7578 patents
Page 11 of 379
Utility
Determining Substrate Precession with Acoustic Signals
7 Dec 23
A chemical mechanical polishing apparatus includes a platen to support a polishing pad, a carrier head to hold a surface of a substrate against the polishing pad, a motor to generate relative motion between the platen and the carrier head so as to polish an overlying layer on the substrate, an in-situ acoustic monitoring system comprising an acoustic sensor that receives acoustic signals from the surface of the substrate, and a controller configured to determine an angular orientation of the substrate based on received acoustic signals from the in-situ acoustic monitoring system.
Nicholas A. Wiswell, Benjamin Cherian, Jun Qian, Thomas H. Osterheld
Filed: 10 Oct 22
Utility
Acoustic Monitoring of Conditioner During Polishing
7 Dec 23
A chemical mechanical polishing apparatus includes a platen to support a polishing pad, a conditioner head to hold a conditioner disk in contact with the polishing pad, a motor to generate relative motion between the polishing pad and the conditioner disk so as to condition the polishing pad, an in-situ acoustic monitoring system having an acoustic sensor to receive acoustic signals from the conditioner disk, and a controller configured to analyze a signal from the acoustic sensor and determine a characteristic of the conditioner disk or conditioner head based on the signal.
Thomas H. Osterheld, Benjamin Cherian, Jun Qian, Haoquan Fang, Nicholas A. Wiswell, Sohrab Pourmand, Jeonghoon Oh, Brian J. Brown
Filed: 23 Sep 22
Utility
Monitoring of Acoustic Events on a Substrate
7 Dec 23
A chemical mechanical polishing apparatus, including a platen supporting a polishing pad; a carrier head to hold a surface of a substrate against the polishing pad; a motor to generate relative motion between the platen and the carrier head so as to polish an overlying layer on the substrate; an array of acoustic sensors arranged within the carrier head to receive acoustic signals from the surface of the substrate; and a controller configured to detect a position of an acoustic event on the surface of the substrate based on received acoustic signals from the array of acoustic sensors.
Upendra Ummethala, Nicholas A. Wiswell, David Masayuki Ishikawa, Sohrab Pourmand, Benjamin Cherian, Thomas H. Osterheld, Jeonghoon Oh, Jianshe Tang
Filed: 2 Jun 23
Utility
In-situ Conditioner Disk Cleaning During CMP
7 Dec 23
A polishing system includes a platen to hold a polishing pad, a carrier head to hold a substrate against the polishing pad, a conditioner including a conditioner head to hold a conditioner disk against the polishing pad, a motor to move the conditioner head laterally movable relative to the platen, a conditioning disk cleaning station positioned adjacent the platen to clean the conditioning disk, and a controller configured to cause the motor to, during polishing of the substrate, move the conditioner head back and forth between a first position with the conditioner head over the polishing pad and a second position with the conditioner head in the conditioner disk cleaning station.
Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Jeonghoon Oh, Chad Pollard, Chih Chung Chou, Ningzhuo Cui, Hui Chen
Filed: 17 Oct 22
Utility
Holding Arrangement for Holding a Substrate, Carrier for Supporting a Substrate, Vacuum Processing System, Method for Holding a Substrate, and Method for Releasing a Substrate
7 Dec 23
The present disclosure provides a holding arrangement.
Simon LAU
Filed: 24 Aug 23
Utility
Emissivity Independence Tuning
7 Dec 23
Embodiments disclosed herein include a method of calibrating a processing tool.
Wolfgang Aderhold
Filed: 3 Jun 22
Utility
System for Automatic Tumor Detection and Classification
7 Dec 23
Certain aspects of the present disclosure provide techniques for automatically detecting and classifying tumor regions in a tissue slide.
Parijat Prakash PRABHUDESAI, Ganesh Kumar MOHANUR RAGHUNATHAN, Sumit Kumar JHA, Aditya SISTA, Narasimha Murthy CHANDAN
Filed: 12 Jun 23
Utility
Deposition of reactive metals with protection layer for high volume manufacturing
5 Dec 23
A method and apparatus for manufacturing a flexible layer stack, and to a flexible layer stack.
