound or a dopant halide with a first solvent, but not with other solvents to prepare a dopant precursor solution separately from a film-forming raw material, where an acidic solvent is used as the first solvent.
Hiroshi HASHIGAMI, Takenori WATABE, Takahiro SAKATSUME, Toshiyuki KAWAHARAMURA, Thai Giang DANG, Tatsuya YASUOKA
Filed: 7 Jun 21
Utility
Chemically amplified resist composition and patterning process
8 Aug 23
A chemically amplified resist composition comprising a quencher containing an ammonium salt of an iodized or brominated phenol and an acid generator exerts a sensitizing effect and an acid diffusion suppressing effect and forms a pattern having satisfactory resolution, LWR and CDU.
Jun Hatakeyama
Filed: 16 Jul 20
Utility
Resist composition and patterning process
8 Aug 23
A resist composition comprising a base polymer and a salt is provided.
Jun Hatakeyama
Filed: 4 Aug 20
Utility
Positive resist composition and patterning process
8 Aug 23
A positive resist composition comprising a base polymer comprising recurring units (a) containing an imide group having an iodized aromatic group bonded thereto and recurring units (b1) having an acid labile group-substituted carboxyl group and/or recurring units (b2) having an acid labile group-substituted phenolic hydroxyl group has a high sensitivity and resolution and forms a pattern of good profile with reduced edge roughness and size variation.
Jun Hatakeyama, Masahiro Fukushima
Filed: 2 Oct 20
Utility
Enteric coating composition, solid preparation and method for producing solid preparation
8 Aug 23
There are provided an enteric coating composition having an excellent film-forming property, being capable of forming a film at a lower temperature than conventional compositions, and/or being capable of avoiding decomposition of a drug due to a high temperature and operational troubles due to or nozzle clogging; and others.
Shogo Warashina, Yasuyuki Hirama
Filed: 1 Apr 20
Utility
Material for forming organic film, method for forming organic film, patterning process, and compound
8 Aug 23
Daisuke Kori, Takayoshi Nakahara, Yusuke Biyajima
Filed: 4 Nov 20