855 patents
Page 9 of 43
Utility
Positive resist composition and patterning process
31 Jan 23
A positive resist composition comprising a base polymer comprising recurring units (a) having the structure of an ammonium salt of an iodized or brominated phenol, and recurring units (b1) having an acid labile group-substituted carboxyl group and/or recurring units (b2) having an acid labile group-substituted phenolic hydroxyl group exhibits a high sensitivity, high resolution, low edge roughness and dimensional uniformity, and forms a pattern of good profile after exposure and development.
Jun Hatakeyama
Filed: 1 Jul 20
Utility
Haloalkenyl alkoxymethyl ether compound and a process for preparing a terminal conjugated alkadien-1-yl acetate compound and a terminal conjugated alkadien-1-ol compound therefrom
24 Jan 23
The present invention relates to a haloalkenyl alkoxymethyl ether compound of the following general formula (1): R1CH2OCH2OCH2CH2CH═CH(CH2)aX1 (1) wherein R1 represents a hydrogen atom, an n-alkyl group having 1 to 9 carbon atoms, or a phenyl group, X1 represents a halogen atom, and “a” represents an integer of 3 to 14.
Yuki Miyake, Takeshi Kinsho, Ryo Komatsu
Filed: 30 Sep 21
Utility
Onium salt, chemically amplified resist composition, and patterning process
24 Jan 23
Masahiro Fukushima, Masaki Ohashi, Kazuhiro Katayama
Filed: 15 Jan 20
Utility
Surface treatment agent and surface treatment method using the same
24 Jan 23
Takeshi Nyuugaku
Filed: 22 Nov 19
Utility
Coating composition, surface treatment agent containing said composition, and article which is surface-treated with said surface treatment agent
24 Jan 23
Seiya Mori, Ryusuke Sakoh
Filed: 3 Dec 18
Utility
Tantalum carbide coated carbon material, manufacturing method thereof, and member for apparatus for manufacturing semiconductor single crystal
17 Jan 23
A member for an apparatus for manufacturing a semiconductor single crystal having long product life and a tantalum carbide coated carbon material are provided.
Chikara Mori, Waichi Yamamura, Shoji Kano, Akihiro Hirate
Filed: 15 Jan 21
Utility
Method for measuring distance of diffusion of curing catalyst
17 Jan 23
A method for measuring a distance of diffusion of a curing catalyst for a thermosetting silicon-containing material includes the steps of: forming a silicon-containing film from a composition containing a thermosetting silicon-containing material, a curing catalyst and a solvent; coating the silicon-containing film with a photosensitive resin composition containing a resin whose solubility in alkaline developer is increased by the action of an acid, an acid generator and a solvent, and subsequently heating to prepare a substrate on which the silicon-containing film and a resin film are formed; irradiating the substrate with a high energy beam or an electron beam to generate an acid and heat-treating the substrate to increase the solubility of the resin in an alkaline developer by the action of the acid in the resin film; dissolving the resin film in an alkaline developer; and measuring a film thickness of the remaining resin.
Tsutomu Ogihara, Tsukasa Watanabe, Yoshio Kawai, Tomohiro Kobayashi, Yusuke Biyajima, Masahiro Kanayama
Filed: 4 Mar 20
Utility
Water-in-oil emulsion-type stick-shaped deodorant composition
10 Jan 23
This water-in-oil emulsion-type stick-shaped deodorant composition contains: (A) a volatile component having a boiling point of 250° C. or less, where the total amount of water and ethanol in the (A) component is 83-100 mass %; (B) component (B-1), component (B-2), or a combination of components (B-1) and (B-2), wherein component (B-1) is an antiperspirant and component (B-2) is a fungicide; (C) a crosslinked silicone surfactant; (D) a non-crosslinked silicone surfactant; and (E) an oily component which has a solid phase at 25° C.
