7578 patents
Page 43 of 379
Utility
Assembled Grid Tray
17 Aug 23
An assembled grid tray is disclosed, comprising a frame for holding multiple substrate trays to form a larger tray for use in a semiconductor processing tool.
Shinobu ABE, Chang Hee SHIN, Shinichi KURITA, Masahiko KOWAKA
Filed: 18 Aug 21
Utility
Multiple Substrate Handling System and Method
17 Aug 23
The present disclosure provides a multi-substrate handling system having an alignment apparatus capable of positioning each of a set of substrates in predetermined orientations for transfer.
Hsiu-jen WANG, Sin-Yi JIANG, Neng-rui DONG, Shih-Hao KUO, Chia-Hung KAO, Bang-Yu LIU, Hsu-Ming HSU
Filed: 16 Jun 21
Utility
xgq4h7mngodylzngkjo9i288xkw705kth
17 Aug 23
A substrate carrier and methods of assembling the substrate carrier are described herein.
James D. STRASSNER
Filed: 30 Jan 23
Utility
vaq6l786lg7nceebek6v5jfa8r7klhvfq0pqrp dquxqy
17 Aug 23
A method that forms a sacrificial fill material that can be selectively removed for forming a backside contact via for a transistor backside power rail.
He REN, Houssam LAZKANI, Raman GAIRE, Mehul NAIK, Kuan-Ting LIU
Filed: 14 Feb 22
Utility
5kg2qkknqu814guxvi62hxmt4zyrfoqru2qnvr07xh88izrlyirilg3tb
17 Aug 23
Methods of bonding one or more dies to a substrate are provided herein.
Ying WANG, Guan Huei SEE
Filed: 11 Feb 22
Utility
3k4uz7u0kavtq 243djbk2o
17 Aug 23
Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display.
Chung-Chia CHEN, Ji Young CHOUNG, Dieter HAAS, Yu-Hsin LIN, Jungmin LEE, Wen-Hao WU, Si Kyoung KIM
Filed: 25 Apr 23
Utility
wwy0s91660fji2b7ce3rjox0aem0p669czt8vv3kkko4yuhs0s
17 Aug 23
Embodiments described herein relate to a device including a substrate, a plurality of adjacent pixel-defining layer (PDL) structures disposed over the substrate, and a plurality of sub-pixels.
Yu-hsin LIN, Ji Young CHOUNG, Chung-chia CHEN, Jungmin LEE, Wen-Hao WU, Takashi ANJIKI, Takuji KATO, Dieter HAAS, Si Kyoung KIM, Stefan KELLER
Filed: 14 Mar 23
Utility
24p54u813kk64z7j18ty4hkofvcxcmue64800gk6n9uz41 9f
15 Aug 23
Methods and systems for additive manufacturing can include a modular spreader unit including multiple spreaders that collectively span the width of a large build area.
Hou T. Ng, Daihua Zhang, Nag B. Patibandla
Filed: 14 Jul 21
Utility
lub1kupsfon z38n9byz5xfe6r5jb1ydwy1hnmtzxloextg8ywc4un
15 Aug 23
Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same.
Jennifer Y. Sun, Vahid Firouzdor, David Koonce, Biraja Prasad Kanungo
Filed: 7 Jun 22
Utility
3zxpln0i497u5h jvbxtsjf33vdxra817dxrpgowjphngc4z8xbxu4c
15 Aug 23
A method and apparatus for dispensing polishing fluids and onto a polishing pad within a chemical mechanical polishing (CMP) system are disclosed herein.
Justin H. Wong, Kevin H. Song
Filed: 30 Sep 20
Utility
40zitw4mm0tp 9qqzsbfvvaicji824lb
15 Aug 23
A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, a plurality of segments disposed circumferentially around the substrate mounting surface to provide a collet retaining ring to surround a substrate mounted on the substrate mounting surface, and an outer ring that is vertically movable relative to the plurality of segments.
Steven M. Zuniga, Jay Gurusamy, Andrew J. Nagengast
Filed: 11 Nov 22
Utility
pb7yi4y9qxh913e2s37febjbt9q1fcgewp37hmj
15 Aug 23
Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same.
Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Jagdish Khanna, Jason G. Fung, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Gregory E. Menk, Nag B. Patibandla
Filed: 8 Dec 20
Utility
77vcdcmua4iycw8bqlf6lwf2urrk8hj1s5o d7p2tk5f
15 Aug 23
Exemplary etching methods may include flowing an oxygen-containing precursor into a remote plasma region of a semiconductor processing chamber while striking a plasma to produce oxygen plasma effluents.
Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang
Filed: 11 Feb 21
Utility
n32f8vdtte3sp3gvg95q4swc4bekpukaeo
15 Aug 23
The present disclosure relates to a method and apparatus for cleaning a substrate.
Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari N. Soundararajan, Chad Pollard
Filed: 5 Jan 21
Utility
c06335kebo4f3hjmzvhuqscsz95ea618s5thimfuh1
15 Aug 23
Embodiments described herein relate to apparatus and methods for processing a substrate.
Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang, Adib Khan
Filed: 6 Jun 19
Utility
vzfl3t8htuorv2926ryrfpso5oynrbqv64zboc6zsut72ns79u
15 Aug 23
Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias.
Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip A. Kraus, Rajinder Dhindsa, James Rogers
Filed: 16 Jul 21
Utility
vo5am1lcf7hhydxwne5ezs
15 Aug 23
A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
Ilya Blayvas
Filed: 24 Jun 21
Utility
cdnz7oza0iah0mbbvqn3nu6
15 Aug 23
An apparatus may include an exciter, disposed within a resonance chamber, to generate an RF power signal.
Keith E. Kowal
Filed: 28 Oct 21
Utility
nptay6q6ifdrqcwtp1qovaq
15 Aug 23
A method and apparatus for substrate etching are described herein.
Toan Q. Tran, Soonam Park, Junghoon Kim, Dmitry Lubomirsky
Filed: 31 Mar 21
Utility
s8is3mwokklx20ha4z10r joujktmj8mjp2y
15 Aug 23
A gas distribution hub for a plasma chamber.
Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna
Filed: 1 Feb 22