7578 patents
Page 43 of 379
Utility
Assembled Grid Tray
17 Aug 23
An assembled grid tray is disclosed, comprising a frame for holding multiple substrate trays to form a larger tray for use in a semiconductor processing tool.
Shinobu ABE, Chang Hee SHIN, Shinichi KURITA, Masahiko KOWAKA
Filed: 18 Aug 21
Utility
Multiple Substrate Handling System and Method
17 Aug 23
The present disclosure provides a multi-substrate handling system having an alignment apparatus capable of positioning each of a set of substrates in predetermined orientations for transfer.
Hsiu-jen WANG, Sin-Yi JIANG, Neng-rui DONG, Shih-Hao KUO, Chia-Hung KAO, Bang-Yu LIU, Hsu-Ming HSU
Filed: 16 Jun 21
Utility
drljjohi1dg309dhtf iek9058txud
17 Aug 23
A substrate carrier and methods of assembling the substrate carrier are described herein.
James D. STRASSNER
Filed: 30 Jan 23
Utility
dj9axy85wszpxurwiaywbvqvuvh
17 Aug 23
A method that forms a sacrificial fill material that can be selectively removed for forming a backside contact via for a transistor backside power rail.
He REN, Houssam LAZKANI, Raman GAIRE, Mehul NAIK, Kuan-Ting LIU
Filed: 14 Feb 22
Utility
d04y6neqqjqpit3ocf7572rdmv51cu0
17 Aug 23
Methods of bonding one or more dies to a substrate are provided herein.
Ying WANG, Guan Huei SEE
Filed: 11 Feb 22
Utility
q227s0pyqavllw6ku9a2pxkr8uppng9u1m8wsatl2nsb10
17 Aug 23
Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display.
Chung-Chia CHEN, Ji Young CHOUNG, Dieter HAAS, Yu-Hsin LIN, Jungmin LEE, Wen-Hao WU, Si Kyoung KIM
Filed: 25 Apr 23
Utility
sag61o3cn9nas16eizmaazfx6lo7ky2oo540gi56g3geo9gt
17 Aug 23
Embodiments described herein relate to a device including a substrate, a plurality of adjacent pixel-defining layer (PDL) structures disposed over the substrate, and a plurality of sub-pixels.
Yu-hsin LIN, Ji Young CHOUNG, Chung-chia CHEN, Jungmin LEE, Wen-Hao WU, Takashi ANJIKI, Takuji KATO, Dieter HAAS, Si Kyoung KIM, Stefan KELLER
Filed: 14 Mar 23
Utility
ebkaxxf0e4qgh5zt58z5m42rga 9rfmsj90wljmj1ietzknim7gh4sjsd5h8
15 Aug 23
Methods and systems for additive manufacturing can include a modular spreader unit including multiple spreaders that collectively span the width of a large build area.
Hou T. Ng, Daihua Zhang, Nag B. Patibandla
Filed: 14 Jul 21
Utility
c1p083rxx518om69xewt42zy3xfhawe8b01i
15 Aug 23
Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same.
Jennifer Y. Sun, Vahid Firouzdor, David Koonce, Biraja Prasad Kanungo
Filed: 7 Jun 22
Utility
4tibm8j31v36vpl74yo0g0fhdi s433iw2llpuhg5zv8ezm
15 Aug 23
A method and apparatus for dispensing polishing fluids and onto a polishing pad within a chemical mechanical polishing (CMP) system are disclosed herein.
Justin H. Wong, Kevin H. Song
Filed: 30 Sep 20
Utility
g341m18ge9ob 0f4s1geqhi89uukfczknp5bhs5k4
15 Aug 23
A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, a plurality of segments disposed circumferentially around the substrate mounting surface to provide a collet retaining ring to surround a substrate mounted on the substrate mounting surface, and an outer ring that is vertically movable relative to the plurality of segments.
Steven M. Zuniga, Jay Gurusamy, Andrew J. Nagengast
Filed: 11 Nov 22
Utility
rcwsw0wl612gq0vz7z4e2nmwel2s77o4eo3o1v
15 Aug 23
Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same.
Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Jagdish Khanna, Jason G. Fung, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Gregory E. Menk, Nag B. Patibandla
Filed: 8 Dec 20
Utility
7x3b0a1rpuy31jz2myuqx0dqwh0a89ivpf10w6h5ua
15 Aug 23
Exemplary etching methods may include flowing an oxygen-containing precursor into a remote plasma region of a semiconductor processing chamber while striking a plasma to produce oxygen plasma effluents.
Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang
Filed: 11 Feb 21
Utility
f02vi6nv6nhnuag6 y8xpqzx1283h3ffplp0kczw0qys
15 Aug 23
The present disclosure relates to a method and apparatus for cleaning a substrate.
Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari N. Soundararajan, Chad Pollard
Filed: 5 Jan 21
Utility
93gjxfhvh1ems37ncbcvl9 rhb6oslaxbbxbzt
15 Aug 23
Embodiments described herein relate to apparatus and methods for processing a substrate.
Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang, Adib Khan
Filed: 6 Jun 19
Utility
qcy3tmrkcj 9vrqcuqzd
15 Aug 23
Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias.
Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip A. Kraus, Rajinder Dhindsa, James Rogers
Filed: 16 Jul 21
Utility
55ms42dvea79ksq94f7t3lzujxw2dddt5shyb2onfzz yti3l
15 Aug 23
A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
Ilya Blayvas
Filed: 24 Jun 21
Utility
c2wjzcra9rijb 2bv87qudq
15 Aug 23
An apparatus may include an exciter, disposed within a resonance chamber, to generate an RF power signal.
Keith E. Kowal
Filed: 28 Oct 21
Utility
pi8xu3aw8v31s92rz2u46l265hs7dda5hdgvech3t80rgq8fhpdqatjm
15 Aug 23
A method and apparatus for substrate etching are described herein.
Toan Q. Tran, Soonam Park, Junghoon Kim, Dmitry Lubomirsky
Filed: 31 Mar 21
Utility
ub46h4j49ceyn 236bi7lpbme
15 Aug 23
A gas distribution hub for a plasma chamber.
Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna
Filed: 1 Feb 22