Subramanya P. Herle
Filed: 23 Nov 21
Utility
Control of steam generation for chemical mechanical polishing
5 Dec 23
A chemical mechanical polishing system includes a steam generator with a heating element to apply heat to a vessel to generate steam, an opening to deliver steam onto a polishing pad, a first valve in a fluid line between the opening and the vessel, a sensor to monitor a steam parameter, and a control system.
Hari Soundararajan, Shou-Sung Chang, Calvin Lee, Jonathan P. Domin, Shuchivrat Datar, Dmitry Sklyar, Paul D. Butterfield, Chad Pollard, Haosheng Wu
Filed: 28 Jun 21
Utility
Bias temperature instability correction in memory arrays
5 Dec 23
A method of correcting bias temperature instability in memory arrays may include applying a first bias to a memory cell, where the memory cell may include a memory element and a select element, and the first bias may causes a value to be stored in the memory element.
Christophe J. Chevallier, Siddarth Krishnan
Filed: 22 Aug 21
Utility
Methods for near surface work function engineering
5 Dec 23
Methods for adjusting a work function of a structure in a substrate leverage near surface doping.
Taichou Papo Chen
Filed: 4 May 22
Utility
Advanced temperature control for wafer carrier in plasma processing chamber
5 Dec 23
An advanced temperature control system and method are described for a wafer carrier in a plasma processing chamber.
Fernando M. Silveira, Chunlei Zhang, Phillip Criminale, Jaeyong Cho
Filed: 22 Jul 16
Utility
Methods, systems, and apparatus for tape-frame substrate cleaning and drying
5 Dec 23
Methods, systems, and apparatus for cleaning and drying a tape-frame substrate are provided.
Ying Wang, Guan Huei See, Gregory J. Wilson
Filed: 6 Jan 22
Utility
High-temperature chamber and chamber component cleaning and maintenance method and apparatus
5 Dec 23
Examples disclosed herein relate to a method and apparatus for cleaning and repairing a substrate support having a heater disposed therein.
Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok Oh, Joseph C. Werner, Nitin Khurana, Ganesh Balasubramanian, Jennifer Y. Sun, Xinhai Han, Zhijun Jiang
Filed: 27 Apr 21
Utility
Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods
5 Dec 23
A process chamber includes one or more vertical walls at least partially defining a chamber portion of the process chamber, and multiple zones located about a periphery of the one or more vertical walls, wherein one or more of the multiple zones extends from a top to a bottom of the one or more vertical walls.
Paul Z. Wirth
Filed: 29 Jul 21
Utility
Substrate structuring methods
5 Dec 23
The present disclosure relates to methods and apparatus for structuring a semiconductor substrate.
Han-Wen Chen, Steven Verhaverbeke, Giback Park
Filed: 18 May 22
Utility
Indium-gallium-nitride light emitting diodes with increased red-light quantum efficiency
5 Dec 23
Exemplary processing methods of forming a semiconductor structure may include forming a nucleation layer on a semiconductor substrate.
Michael Chudzik, Michel Khoury, Max Batres
Filed: 10 Mar 21
Utility
Ceramic showerheads with conductive electrodes
5 Dec 23
Exemplary semiconductor processing chamber showerheads may include a dielectric plate characterized by a first surface and a second surface opposite the first surface.
Laksheswar Kalita, Soonam Park, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh, Tae Won Kim
Filed: 23 Feb 23
Utility
OLED panel with trench overhang structures
5 Dec 23
Embodiments described herein generally relate to sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display.
Ji-young Choung, Jungmin Lee, Chung-chia Chen, Yusin Lin, Dieter Haas, Si Kyoung Kim
Filed: 13 Dec 22
Utility
Apparatus, system, and method for generating gas for use in a process chamber
5 Dec 23
Embodiments described herein generally relate to apparatus having a canister with a sidewall, a top, and a bottom forming a canister volume.
David Marquardt
Filed: 10 Nov 20