7578 patents
Page 35 of 379
Utility
Unified material-to-systems simulation, design, and verification for semiconductor design and manufacturing
19 Sep 23
A complete, unified material-to-systems simulation, design, and verification method for semiconductor design and manufacturing may include evaluating effects of semiconductor material or process changes on software algorithms.
Bhuvaneshwari Ayyagari, Angada Bangalore Sachid
Filed: 20 Sep 21
Utility
3-D DRAM structure with vertical bit-line
19 Sep 23
Memory devices are described.
Sung-Kwan Kang, Gill Yong Lee, Chang Seok Kang
Filed: 18 May 21
Utility
Adjustable thermal break in a substrate support
19 Sep 23
Embodiments described herein relate to a substrate support assembly which enables adjustment of the thermal conductivity therein.
Alvaro Garcia De Gorordo, Daniel Sang Byun, Andreas Schmid, Stephen Donald Prouty, Andrew Antoine Noujaim
Filed: 15 Jun 20
Utility
Three-color 3D DRAM stack and methods of making
19 Sep 23
Methods of reducing wafer bowing in 3D DRAM devices are described using a 3-color process.
Arvind Kumar, Mahendra Pakala, Ellie Y. Yieh, John Tolle, Thomas Kirschenheiter, Anchuan Wang, Zihui Li
Filed: 28 Sep 21
Utility
Water soluble organic-inorganic hybrid mask formulations and their applications
19 Sep 23
Water soluble organic-inorganic hybrid masks and mask formulations, and methods of dicing semiconductor wafers are described.
Wenguang Li, James S. Papanu
Filed: 17 Nov 21
Utility
Asymmetry correction via variable relative velocity of a wafer
19 Sep 23
Certain aspects of the present disclosure provide techniques for a method of removing material on a substrate.
Jimin Zhang, Brian J. Brown, Eric Lau, Ekaterina Mikhaylichenko, Jeonghoon Oh, Gerald J. Alonzo
Filed: 1 Jun 21
Utility
Patterned chuck for double-sided processing
19 Sep 23
Embodiments described herein relate to a substrate chucking apparatus having a plurality of cavities formed therein.
Ludovic Godet, Rutger Meyer Timmerman Thijssen
Filed: 28 Mar 22
Utility
Ruthenium liner and cap for back-end-of-line applications
19 Sep 23
Electronic devices and methods of forming electronic devices using a ruthenium or doped ruthenium liner and cap layer are described.
Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Lu Chen, Zhiyuan Wu
Filed: 22 Jul 21
Utility
Carrier head with segmented substrate chuck
19 Sep 23
A carrier head for a chemical mechanical polishing apparatus includes a carrier body, an outer membrane assembly, an annular segmented chuck, and an inner membrane assembly.
Steven M. Zuniga, Jay Gurusamy
Filed: 5 May 22
Utility
Methods and apparatus for processing a substrate
19 Sep 23
Methods and apparatus for processing substrates are provided herein.
Mengxue Wu, Siew Kit Hoi, Jay Min Soh
Filed: 25 May 21
Utility
Method for processing a substrate by oscillating a boundary layer of the flow of one or more process gases over a surface of a substrate and systems for processing a substrate using the method
19 Sep 23
Aspects of the present disclosure generally relate to oscillating a boundary layer of a flow of process gas in methods and systems for processing substrates.
Tsung-Han Yang, Christopher S. Olsen
Filed: 5 Jan 21
Utility
Methods for controlling a flow pulse shape
19 Sep 23
Methods for controlling pulse shape in ALD processes improves local non-uniformity issues of films deposited on substrate surface.
Joseph AuBuchon, Kevin Griffin, Hanhong Chen
Filed: 18 Sep 20
Utility
Protection of components from corrosion
19 Sep 23
Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component.
David Britz, Pravin K. Narwankar, David Thompson, Yuriy Melnik, Sukti Chatterjee
Filed: 6 May 21
Utility
Multilayer extreme ultraviolet reflectors
19 Sep 23
Extreme ultraviolet (EUV) mask blanks, production systems therefor, and methods of reducing roughness are disclosed.
Vibhu Jindal, Herng Yau Yoong, Wen Xiao
Filed: 16 Jun 21
Utility
Method to scale dram with self aligned bit line process
19 Sep 23
Memory devices and methods of forming memory devices are described.
Sung-Kwan Kang, Fredrick Fishburn, Abdul Wahab Mohammed, Gill Yong Lee
Filed: 25 Apr 22
Utility
Non-Halide Oxygen-Free Organometallic Precursors for ALD/CVD of Metallization
14 Sep 23
Byunghoon Yoon, Yuri Vladimirovich Barsukov, Avgerinos V. Gelatos, Joung Joo Lee
Filed: 14 Mar 22
Utility
Erosion Resistant Metal Oxide Coatings Deposited by Atomic Layer Deposition
14 Sep 23
Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing oxide coating.
Xiaowei Wu, Jennifer Y. Sun, Michael R. Rice
Filed: 26 Apr 23
Utility
MODULAR MULTl-DIRECTIONAL GAS MIXING BLOCK
14 Sep 23
Exemplary modular gas blocks may include a body having inlet and outlet ends.
Daemian Raj Benjamin Raj, Kiran Garikipati, Kurt R. Langeland, Syed A. Alam
Filed: 10 Mar 23
Utility
Variable Rotation Rate Batch Implanter
14 Sep 23
A system comprising a spinning disk is disclosed.
Stanislav S. Todorov, Robert J. Mitchell, Joseph C. Olson, Frank Sinclair
Filed: 14 Mar 22
Utility
Package Imaging for Die Location Correction In Digital Lithography
14 Sep 23
Actual physical locations of dies on a substrate package may be identified without using a full metrology scan of the substrate.
Ulrich Mueller, Hsiu-Jen Wang, Shih-Hao Kuo, Jang Fung Chen
Filed: 12 Mar 22