191 patents
Page 8 of 10
Utility
Metrology method and device
14 Dec 20
An inspection apparatus, including: an objective configured to receive diffracted radiation from a metrology target having positive and negative diffraction order radiation; an optical element configured to separate the diffracted radiation into portions separately corresponding to each of a plurality of different values or types of one or more radiation characteristics and separately corresponding to the positive and negative diffraction orders; and a detector system configured to separately and simultaneously measure the portions.
Yevgeniy Konstantinovich Shmarev, Nitesh Pandey, Armand Eugene Albert Koolen
Filed: 18 Sep 18
Utility
Athermalization of an alignment system
14 Dec 20
An alignment system configured to be substantially insensitive to thermal variations in its system during alignment measurements.
Suzanne Johanna Antonetta Geertruda Cosijns, Maarten Van Der Heijden, Frederikus Johannes Maria De Vreede, David Taub, Eric Emery, Joseph Ashwin Franklin
Filed: 3 Sep 17
Utility
Multi-image Particle Detection System and Method
9 Dec 20
A method including: obtaining a first image location for an image feature of a first image of at least part of an object surface, obtaining a second image location for an image feature in a second image of at least part of the object surface, and/or obtaining a value of the displacement between the first and second image locations, the first and second images obtained at different relative positions between an image surface of a detector and the object surface in a direction substantially parallel to the image surface and/or the object surface; and determining, by a computer system, that a physical feature is at an inspection surface or not at the inspection surface, based on an analysis of the second image location and/or the displacement value and on an anticipated image feature location of the image feature in the second image relative to the first image location.
Aage BENDIKSEN, Guobin OU, Michael Christopher KOCHANSKI, Michael Leo NELSON
Filed: 18 Dec 17
Utility
Truncated Flat Wire Coil
2 Dec 20
A flat wire coil lacking electrically insulating material on its upper and/or lower surfaces.
Michael Emerson BROWN
Filed: 4 Oct 18
Utility
Variable corrector of a wave front
30 Nov 20
An optical inspection apparatus, including: an optical metrology tool configured to measure structures, the optical metrology tool including: an electromagnetic (EM) radiation source configured to direct a beam of EM radiation along an EM radiation path; and an adaptive optical system disposed in a portion of the EM radiation path and configured to adjust a shape of a wave front of the beam of EM radiation, the adaptive optical system including: a first aspherical optical element; a second aspherical optical element adjacent the first aspherical optical element; and an actuator configured to cause relative movement between the first optical element and the second optical element in a direction different from a beam axis of the portion of the EM radiation path.
Stanislav Smirnov, Johannes Matheus Marie De Wit, Teunis Willem Tukker, Armand Eugene Albert Koolen
Filed: 30 Jul 17
Utility
Apparatus for and Method Cleaning a Support Inside a Lithography Apparatus
4 Nov 20
Methods and systems are described for cleaning a support such as a clamp of a chuck that holds a patterning device or a wafer in a lithographic apparatus.
Victor Antonio PEREZ-FALCON, Michael Andrew CHIEDA
Filed: 30 Jul 18
Utility
Apparatus and Method for Determining a Condition Associated with a Pellicle
28 Oct 20
An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.
Derk Servatius Gertruda BROUNS, Joshua ADAMS, Aage BENDIKSEN, Richard JACOBS, Andrew JUDGE, Veera Venkata Narasimha Narendra Phani KOTTAPALLI, Joseph Harry LYONS, Theodorus Marinus MODDERMAN, Manish RANJAN, Marcus Adrianus VAN DE KERKHOF, Xugang XIONG
Filed: 26 Nov 18
Utility
Inspection apparatus having non-linear optics
19 Oct 20
An inspection apparatus or lithographic apparatus includes an optical system and a detector.
Marinus Johannes Maria Van Dam, Richard Carl Zimmerman
Filed: 24 Mar 19
Utility
Beam Splitting Prism Systems
14 Oct 20
According to one embodiment, a prism system is provided.
