42 patents
Page 3 of 3
Utility
Optical Metrology Device for Measuring Samples Having Thin or Thick Films
10 Jun 20
An optical metrology device includes an aperture that can be adjusted based on the thickness of the film on a sample.
Jeffrey T. Fanton
Filed: 6 Dec 18
Utility
Sample Inspection Using Topography
2 Oct 19
Defects are detected using surface topography data.
Nigel P. SMITH, Holly M. EDMUNDSON, Michael A. GILMORE
Filed: 20 Nov 18