7578 patents
Page 30 of 379
Utility
Generating Synthetic Microspy Images of Manufactured Devices
5 Oct 23
A method includes receiving data indicating a plurality of dimensions of a manufactured device.
Abhinav Kumar, Adrienne Melissa Martin Bergh, Tarpan Dixit
Filed: 31 Mar 22
Utility
Training a Machine Learning System to Detect an Excursion of a CMP Component Using Time-based Sequence of Images
5 Oct 23
Monitoring operations of a polishing system includes obtaining a time-based sequence of reference images of a component of the polishing system performing operations during a test operation of the polishing system, receiving from a camera a time-based sequence of monitoring images of an equivalent component of an equivalent polishing system performing operations during polishing of a substrate, determining a difference value for the time-based sequence of monitoring images by comparing the time-based sequence of reference images to the time-based sequence of monitoring image using an image processing algorithm, determining whether the difference value exceeds a threshold, and in response to determining the difference value exceeds the threshold, indicating an excursion.
Sidney P. Huey, Thomas Li, Benjamin Cherian
Filed: 6 Jun 23
Utility
Chemical-dose Substrate Deposition Monitoring
5 Oct 23
A method including receiving, by a processing device, image data characterizing light reflected from of a film disposed on a processed surface of a substrate.
Albert Barrett Hicks, III, Serghei Malkov
Filed: 30 Mar 22
Utility
Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
5 Oct 23
Implementations of the present disclosure generally relate to the fabrication of integrated circuits.
Prashant Kumar KULSHRESHTHA, Ziqing DUAN, Karthik Thimmavajjula NARASIMHA, Kwangduk Douglas LEE, Bok Hoen KIM
Filed: 6 Jun 23
Utility
Modular Multi-chamber Processing Tool Having Link Chamber for Ultra High Vaccum Processes
5 Oct 23
Embodiments of link chamber for use in multi-chamber processing tools or systems are provided herein.
Robert Irwin DECOTTIGNIES, Marek W RADKO
Filed: 11 Mar 22
Utility
Gap Fill Enhancement with Thermal Etch
5 Oct 23
A method of forming an interconnect structure over a substrate includes forming a nucleation layer over a surface of the substrate.
Kai WU, Xi CEN, Dixiong WANG, Yang LI, Peiqi WANG
Filed: 12 Aug 22
Utility
Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers
5 Oct 23
Aspects generally relate to methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers.
Krishna NITTALA, Sarah Michelle BOBEK, Kwangduk Douglas LEE, Ratsamee LIMDULPAIBOON, Dimitri KIOUSSIS, Karthik JANAKIRAMAN
Filed: 5 Jun 23
Utility
Temperature-based Metrology Calibration at a Manufacturing System
5 Oct 23
Methods and systems for temperature-based metrology calibration at a manufacturing system are provided.
Shifang Li, Yudong Hao, Xinyuan Chong, Chengqing Wang
Filed: 31 Mar 22
Utility
Chemical-dose Substrate Deposition Monitoring
5 Oct 23
Assemblies, system, methods, and devices for monitoring characteristics of a substrate disposed in a recess within a processing chamber.
Albert Barrett Hicks, III, Serghei Malkov
Filed: 30 Mar 22
Utility
Structure and Fabrication Method of High Voltage Mosfet with a Vertical Drift Region
5 Oct 23
Embodiments of the present disclosure include a transistor with a vertical drift region and methods for forming the transistor.
Changseok KANG, Tomohiko KITAJIMA, Gill Yong LEE
Filed: 5 Apr 22
Utility
Methods of Manufacturing Plasma Generating Cells for a Plasma Source
5 Oct 23
A method of manufacturing a dielectric barrier discharge (DBD) structure includes forming a patterned electrode layer around an outer perimeter of a substrate composed of a dielectric material.
David John Jorgensen, Jian Wu, Vladimir Nagorny, Hugo Rivera
Filed: 29 Jun 22
Utility
Deposition Methods and Apparatus for Piezoelectric Applications
5 Oct 23
Disclosed are methods and apparatus for depositing uniform layers on a substrate (201) for piezoelectric applications.
Abhijeet Laxman SANGLE, Vijay Bhan SHARMA, Yuan XUE, Ankur KADAM, Bharatwaj RAMAKRISHNAN, Uday PAI, Nilesh PATIL
Filed: 24 Aug 20
Utility
Organic Electroluminescent Devices with Improved Optical Out-coupling Efficiencies
5 Oct 23
Embodiments of the present disclosure generally relate to electroluminescent devices, such as organic light-emitting diodes, and displays including electroluminescent devices.
Chung-chia CHEN, Wan-Yu LIN, Hyunsung BANG, Lisong XU, Gang YU, Byung-Sung KWAK, Robert Jan VISSER, Chung-Chih WU, Hoang Yan LIN, Guo-Dong SU, Wei-Kai LEE, Yi-Jiun CHEN, Ting-Sheng HSU, Po-Hsiang LIAO, Wei-Cheng LIN
Filed: 21 Sep 20
Utility
In-line Monitoring of Oled Layer Thickness and Dopant Concentration
5 Oct 23
An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece.
Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra
Filed: 8 Jun 23
Utility
Bottom fed sublimation bed for high saturation efficiency in semiconductor applications
3 Oct 23
Bottom-fed ampoules for a semiconductor manufacturing precursors and methods of use are described.
David Marquardt, Carl White, Mohith Verghese
Filed: 10 Jan 23
Utility
Gas confiner assembly for eliminating shadow frame
3 Oct 23
The present disclosure relates to a gas confiner assembly designed to reduce the non-uniform deposition rates by confining the gas flow and changing the local gas flow distribution near the edge regions of the substrate.
Lai Zhao, Qunhua Wang, Robin L. Tiner, Soo Young Choi, Beom Soo Park
Filed: 30 Jan 15
Utility
Methods and apparatus for creating a large area imprint without a seam
3 Oct 23
Embodiments of the present disclosure generally relate to imprint lithography, and more particularly to methods and apparatus for creating a large area imprint without a seam.
Kevin Laughton Cunningham, Manivannan Thothadri
Filed: 1 Mar 21
Utility
Grouping spectral data from polishing substrates
3 Oct 23
Among other things, a computer-based method is described.
Jeffrey Drue David, Boguslaw A. Swedek
Filed: 29 Jun 18
Utility
Sensing unit having photon to electron converter
3 Oct 23
A method, an inspection system and a sensing unit.
Pavel Margulis
Filed: 18 Jan 22
Utility
System and method for maintenance of rotation-lift assembly
3 Oct 23
Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a system and method for monitoring a rotation-lift assembly of a process chamber.
Thomas Ackermann, Torsten Fankhaenel
Filed: 25 Jun 19