Douglas C. CAPPELLI, Stanislav SMIRNOV, Richard Carl ZIMMERMAN, Joshua ADAMS, Alexander Kenneth RAUB, Yevgeniy Konstantinovich SHMAREV
Filed: 25 Jun 20
Utility
Lithographic Cluster, Lithographic Apparatus, and Device Manufacturing Method
14 Oct 20
A lithographic cluster includes a track unit and a lithographic apparatus.
Irit TZEMAH, Eric Brian CATEY, John David CONNELLY
Filed: 25 Oct 18
Utility
Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
12 Oct 20
A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
King Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella Aarts, Adel Joobeur, Joseph Carbone
Filed: 16 Mar 17
Utility
Lithographic apparatus
28 Sep 20
A lithographic apparatus has a support structure configured to support a patterning device, the patterning device serving to pattern a radiation beam according to a desired pattern and having a planar main surface through which the radiation beam passes; an outlet opening configured to direct a flow of a gas onto the patterning device; and an inlet opening configured to extract the gas which has exited the outlet opening, wherein the outlet opening and inlet opening are in a facing surface facing the planar main surface of the patterning device.
Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster, Christopher Charles Ward, Frank Johannes Jacobus Van Boxtel, Justin Matthew Verdirame, Samir A. Nayfeh
Filed: 16 Nov 16
Utility
Beam Pointing Monitor and Compensation Systems
2 Sep 20
An optical system for beam pointing monitoring and compensation is provided.
Matthew E. HANSEN, Ronald A. WILKLOW
Filed: 3 Sep 18
Utility
Reticle clamping device
31 Aug 20
Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions.
Enrico Zordan, Brandon Adam Evans, Daniel Nathan Burbank, Ankur Ramesh Baheti, Samir A. Nayfeh
Filed: 16 Jan 18
Utility
Optical Arrangement for an Inspection Apparatus
26 Aug 20
An inspection apparatus, including: an optical system configured to provide a beam of radiation to a surface to be measured and to receive redirected radiation from the surface; and a detection system configured to measure the redirected radiation, wherein the optical system includes an optical element to process the radiation, the optical element including a Mac Neille-type multilayer polarizing coating configured to produce a reduced chromatic offset of the radiation.
Parag Vinayak KELKAR, Justin Lloyd KREUZER
Filed: 13 Sep 18
Utility
Method and device for pupil illumination in overlay and critical dimension sensors
24 Aug 20
An illumination system for a metrology apparatus that can achieve illumination spatial profile flexibility, high polarization extinction ratio, and high contrast.
Yevgeniy Konstantinovich Shmarev, Markus Franciscus Antonius Eurlings
Filed: 15 Jun 17
Utility
Beam splitting prism systems
17 Aug 20
According to one embodiment, a prism system is provided.
Douglas C. Cappelli, Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander Kenneth Raub, Yevgeniy Konstantinovich Shmarev
Filed: 11 Dec 18
Utility
Optical system of an alignment system
3 Aug 20
An optical system for improving alignment measurement accuracy is discussed.
Krishanu Shome, Justin Lloyd Kreuzer
Filed: 18 Jul 16
Utility
Method and device for focusing in an inspection system
27 Jul 20
An inspection apparatus includes an inspection optical system configured to a direct an inspection beam onto a surface of a substrate, the inspection optical system having an objective, a focus measurement optical system configured to receive a focus measurement beam, redirected by the substrate, from the objective, the focus measurement optical system having a movable reflective element configured to receive the focus measurement beam, and a control system configured to cause movement of the reflective element with a direction component along a beam path of the focus measurement beam and configured to determine whether the substrate surface is in the focus of the objective based on the focus measurement beam.
Yevgeniy Konstantinovich Shmarev, Stanislav Smirnov
Filed: 21 Aug 17
Utility
Substrate holder and a method of manufacturing a substrate holder
20 Jul 20
There is disclosed a substrate holder, a method of manufacturing a substrate holder, a lithographic apparatus comprising the substrate holder, and a method of manufacturing devices using the lithographic apparatus.
Thomas Poiesz, Satish Achanta, Mehmet Ali Akbas, Pavlo Antonov, Jeroen Bouwknegt, Joost Wilhelmus Maria Frenken, Evelyn Wallis Pacitti, Nicolaas Ten Kate, Bruce Tirri, Jan Verhoeven
Filed: 5 Jul 17