48 patents
Page 2 of 3
Utility
Molecular Beam Epitaxy Systems with Variable Substrate-to-source Arrangements
22 Apr 21
Systems and methods for providing controllable substrate-to-source arrangements in a Molecular Beam Epitaxy (MBE) system to selectively adjust a distance, orientation, or other geometric configuration as between the source(s) and substrate(s) used in epitaxial growth systems are described herein.
Richard Charles Bresnahan, Scott Wayne Priddy, William Colbert Campbell, III, Mark Lee O'Steen, Stephen Gary Farrell
Filed: 19 Oct 20
Utility
CVD Reactor Single Substrate Carrier and Rotating Tube for Stable Rotation
1 Apr 21
A self-centering substrate carrier system for a chemical vapor deposition reactor includes a substrate carrier chosen to at least partially support a wafer for CVD processing and that comprises a beveled surface.
Sandeep Krishnan, Bojan Mitrovic, Mandar Deshpande, Alexander Gurary, Aniruddha Bagchi
Filed: 6 May 20
Design
Transportable semiconductor wafer rack
19 Jan 21
Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier
Filed: 20 Feb 19
Design
Transportable semiconductor wafer rack
19 Jan 21
Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier
Filed: 20 Feb 19
Utility
Melt Detection Systems and Methods of Using the Same
14 Jan 21
High bandwidth time-and-space resolved phase transition microscopy systems configured to detect melt onset in a wafer being processed by laser annealing systems with ultra-short dwell times and spot size.
Matthew Earl Wallace Reed
Filed: 30 Jun 20
Utility
Laser annealing systems and methods with ultra-short dwell times
23 Nov 20
Laser annealing systems and methods with ultra-short dwell times are disclosed.
Andrew M. Hawryluk, Serguei Anikitchev
Filed: 20 Aug 18
Utility
Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD
23 Nov 20
A chuck system for performing a substrate-biased atomic layer deposition process that forms an electrically conductive film on a substrate includes an electrically conductive substrate holder configured to support the substrate and an electrically conductive base that supports the substrate holder.
Michael J. Sershen, Adam Bertuch
Filed: 22 Jan 18
Utility
Deposition System with Integrated Carrier Cleaning Modules
11 Nov 20
A chemical vapor deposition system for semiconductor wafer production is disclosed.
Alexander I. Gurary, Mandar Deshpande, Ajit Paranjpe
Filed: 7 May 20
Design
Mid-filament spacer
10 Aug 20
Premkumar Suhandira Viran, Hao Chen, Joe Lamb
Filed: 12 Jul 18
Utility
Rotating Disk Reactor with Self-Locking Carrier-to-Support Interface for Chemical Vapor Deposition
5 Aug 20
A substrate carrier that supports a semiconductor substrate in a chemical vapor deposition system that includes a support having a beveled inner top surface including a top surface and a bottom surface.
Alexander I. Gurary, Sandeep Krishnan, Yuliy Rashkovsky, Todd Luse, Gaurab Samanta
Filed: 25 Jan 20
Utility
Rotating disk reactor with ferrofluid seal for chemical vapor deposition
20 Jul 20
A rotating disk reactor for chemical vapor deposition includes a vacuum chamber and a ferrofluid feedthrough comprising an upper and a lower ferrofluid seal that passes a motor shaft into the vacuum chamber.
Louise S. Barriss, Richard A. Comunale, Roger P. Fremgen, Alexander I. Gurary, Todd A. Luse, Robert White Milgate, John D. Pollock
Filed: 15 Dec 16
Utility
Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
6 Jul 20
The wafer processing system includes a rotatable wafer support member for supporting a wafer and a plurality of collections trays disposed about a peripheral edge of the wafer support member.
William Gilbert Breingan, Chris Hofmeister, John Taddei
Filed: 24 Apr 17
Utility
Laser-assisted atomic layer deposition of 2D metal chalcogenide films
8 Jun 20
Methods of forming 2D metal chalcogenide films using laser-assisted atomic layer deposition are disclosed.
Ganesh Sundaram
Filed: 28 Mar 18
Utility
Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing
25 May 20
Methods disclosed herein include scanning a focus spot formed by a laser beam over either a metal layer or IC structures that include a metal and a non-metal.
Serguei Anikitchev, Andrew M. Hawryluk
Filed: 16 Jul 18
Utility
Semiconductor Wafer Processing Chamber
20 May 20
A wafer processing system according to one embodiment includes a chamber housing having an exhaust and a rotatable wafer support member for supporting a wafer.
David Goldberg, Simon Bird, William Gilbert Breingan, John Taddei, Robert Altonji, Lev Rapoport, Christopher Orlando, Ian Rafter
Filed: 16 Oct 19
Utility
System and Method for Metrology Using Multiple Measurement Techniques
11 Mar 20
Systems and methods for detecting complementary sets of data during a chemical vapor deposition process are disclosed herein.
Daewon Kwon
Filed: 5 Sep 18
Utility
Chemical Vapor Deposition Wafer Carriers
26 Feb 20
A wafer carrier has a plurality of built-up pockets connected by raised interstitial spaces on a base.
Bojan Mitrovic, Yuliy Rashkovsky, Eric Armour
Filed: 20 Aug 18
Utility
Periphery purge shutter and flow control systems and methods
24 Feb 20
An arrangement of two shutters radially outward from an injector block and a susceptor onto which a wafer carrier is removably mounted are configured to provide a flowpath through a reactor chamber that does not exhibit a vortex, thereby reducing or eliminating buildup on the inside of the reactor chamber and facilitating large temperature gradient between the injector block and the wafer carrier.
Bojan Mitrovic, Eric Armour, Ian Kunsch
Filed: 1 Mar 17
Utility
Gas concentration sensors and systems
24 Feb 20
A chemical vapor deposition or atomic layer deposition system includes a gas concentration sensor for determining the quantity of precursor gases admitted thereto.
Chi-Jung Cheng, Leo Chin, Christopher J. Morath, Arindam Sinharoy, Raymond C. Logue
Filed: 9 Mar 17
Utility
Chemical vapor deposition wafer carriers
19 Feb 20
A wafer carrier has a plurality of built-up pockets connected by raised interstitial spaces on a base.
Bojan Mitrovic, Yuliy Rashkovsky, Eric Armour
Filed: 19 Aug 18