7578 patents
Page 14 of 379
Utility
Techniques to increase CMOS image sensor well depth by cyrogenic ion channeling of ultra high energy ions
28 Nov 23
Provided herein are approaches for forming an image sensor with increased well depth due to cryogenic ion channeling of ultra-high energy (UHE) ions.
Hans-Joachim L. Gossmann, Stanislav S. Todorov, Hiroyuki Ito
Filed: 7 Oct 20
Utility
Heated pedestal design for improved heat transfer and temperature uniformity
28 Nov 23
Embodiments of the present disclosure generally relate to a pedestal for increasing temperature uniformity in a substrate supported thereon.
Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng, Diwakar N. Kedlaya, Juan Carlos Rocha-Alvarez, Umesh M. Kelkar, Karthik Janakiraman, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Vinay K. Prabhakar, Byung Seok Kwon
Filed: 4 Dec 19
Utility
Internally divisible process chamber using a shutter disk assembly
28 Nov 23
Apparatus and methods for forming and using internally divisible physical vapor deposition (PVD) process chambers using shutter disks are provided herein.
John Joseph Mazzocco, Anantha K. Subramani, Yang Guo
Filed: 24 Jun 22
Utility
Method of cleaning a structure and method of depositing a capping layer in a structure
28 Nov 23
Embodiments of the present disclosure generally relate to methods of cleaning a structure and methods of depositing a capping layer in a structure.
Naomi Yoshida, He Ren, Hao Jiang, Chenfei Shen, Chi-Chou Lin, Hao Chen, Xuesong Lu, Mehul B. Naik
Filed: 20 Jan 21
Utility
Servo-control system
28 Nov 23
Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller.
Paul Wirth, Behzad Taheri
Filed: 27 Sep 22
Utility
In-situ etch material selectivity detection system
28 Nov 23
An article, apparatus, and method for detecting an etch material selectivity is provided.
Keith Berding, Blake Erickson, Soumendra Barman, Zhaozhao Zhu
Filed: 10 Aug 21
Utility
Edge protection on semiconductor substrates
28 Nov 23
Exemplary methods of processing a semiconductor substrate may include forming a layer of dielectric material on the semiconductor substrate.
Amirhasan Nourbakhsh, Lan Yu, Joseph F. Salfelder, Ki Cheol Ahn, Tyler Sherwood, Siddarth Krishnan, Michael Jason Fronckowiak, Xing Chen
Filed: 26 Mar 21
Utility
High-temperature Substrate Support Assembly with Failure Protection
23 Nov 23
A substrate support assembly includes a puck, comprising a heating element, a power distribution assembly, and an insulator comprising at least one of alumina or thermoplastic disposed between the puck and the power distribution assembly, wherein an electrical connection between the heating element and the power distribution assembly comprises a terminal and a conical washer.
Denis Martin Koosau, Suresh Gupta, Martin Perez-Guzman, Ashish Goel
Filed: 15 May 23
Utility
Epitaxial Silicon Channel Growth
23 Nov 23
A three-dimensional NAND flash memory structure may include solid channel cores of epitaxial silicon that are grown directly from a silicon substrate reference.
Hsiang Yu Lee, Pradeep K. Subrahmanyan
Filed: 18 May 23
Utility
Self-aligned Vertical Bitline for Three-dimensional (3D) Dynamic Random-access Memory (Dram) Devices
23 Nov 23
A semiconductor structure includes a plurality of memory levels stacked in a first direction, each of the plurality of memory levels including a semiconductor layer, a word line metal layer, and an interface on a cross section of the semiconductor layer, a spacer between adjacent memory levels of the plurality of memory levels in the first direction, and a bit line in contact with the interface of each of the plurality of memory levels, the bit line extending in the first direction.
Zhijun CHEN, Fredrick FISHBURN, Ying-Bing JIANG, Avgerinos V. GELATOS
Filed: 1 May 23
Utility
Barrier Layer for Preventing Aluminum Diffusion
23 Nov 23
Embodiments of the present disclosure are related to methods of preventing aluminum diffusion in a metal gate stack (e.g., high-κ metal gate (HKMG) stacks and nMOS FET metal gate stacks).
Srinivas Gandikota, Elizabeth Mao, Tianyi Huang, Tengzhou Ma, Chi-Chou Lin, Yixiong Yang
Filed: 18 May 22
Utility
Guardbands In Substrate Processing Systems
23 Nov 23
A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values.
Fei Li, Jimmy Iskandar, James Robert Moyne
Filed: 19 May 22
Utility
Method for Depositing Layers Directly Adjacent Uncovered Vias or Contact Holes
23 Nov 23
Disclosed are approaches for forming semiconductor device layers.
John Hautala, Charith Nanayakkara
Filed: 23 May 22
Utility
Guardbands In Substrate Processing Systems
23 Nov 23
A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values.
Jimmy Iskandar, Fei Li, James Robert Moyne
Filed: 19 May 22
Utility
Directional Selective Deposition
23 Nov 23
Exemplary processing methods may include forming a plasma of a silicon-containing precursor.
Bhargav S. Citla, Soham Asrani, Joshua Rubnitz, Srinivas D. Nemani, Ellie Y. Yieh
Filed: 2 Aug 23
Utility
Defect Detection of a Semiconductor Specimen
23 Nov 23
There is provided a system and method of defect detection of a semiconductor specimen.
Boaz DUDOVICH, Assaf ARIEL, Amir BAR, Lior YEHIELI, Chen ITZIKOWITZ, Shiran BEN ISRAEL, Lior KATZ, Eli Oren JONI, Eyal ROT
Filed: 19 May 22
Utility
Methods for Patterning Substrates to Adjust Voltage Properties
23 Nov 23
A method of forming a structure on a substrate is provided.
Steven C. H. HUNG, Srinivas GANDIKOTA, Yixiong YANG, Yong YANG
Filed: 26 Apr 23
Utility
Methods and Apparatus for Processing a Substrate
23 Nov 23
Methods and apparatus for processing a substrate are provided herein.
Yiyang WAN, Weifeng YE, Shumao ZHANG, Gary HOW, Jiang LU, Lei ZHOU, Dien-yeh WU, Douglas LONG, Avgerinos V. GELATOS, Ying-Bing JIANG, Rongjun WANG, Xianmin TANG, Halbert CHONG
Filed: 19 May 22
Utility
Memory Device with High-mobility Oxide Semiconductor Channel and Methods for Forming the Same
23 Nov 23
Embodiments of the disclosure include an apparatus and method of forming a memory device with high-mobility oxide semiconductor channels.
Milan PESIC
Filed: 16 May 23
Utility
High Power Tungsten Halogen Lamp Lifetime Improvement Through J-hook Design
23 Nov 23
A lamp and epitaxial processing apparatus are described herein.
Yao-Hung YANG, Shantanu Rajiv Gadgil, Kaushik Rao, Vincent Joseph Kirchhoff, Sagir Kadiwala, Munirah Mahyudin, Daniel Chou
Filed: 11 May 23