262 patents
Page 10 of 14
Utility
Creating and tuning a classifier to capture more defects of interest during inspection
26 Jan 21
Defects of interest can be captured by a classifier.
Erfan Soltanmohammadi, Martin Plihal, Tai-Kam Ng, Sang Hyun Lee
Filed: 13 Nov 18
Utility
Image sensors with grounded or otherwise biased channel-stop contacts
26 Jan 21
A back-illuminated image sensor includes a first pixel, a second pixel, and a channel stop situated between the first pixel and the second pixel to isolate the first pixel from the second pixel.
Tzi-Cheng Lai, Jehn-Huar Chern, Stephen Biellak
Filed: 5 Oct 18
Utility
Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy
19 Jan 21
Methods and systems for measuring structural and material characteristics of semiconductor structures based on combined x-ray reflectometry (XRR) and x-ray photoelectron spectroscopy (XPS) are presented herein.
Andrei V. Shchegrov, Alexander Kuznetsov, Oleg Khodykin
Filed: 21 Dec 18
Utility
Direct focusing with image binning in metrology tools
19 Jan 21
Focusing methods and modules are provided for metrology tools and systems.
Nadav Gutman, Boris Golovanevsky, Noam Gluzer
Filed: 25 Aug 17
Utility
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
12 Jan 21
The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum.
Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin
Filed: 9 Jul 18
Utility
Overlay targets with orthogonal underlayer dummyfill
12 Jan 21
The disclosure is directed to designing and using an overlay target with orthogonal underlayer dummyfill.
Nuriel Amir, Guy Cohen, Vladimir Levinski, Michael Adel
Filed: 21 May 13
Utility
3D microscope including insertable components to provide multiple imaging and measurement capabilities
4 Jan 21
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities.
James Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
Filed: 6 Aug 18
Utility
Three-dimensional imaging for semiconductor wafer inspection
4 Jan 21
Methods and systems for improved detection and classification of defects of interest (DOI) on semiconductor wafers based on three-dimensional images are described herein.
Pavel Kolchin, Robert M. Danen, Philip Measor
Filed: 21 Aug 17
Utility
High efficiency laser-sustained plasma light source
4 Jan 21
A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly.
Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
Filed: 19 Jun 16
Utility
Droplet generation for a laser produced plasma light source
28 Dec 20
The present disclosure is directed to a device having a nozzle for dispensing a liquid target material; one or more intermediary chamber(s), each intermediary chamber positioned to receive target material and formed with an exit aperture to output target material for downstream irradiation in a laser produced plasma (LPP) chamber.
Brian Ahr, Alexander Bykanov, Rudy F. Garcia, Layton Hale, Oleg Khodykin
Filed: 8 Sep 16
Utility
Methods of plasma etching and plasma dicing
21 Dec 20
A method is for plasma etching one or more dicing lanes in a silicon substrate having a backside metal layer attached thereto.
Oliver J Ansell, Martin Hanicinec, Janet Hopkins
Filed: 31 May 18
Utility
Filter assembly for providing adjustable spectral capabilities in a broadband inspection system
21 Dec 20
A system which may be used to increase the number of available spectrum bands in an inspection system is provided.
Jeremy Nesbitt, Jagadeesh Kumar, David C. Oram
Filed: 12 Jul 17
Utility
Chromatic confocal area sensor
14 Dec 20
3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined.
Christophe Wouters, Kristof Joris, Johan De Greeve
Filed: 15 Jul 19
Utility
Estimating amplitude and phase asymmetry in imaging technology for achieving high accuracy in overlay metrology
14 Dec 20
Metrology methods are provided for deriving metrology measurement parameter value(s) by identifying the value(s) in which the corresponding metrology measurement signal(s) have minimal amplitude asymmetry.
Tal Marciano, Nadav Gutman, Yuri Paskover, Guy Cohen, Vladimir Levinski
Filed: 4 Jul 18
Utility
Targeted recall of semiconductor devices based on manufacturing data
14 Dec 20
A system for providing a targeted recall includes a metrology sub-system for performing in-line measurements on semiconductor dies after one or more fabrication steps to generate in-line measurement profiles, a failure analysis sub-system for determining a manufacturing fingerprint of a failed die, and a controller.
Robert J. Rathert, David W. Price
Filed: 17 Jul 18
Utility
X-ray zoom lens for small angle x-ray scatterometry
7 Dec 20
Methods and systems for controlling illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements of different sized metrology targets are described herein.
Nikolay Artemiev, Michael Friedmann
Filed: 18 Dec 17
Utility
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
7 Dec 20
A scanning electron microscopy system is disclosed.
Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Mark A. McCord, Rainer Knippelmeyer
Filed: 20 Jan 19
Utility
System and method for characterization of buried defects
30 Nov 20
A system for defect detection and analysis is provided.
Jason Kirkwood, Jan Lauber
Filed: 12 Nov 18
Utility
System and method for photocathode illumination inspection
16 Nov 20
A high-brightness electron beam source is disclosed.
Gildardo Delgado, Katerina Ioakeimidi, Frances A. Hill, Rudy F. Garcia, Mike Romero, Zefram Marks, Gary V. Lopez Lopez
Filed: 15 Jan 19
Utility
Multi-column scanning electron microscopy system
16 Nov 20
A multi-column scanning electron microscopy (SEM) system includes a column assembly, where the column assembly includes a first substrate array assembly and at least a second substrate array assembly.
Robert Haynes, Aron Welk, Tomas Plettner, John Gerling, Mehran Nasser Ghodsi
Filed: 1 Jun 17