7578 patents
Page 32 of 379
Utility
Enhanced Chamber Clean and Recovery with Dual Flow Path
28 Sep 23
Processing chambers comprising a chamber body, a remote plasma source (RPS) outside the chamber body, a first connection line between the remote plasma source and the interior volume of the chamber body through the top wall and a second connection line between the remote plasma source and the interior volume through the sidewall of the chamber body.
Prasanth Narayanan, Shrihari Sampathkumar, Keiichi Tanaka, Mario D. Sanchez, Muhammad M. Rasheed, Mandyam Sriram
Filed: 18 Oct 22
Utility
Methods and Apparatus for Altering Lithographic Patterns to Adjust Plating Uniformity
28 Sep 23
Methods and apparatus for electroplating a substrate incorporate aspects of digital lithography and feedback from electroplating processes to improve characteristics of plating material based on die patterns.
Marvin Louis BERNT, Jon WOODYARD, Niranjan KHASGIWALE, Vincent DICAPRIO
Filed: 7 Mar 23
Utility
Vertically Adjustable Plasma Source
28 Sep 23
The disclosure describes a plasma source assemblies comprising a differential screw assembly, an RF hot electrode, a top cover, an upper housing and a lower housing.
Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Gregory J. Wilson, Sriharish Srinivasan
Filed: 5 Jun 23
Utility
Processing Chamber Condition and Process State Monitoring Using Optical Reflector Attached to Processing Chamber Liner
28 Sep 23
A method includes receiving light, by a light coupling device and along an optical path, reflected back from a reflector mounted on a liner of a processing chamber.
Patrick Tae
Filed: 31 May 23
Utility
Liner to Form Composite High-k Dielectric
28 Sep 23
Provided are methods to reduce the thickness of a high-κ layer needed in a DRAM capacitor and, thus, allow the cell electrodes to be larger, giving higher cell capacitance.
Fredrick Fishburn
Filed: 3 Mar 23
Utility
Methods for Forming Charge Layers Using Gas and Liquid Phase Coatings
28 Sep 23
Methods for adjusting a work function of a structure in a substrate leverage near surface doping.
Taichou Papo CHEN
Filed: 22 Mar 22
Utility
Process Chamber And Process Kits For Advanced Packaging
28 Sep 23
Process kits for processing chambers and processing chambers having a lower shield and lower shield ring are described.
Aravind Miyar Kamath, Cheng-Hsiung Matthew Tsai, Manjunatha Koppa
Filed: 25 Mar 22
Utility
Sensor-based Correction of Robot-held Object
28 Sep 23
A robotic object handling system comprises a robot arm, an image sensor, a first station, and a computing device.
Nicholas Michael Kopec, Damon K. Cox, Leon Volfovski
Filed: 28 Mar 23
Utility
Pixelated Showerhead for RF Sensitive Processes
28 Sep 23
Exemplary semiconductor processing chambers may include a gas delivery assembly.
Abdul Aziz Khaja, Juan Carlos Rocha-Alvarez
Filed: 24 Mar 22
Utility
Single Side Via Fill Process for Through-vias
28 Sep 23
Methods and apparatus for single side filling of through-vias in a substrate are provided herein.
Marvin Louis BERNT, Jon WOODYARD
Filed: 25 Mar 22
Utility
Low Temperature N-type Contact Epi Formation
28 Sep 23
Methods for forming a semiconductor structure and semiconductor structures are described.
Nicolas Breil, Matthew Cogorno, Anchuan Wang, Byeong Chan Lee, Manoj Vellaikal
Filed: 15 Mar 23
Utility
Support Layer for Small Pitch Fill
28 Sep 23
Provided is a DRAM device having a support layer to hold the bWL features before being filled with the electrode metal.
Fredrick Fishburn, Sung-Kwan Kang
Filed: 16 Mar 23
Utility
Electrical Improvements for 3D Nand
28 Sep 23
Exemplary semiconductor processing methods may include providing a silicon-containing precursor to a processing region of a semiconductor processing chamber.
Dimitrios Pavlopoulos, Rui Cheng, Qinghua Zhao, Karthik Janakiraman
Filed: 25 Mar 22
Utility
SNSPD with Integrated Aluminum Nitride Seed or Waveguide Layer
28 Sep 23
A superconducting nanowire single photon detector (SNSPD) device includes a substrate having a top surface, an optical waveguide on the top surface of the substrate to receive light propagating substantially parallel to the top surface of the substrate, a seed layer of metal nitride on the optical waveguide, and a superconductive wire on the seed layer.
Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Nir Yahav, Robert Jan Visser, Adi de la Zerda
Filed: 10 May 23
Utility
Low Cost Fabrication of Optical Device Using Discrete Grating Module Assembly
28 Sep 23
Embodiments of the present disclosure relate to optical device fabrication using methods of discrete grating assembly and optical interconnection.
Hao TANG, Kang LUO, Yongan XU, Andrew CEBALLOS, Rutger MEYER TIMMERMAN THIJSSEN
Filed: 14 Mar 23
Utility
Autonomous Substrate Processing System
28 Sep 23
A cool cluster comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device of the tool cluster.
Priyadarshi Panda, Lei Lian, Pengyu Han, Todd J. Egan, Prashant Aji, Eli Mor, Alex J. Tom, Leonard Michael Tedeschi
Filed: 30 May 23
Utility
Machine Learning Model Generation and Updating for Manufacturing Equipment
28 Sep 23
A method includes determining that conditions of a processing chamber have changed since a trained machine learning model associated with the processing chamber was trained.
Pengyu Han, Hong-Rui Chen, Shu-Yu Chen, Wan-Hsueh Lai, Pin Ham Lu, Zhengping Yao
Filed: 9 Feb 22
Utility
Methods and Mechanisms for Measuring Patterned Substrate Properties During Substrate Manufacturing
28 Sep 23
An electronic device manufacturing system configured to obtain sensor data associated with a deposition process performed in a process chamber to deposit a film stack on a surface of a substrate.
Ping-Yu Chou, Ya-Chu Chang, Jui-Che Lin, Hao-Wei Peng, Chao-Hsien Lee, Shauh-Teh Juang
Filed: 25 Mar 22
Utility
Machine Learning Based Examination of a Semiconductor Specimen and Training Thereof
28 Sep 23
There is provided a system and method of runtime examination of a semiconductor specimen.
Tal BEN-SHLOMO, Shalom ELKAYAM, Shaul COHEN, Tomer PELED
Filed: 28 Mar 22
Utility
Calibration of an electronics processing system
26 Sep 23
A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position.
Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
Filed: 28 Apr 20