Masayuki Konishi, Ryuichi Inaba
Filed: 21 Aug 18
Utility
Monomer, polymer, negative resist composition, photomask blank, and resist pattern forming process
10 Jan 23
A negative resist composition comprising a polymer comprising recurring units having at least two acid-eliminatable hydroxyl or alkoxy groups in the molecule is effective for forming a resist pattern having a high resolution and minimal LER while minimizing defects.
Daisuke Domon, Masayoshi Sagehashi, Masaaki Kotake, Naoya Inoue, Keiichi Masunaga, Satoshi Watanabe
Filed: 21 May 19
Utility
Siloxane polymer containing isocyanuric acid and polyether skeletons, photosensitive resin composition, pattern forming process, and fabrication of opto-semiconductor device
10 Jan 23
A siloxane polymer comprising polysiloxane, silphenylene, isocyanuric acid, and polyether skeletons in a backbone and having an epoxy group in a side chain is provided.
Hitoshi Maruyama, Kyoko Soga
Filed: 7 Nov 19
Utility
Silicone emulsion composition for forming rubber coating film, and method for manufacturing same
10 Jan 23
Yoshinori Inokuchi
Filed: 13 Jun 18
Utility
Film-forming powder, film forming method, and film-forming powder preparing method
10 Jan 23
A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 μm, a total volume of ≤10 μm pores of 0.51-1.5 cm3/g as measured by mercury porosimetry, and a BET surface area of 3-50 m2/g is suitable for forming a dense film in high yields or deposition rates and high productivity.
Yuji Kimura, Yasushi Takai, Shigeyuki Nakamura
Filed: 15 Jul 19
Utility
Bio-electrode composition, bio-electrode, and method for manufacturing a bio-electrode
10 Jan 23
Jun Hatakeyama, Motoaki Iwabuchi, Yasuyoshi Kuroda
Filed: 25 Jul 19
Utility
Power module comprising a primer layer
10 Jan 23
Hatsuhiko Hattori, Atsushi Horinobu, Kensuke Kuwajima
Filed: 28 Mar 19
Utility
High efficiency solar cell and method for manufacturing high efficiency solar cell
10 Jan 23
A solar cell including a semiconductor substrate having a first conductivity type an emitter region, having a second conductivity type opposite to the first conductivity type, on a first main surface of the semiconductor substrate an emitter electrode which is in contact with the emitter region a base region having the first conductivity type a base electrode which is in contact with the base region and an insulator film for preventing an electrical short-circuit between the emitter region and the base region, wherein the insulator film is made of a polyimide, and the insulator film has a C6H11O2 detection count number of 100 or less when the insulator film is irradiated with Bi5++ ions with an acceleration voltage of 30 kV and an ion current of 0.2 pA by a TOF-SIMS method.
Hiroshi Hashigami, Shun Moriyama, Takenori Watabe, Hiroyuki Ohtsuka
Filed: 5 Apr 21
Utility
Method for preparing compact of resin compound having anisotropy
3 Jan 23
Tetsuo Oka, Yoshinori Takamatsu, Takeshi Fukuda
Filed: 26 Apr 19
Utility
Solar cell, method for manufacturing solar cell, and solar cell module
3 Jan 23
A solar cell is provided with: a semiconductor substrate having a light-receiving surface and a non-light-receiving surface; a PN junction section formed on the semiconductor substrate; a passivation layer formed on the light-receiving surface and/or the non-light-receiving surface; and power extraction electrodes formed on the light-receiving surface and the non-light-receiving surface.
Hiroshi Hashigami, Takenori Watabe, Hiroyuki Otsuka
Filed: 28 May 19
Utility
Method and system for transferring alignment marks between substrate systems
3 Jan 23
David Trung Doan, Yoshinori Ogawa, Nobuaki Matsumoto
Filed: 27 Apr 21
Utility
Paramagnetic garnet-type transparent ceramic, magneto-optical material and magneto-optical device
27 Dec 22
Masanori Ikari
Filed: 15 May 19
Utility
(Meth)acrylic-modified siloxane compound
27 Dec 22
Tomoyuki Goto
Filed: 29 Mar 18