386 patents
Page 19 of 20
Utility
Methods for producing low oxygen silicon ingots
23 Dec 19
An method for producing a silicon ingot includes melting polycrystalline silicon in a crucible enclosed in a vacuum chamber to form a melt, generating a cusped magnetic field within the vacuum chamber, dipping a seed crystal into the melt, withdrawing the seed crystal from the melt to pull a single crystal that forms the silicon ingot, wherein the silicon ingot has a diameter greater than about 150 millimeters (mm), and simultaneously regulating a plurality of process parameters such that the silicon ingot has an oxygen concentration less than about 5 parts per million atoms (ppma).
Soubir Basak, Carissima Marie Hudson, Gaurab Samanta, Jae-Woo Ryu, Hariprasad Sreedharamurthy, Kirk D. McCallum, HyungMin Lee
Filed: 22 Apr 18
Utility
Manufacturing Method of Smoothing a Semiconductor Surface
18 Dec 19
A method is provided for preparing semiconductor structure, e.g., a semiconductor on insulator structure, comprising a device layer having a smooth surface.
Gang Wang, Charles R. Lottes, Sasha Kweskin
Filed: 28 Aug 19
Utility
Method of manufacturing silicon germanium-on-insulator
16 Dec 19
The disclosed method is suitable for producing a SiGe-on-insulator structure.
Gang Wang, Shawn George Thomas
Filed: 9 May 19
Utility
Method for Transfer of a Thin Layer of Silicon
11 Dec 19
A method for preparing semiconductor on insulator structures comprises transferring a thin layer of silicon from a donor substrate onto a handle substrate.
Gaurab Samanta, Salvador Zepeda
Filed: 22 May 19
Utility
Methods for assessing semiconductor structures
25 Nov 19
Methods for assessing the quality of a semiconductor structure having a charge trapping layer to, for example, determine if the structure is suitable for use as a radiofrequency device are disclosed.
Igor Rapoport, Srikanth Kommu, Igor Peidous, Gang Wang, Jeffrey L. Libbert
Filed: 8 Feb 18
Utility
Wafer carrier
25 Nov 19
A wafer carrier for processing a plurality of wafers includes a carrier body which rotatable about a central axis, and a plurality of pockets formed in the carrier body.
Yen-Lun Huang, Chien-Jen Sun, Ying-Ru Shih, Wen-Ching Hsu
Filed: 11 Mar 17
Utility
Seed chuck assemblies and crystal pulling systems for reducing deposit build-up during crystal growth process
25 Nov 19
Crystal pulling systems for growing monocrystalline ingots from a melt of semiconductor or solar-grade material are described.
Parthiv Daggolu, Benjamin Michael Meyer, William L. Luter, Soubir Basak, Sumeet S. Bhagavat, Nan Zhang, Gaurab Samanta
Filed: 4 Jan 17
Utility
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
18 Nov 19
A multilayer composite structure and a method of preparing a multilayer composite structure are provided.
Qingmin Liu, Gang Wang
Filed: 10 Jan 18
Utility
High resistivity semiconductor-on-insulator wafer and a method of manufacturing
18 Nov 19
A semiconductor on insulator multilayer structure is provided.
Igor Peidous, Lu Fei, Jeffrey L. Libbert, Andrew M. Jones, Alex Usenko, Gang Wang, Shawn George Thomas, Srikanth Kommu
Filed: 15 Nov 15
Utility
Gas Doping Systems for Controlled Doping of a Melt of Semiconductor or Solar-grade Material
13 Nov 19
A crystal pulling apparatus for producing an ingot is provided.
Stephan Haringer, Roberto Scala, Marco D'Angella
Filed: 22 Jul 19
Utility
Semiconductor substrate and manufacturing method thereof
11 Nov 19
A semiconductor substrate and a manufacturing method thereof are provided.
Chun-I Fan, Chih-Yuan Chuang, Ying-Ru Shih, Wen-Ching Hsu
Filed: 3 May 17
Utility
High resistivity silicon-on-insulator substrate comprising an isolation region
11 Nov 19
A multilayer composite structure and a method of preparing a multilayer composite structure are provided.
Igor Peidous, Jeffrey L. Libbert
Filed: 19 Feb 18
Utility
Handle substrate for use in manufacture of semiconductor-on-insulator structure and method of manufacturing thereof
11 Nov 19
A method is provided for preparing a high resistivity silicon handle substrate for use in semiconductor-on-insulator structure.
Alex Usenko
Filed: 20 Dec 17
Utility
HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE TRAPPING LAYER FORMED BY He-N2 CO-IMPLANTATION
6 Nov 19
A multilayer composite structure and a method of preparing a multilayer composite structure are provided.
Qingmin Liu, Robert Wendell Standley
Filed: 16 Jul 19
Utility
High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed on a substrate with a rough surface
4 Nov 19
A multilayer composite structure and a method of preparing a multilayer composite structure are provided.
Igor Peidous, Andrew M. Jones, Srikanth Kommu, Gang Wang, Jeffrey L. Libbert
Filed: 30 Jan 17
Utility
High resistivity silicon-on-insulator structure and method of manufacture thereof
4 Nov 19
A multilayer structure is provided, the multilayer structure comprising a semiconductor on insulator structure comprises an insulating layer that enhances the stability of the underlying charge trapping layer.
Jeffery L. Libbert, Qingmin Liu, Gang Wang, Andrew M. Jones
Filed: 30 Nov 17
Utility
Light Assisted Platelet Formation Facilitating Layer Transfer from a Semiconductor Donor Substrate
30 Oct 19
A method is disclosed for promoting the formation of uniform platelets in a monocrystalline semiconductor donor substrate by irradiating the monocrystalline semiconductor donor substrate with light.
Gang Wang, Charles Lottes
Filed: 8 Apr 19
Utility
Apparatus for Stressing Semiconductor Substrates
30 Oct 19
Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.
Robert J. Falster, Vladimir V. Voronkov, John A. Pitney, Peter D. Albrecht
Filed: 10 Jun 19
Utility
Manufacturing Method of Smoothing a Semiconductor Surface
30 Oct 19
A method is provided for preparing semiconductor structure, e.g., a semiconductor on insulator structure, comprising a device layer having a smooth surface.
Gang Wang, Charles R. Lottes, Sasha Kweskin
Filed: 8 Jul 19
Utility
Semiconductor wafer support ring for heat treatment
28 Oct 19
A support ring for supporting a semiconductor wafer in a boat of a vertical furnace used in processing of the semiconductor wafer includes a semicircular segment.
Qingmin Liu, William Lynn Luter, Shawn George Thomas
Filed: 31 May 18