7578 patents
Page 39 of 379
Design
Shadow ring lift plate
5 Sep 23
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh, Manjunatha Koppa
Filed: 28 Sep 21
Design
Shadow ring lift assembly
5 Sep 23
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh, Manjunatha Koppa
Filed: 28 Sep 21
Utility
mfsej226zgk0l17jmqjgyv
5 Sep 23
A substrate cleaning device may include a chamber body configured to hold a substrate and a brush assembly.
Steven M. Zuniga, Jay Gurusamy, Jagan Rangarajan
Filed: 30 Jan 20
Utility
i3p3y9esclbiu8o imbx6i8q48zklbm6zwkrc0f1sdmlmau8bdle
5 Sep 23
Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same.
Sivapackia Ganapathiappan, Boyi Fu, Ashwin Chockalingam, Daniel Redfield, Rajeev Bajaj, Mahendra C. Orilall, Hou T. Ng, Jason G. Fung, Mayu Yamamura
Filed: 22 Mar 21
Utility
r6gsfxw1rx ucypwjcjzrv
5 Sep 23
Gas distribution apparatus, processing chambers and methods using a dead volume-free valve are described.
Ashutosh Agarwal, Sanjeev Baluja
Filed: 20 Sep 22
Utility
zxvjgp2ngf2cogjrtbhxofjiyt7yubn
5 Sep 23
A gas is received through an inlet.
Vijay D. Parkhe
Filed: 3 Aug 17
Utility
ugnrajnz5z2sqywzqf571ou9d3i8oea5m1eq8xo qp02rs
5 Sep 23
Methods of forming a DRAM bit line to improve line edge roughness (LER) and lower resistance are described.
Lequn Liu, Priyadarshi Panda, Jonathan C. Shaw
Filed: 11 Apr 22
Utility
ui1q3ni0 h132qd5cu3k
5 Sep 23
Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in an organic light-emitting diode (OLED) display are described herein.
Ji Young Choung, Chung-chia Chen, Yu Hsin Lin, Jungmin Lee, Dieter Haas, Si Kyoung Kim
Filed: 27 Sep 22
Utility
bu3hwnjqyvj84m0v w0csqsj5xvciki
5 Sep 23
Embodiments of the present disclosure relate to optical devices for augmented, virtual, and/or mixed reality applications.
Yangyang Sun, Jinxin Fu, Kazuya Daito, Ludovic Godet
Filed: 4 Oct 21
Utility
4v1vfyp7cgyiggi4jdcih69aopvvjp9tkw9phjs2
5 Sep 23
Memory devices are described.
Chang Seok Kang, Tomohiko Kitajima, Gill Yong Lee, Sanjay Natarajan, Sung-Kwan Kang, Lequn Liu
Filed: 15 Dec 21
Utility
9likkysjueuuhk1w8ldwf1x9guxe u20nm5
5 Sep 23
A system and method for controlling an amount of outgassing caused by implanting ions into a photoresist disposed on a workpiece.
Nevin Clay, David Roger Timberlake, Christopher W. Campbell
Filed: 24 Jan 22
Utility
mnm9xj943fwnthjuj2qrp45z2jnvyo3koydlw1qopgpei9qlnw6qxc
5 Sep 23
Methods and apparatus for supplying radio frequency (RF) power to a process chamber.
Gary Leray
Filed: 28 Feb 18
Utility
qi8yum 923njv579wm63jv7osxp03vxtr93g03q9k0pe2i4ck2ft
5 Sep 23
Methods and apparatus for processing a substrate are provided herein.
John Poulose, Kartik Ramaswamy
Filed: 23 Feb 21
Utility
zjz5bt8oywx6wrgyzd 569i6ap45wv68m36uwrdvdghvm2tu
5 Sep 23
Methods and apparatus for processing a substrate are provided.
Hao Jiang, Chi Lu, He Ren, Mehul Naik
Filed: 4 May 21
Utility
ouvl3p19rtk50zrwpytwo05pi2kynjzcmtpgbxcydau39o5xw2bw ac6r
5 Sep 23
Electronic device processing assemblies including an EFEM with at least one side storage pod attached thereto.
Patrick Pannese, Murali Narasimhan, Paul B. Reuter, Nir Merry
Filed: 18 Oct 19
Utility
gkjqdae35bj7cenels2cb9r8in eq5x
5 Sep 23
Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems.
Nir Merry, Jeff Hudgens
Filed: 21 Aug 20
Utility
t5yt3y40uy3qyh7fstg3qs43xuni
5 Sep 23
Embodiments of the present disclosure relate to apparatus, systems and methods for substrate processing.
Bhaskar Prasad, Kirankumar Neelasandra Savandaiah, Thomas Brezoczky, Srinivasa Rao Yedla
Filed: 27 Jul 20
Utility
aib9q2f9rhoe7w osvh7vqvhakkffr0zioifazfs3p7howzeug1rixkwb1
5 Sep 23
A method includes receiving a plurality of sets of sensor data associated with a processing chamber of a substrate processing system.
Xuesong Lu, Yu Lei, Anup Phatak, Hyman W. H. Lam, Chong Jiang, Malcolm Emil Delaney, Yufei Hu
Filed: 6 Jul 20
Utility
f9wk2blo3xq5nbjr74x0puytt08hm5w1k4o5dc5jtrdrd2ezlabyjdh8u9t
5 Sep 23
A wafer processing device may include a wafer exchanger including two or more blades, each of the two or more blades may be configured to receive a wafer, the two or more blades may be rotatable about an axis on a single horizontal plane, and the two or more blades may be movable between at least a load cup and a robot access location; wherein the load cup may include a wafer station that is vertically moveable relative a blade located in the load cup and may be configured to remove a wafer from a blade located in the load cup and place a wafer on a blade located in the load cup.
Jagan Rangarajan, Edward Golubovsky, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga
Filed: 9 Jan 20
Utility
jcgyw5h9itn7vcfnzreds86ac9qmethrdm5dxw9gup4pxkob9ifu0
5 Sep 23
Embodiments of the disclosure relate to an apparatus and method for processing semiconductor substrates.
Sultan Malik, Srinivas D. Nemani, Qiwei Liang, Adib M. Khan
Filed: 6 Dec 19