
Credit Suisse Semiconductor and
Semiconductor Capital Equipment Conference
Craig DeYoung
VP Investor Relations
May 3, 2006
New York
Exhibit 99.6

Safe Harbor
“Safe Harbor” Statement under the U.S. Private Securities
Litigation Reform Act of 1995: the matters discussed in this
document may include forward-looking statements that are
subject to risks and uncertainties including, but not limited to:
economic conditions, product demand and semiconductor
equipment industry capacity, worldwide demand and
manufacturing capacity utilization for semiconductors (the
principal product of our customer base), competitive products
and pricing, manufacturing efficiencies, new product
development, ability to enforce patents, the outcome of
intellectual property litigation, availability of raw materials and
critical manufacturing equipment, trade environment, and
other risks indicated in the risk factors included in ASML’s
Annual Report on Form 20-F and other filings with the U.S.
Securities and Exchange Commission.
/ Slide 2

Agenda
Recent accomplishments
Recent financial summary
Q2 outlook
Company focus 2006
/ Slide 3

Accomplishments
/ Slide 4

ASML out performs equipment industry growth
in 2005
Source: VLSI Research, April 2006
-7.1%
23396.8
25191.0
Total Market
+2.7%
2786.9
2712.4
ASML
-6.3%
3480.9
3714.0
Tokyo Electron Ltd.
-22.9%
4444.7
5768.1
Applied Materials
2005/2004
2005
2004
IC Fabrication Equipment
/ Slide 5

ASML improves its market share by revenue in 2005
VLSIR
Gartner
SEMI
TIN
Semiconductor new systems
x
x
x
x
Semiconductor used systems
x
x
x
ASML Share
57.0%
54.8%
-
53.3%
Non Semiconductor (TFH, MEMS)
-
-
x
-
ASML Share
-
-
57.2%
-
/ Slide 6

Accomplishments Q1 2006
Solid execution
Gross margin increased to 40.0% from 37.3% in Q4 ‘05
Operating margin grew to 18.2% from 13.6% in Q4 ‘05
Improved our market position
Gained 7th customer in Japan – will use ASML immersion tools
Net bookings of 62 systems (47 new) with a value of € 710 million
Immersion
Backlog increased to 18 immersion systems with 5 pending orders for shipment
in 2006
First 1.2NA TWINSCAN XT:1700i shipped early April to Asian customer
42 nm resolution half pitch images produced on the TWINSCAN XT:1700i
Customers demonstrate low defect immersion processes
/ Slide 7

Financial accomplishments Q1 2006
Robust financial performance
Revenue of € 629 million, 15% increase over Q4 ‘05
Shipped 51 systems (39 new systems) vs. 47 in Q4 ‘05
ASP new systems is € 13.5 million vs. € 12.5 in Q4 ‘05
Net profit of € 80 million (12.7% of sales) vs. € 52 (9.4%
of sales)
/ Slide 8

Financial summary Q1 ‘06
/ Slide 9

Total revenues M€
179
609
351
820
526
370
329
318
785
611
616
453
548
533
763
685
629
1959
1543
2465
2529
Peak revenue year 2000 at € 2.673B
/ Slide 10

Revenue breakdown: Q1 2006
Value per type
TWINSCAN
86%
Others
14%
Value per end-use
Foundry
8%
Memory
57%
IDM
35%
Value per technology
KrF
46%
ArF
50%
i-line
4%
Value per region
U.S.
27%
Taiwan
19%
Korea
32%
China
3%
Europe
16%
ROW
3%
Numbers have been rounded for readers’ convenience
units
Units
18
33
Others
TWINSCAN
12
25
14
i-line
KrF
ArF
/ Slide 11

Key financial trends 2005 - 2006
/ Slide 12
Numbers have been rounded for readers’ convenience
Profit & Loss Statement
M€
Q1 0
5
Q2 0
5
Q3 0
5
Q4 0
5
Q1
0
6
Units
59
51
39
47
51
Sales
685
763
533
548
62
9
Gross margin
Gross margin %
274
40.0
%
299
39.1
%
197
37.0
%
204
37.3
%
251
40.0
%
R&D
79
82
80
82
87
SG&A
51
55
48
47
50
O
perating income
Operating
income %
144
21.0
%
162
21.2
%
69
12.9
%
75
13.6
%
114
18.2
%
Net income
Net income %
100
14.6
%
112
14.6
%
48
9.0
%
52
9.4
%
80
12.7
%

Backlog: litho units and value
/ Slide 13

Backlog as of April 2, 2006
85 % of unit backlog carry Q2 + Q3 2006 shipment dates
Q1 net bookings of 62 systems with a value M€ 710 including
47 new tools with an ASP of M€ 14.3
Note: Due to possible customer changes in delivery schedules and to cancellation of orders, our backlog at any
particular date is not necessarily indicative of actual sales for any succeeding period
Numbers have been rounded for readers’ convenience
New Systems
Used Systems
Total Backlog
M€ 1.560 (1.411)
M€ 36 (23)
M€ 1.596 (1.434)
M€ 16.6 (16.4)
M€ 3.0 (2.6)
M€ 15.1 (15.1)
Backlog
Backlog
94 (86)
12 (9)
106 (95)
Units
Value
ASP
( ) previous quarter data
/ Slide 14

Backlog lithography per April 2, 2006
Total value M€ 1,596
Value per type
TWINSCAN
95%
Others
5%
Value per end-use
Foundry
22%
Memory
49%
IDM
29%
Value per technology
i-line
3%
ArF dry
43 %
KrF
25%
ArF immersion
29 %
Numbers have been rounded for readers’ convenience
Value per region
U.S.
31%
Taiwan
21%
Korea
24%
ROW
2%
Europe
9%
China
8%
Japan
5%
/ Slide 15

Q2 outlook
Shipment of 64 systems expected vs. 51 in Q1
ASP for new system shipments expected to be € 14.5 million for
new systems and € 12.3 million for new + refurbished systems
Gross margin expected at 39 – 40%
R&D and SG&A are expected to be € 87 million net of credit and
€ 51 million respectively
ASML expects a sustained level of unit bookings in Q2 similar to
that of Q1, with a Q2 order mix favoring capacity additions in KrF
and i-line systems and shorter order leadtimes
Planning to ship the first EUV Alpha demo tools by mid 2006
Reiterating shipment forecast of 20-25 immersion systems in
2006
/ Slide 16

Share Buyback Program
ASML confirms its intention to execute a share buyback
program in 2006
Company will repurchase up to the equivalent of € 400
million of its own shares over the next 12 months
Purpose of the program is to return excess cash to
shareholders through reduction of the number of issued
shares
/ Slide 17

Company focus 2006
Continue execution of 2005 focus points
Execute on volume production ramp of the TWINSCAN
XT:1700i, hyper NA tool for 45 nm node
Execute on cost of goods reduction
Execute on lead time reduction
Accelerate the technology leadership gap
Ship 2 EUV Alpha demo tools
Finalize development of the >1.3 NA immersion tool for
shipment in H1 2007
Develop alternative architectures for cost effective
lithography at 32 nm resolution and beyond
/ Slide 18

Commitment