7578 patents
Page 34 of 379
Utility
Methods for Depositing Blocking Layers on Conductive Surfaces
21 Sep 23
Methods of selectively depositing blocking layers on conductive surfaces over dielectric surfaces are described.
Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Aaron Dangerfield, Feng Q. Liu, Mark Saly, Michael Haverty, Muthukumar Kaliappan
Filed: 24 May 23
Utility
Dynamic Interface for Providing a Symmetric Radio Frequency Return Path
21 Sep 23
Exemplary substrate processing system may include a chamber body that defines a processing region.
Ravikumar Patil
Filed: 25 May 23
Utility
Process Characterization and Correction Using Optical Wall Process Sensor (Owps)
21 Sep 23
A method includes receiving, by a processing device, first data from an optical sensor of a processing chamber.
Jeffrey Yat Shan Au, Sidharth Bhatia, Zhaozhao Zhu, Nicholas Ryan Pica, Varoujan Chakarian, Chenfei Hu
Filed: 16 Mar 22
Utility
Electrostatic Chuck Design with Improved Chucking and Arcing Performance
21 Sep 23
Aspects of the present disclosure relate to one or more implementations of a substrate support for a processing chamber.
Abdul Aziz KHAJA, Venkata Sharat Chandra PARIMI, Sarah Michelle BOBEK, Prashant Kumar KULSHRESHTHA, Vinay K. PRABHAKAR
Filed: 23 May 23
Utility
Edge Ring or Process Kit for Semiconductor Process Module
21 Sep 23
The present invention generally relates method and apparatus for detecting erosion to a ring assembly used in an etching or other plasma processing chamber.
Allen L. D'AMBRA, Sheshraj L. TULSHIBAGWALE
Filed: 24 May 23
Utility
Stress Incorporation In Semiconductor Devices
21 Sep 23
Examples of the present technology include processing methods to incorporate stress in a channel region of a semiconductor transistor.
Ashish Pal, Mehdi Saremi, El Mehdi Bazizi, Benjamin Colombeau
Filed: 26 May 23
Utility
Resist Modeling Method for Angled Gratings
21 Sep 23
Methods of forming a resist model for angled gratings on optical devices.
Yongan XU, Jin XU, William WILKINSON, Ludovic GODET
Filed: 17 Mar 23
Utility
SUBSTRATE PROCESSING FOR GaN GROWTH
21 Sep 23
Exemplary semiconductor structures may include a silicon-containing substrate.
Michel Khoury, Ria Someshwar
Filed: 15 Mar 22
Utility
Multiplexed Hologram Interference Exposure System
21 Sep 23
The present disclosure provides an apparatus and method for fabricating optical devices.
Ulrich MUELLER, David MARKLE
Filed: 20 Jan 21
Utility
Tool Drift Compensation with Machine Learning
21 Sep 23
Methods and systems for predictively determining tool drift in a digital lithography tool for early warning, and/or adjusting the tool in-situ to mitigate the effects of drift.
YenShuo LIN, Tamer COSKUN
Filed: 6 Aug 21
Utility
Communication Node to Interface Between Evaluation Systems and a Manufacturing System
21 Sep 23
An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system.
Michael Howells, Thorsten Kril, Hemanth Konanur Nagendra, Jatinder Sasan
Filed: 15 Mar 22
Utility
Inorganic Silicon-containing Overhang Structures of Oled Subpixels
21 Sep 23
The present disclosure relates to overhang structures and methods of fabricating a sub-pixel circuit with the overhang structures that may be utilized in a display such as an organic light-emitting diode (OLED) display.
Ji Young CHOUNG, Yu-hsin LIN
Filed: 8 Jun 21
Utility
Uniform Radiation Heating Control Architecture
21 Sep 23
Embodiments disclosed herein include a method of modeling a rapid thermal processing (RTP) tool.
Preetham Rao, Surajit Kumar, Dongming Iu, Wolfgang Aderhold
Filed: 15 Mar 22
Utility
Apparatus and Method for Delivering a Plurality of Waveform Signals During Plasma Processing
21 Sep 23
Embodiments of the present disclosure generally relate to a system used in a semiconductor device manufacturing process.
James ROGERS, Katsumasa KAWASAKI
Filed: 19 May 23
Utility
Integrated Showerhead
21 Sep 23
A showerhead for a processing chamber includes a faceplate with a plurality of openings.
Alexander BERGER, Ming XU
Filed: 16 Mar 22
Utility
Process Characterization and Correction Using Optical Wall Process Sensor (Owps)
21 Sep 23
A method includes receiving, by a processing device, first sensor data indicating a state of a wall corresponding to a first processing chamber.
Jeffrey Yat Shan Au, Joshua Thomas Maher, Varoujan Chakarian, Sidharth Bhatia, Patrick Tae, Zhaozhao Zhu, Blake W. Erickson
Filed: 16 Mar 22
Utility
Tungsten Defluorination by High Pressure Treatment
21 Sep 23
An annealing system is provided that includes a chamber body that defines a chamber, a support to hold a workpiece and a robot to insert the workpiece into the chamber.
Keith Tatseun WONG, Thomas Jongwan KWON, Sean KANG, Ellie Y. YIEH
Filed: 26 May 23
Utility
Calibration of an electronics processing system
19 Sep 23
A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm.
Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
Filed: 28 Apr 20
Utility
Molybdenum(0) precursors for deposition of molybdenum films
19 Sep 23
Molybdenum(0) and coordination complexes are described.
Chandan Kr Barik, John Sudijono, Chandan Das, Doreen Wei Ying Yong, Mark Saly, Bhaskar Jyoti Bhuyan, Feng Q. Liu
Filed: 21 Apr 21
Utility
Apparatus and method for inspecting lamps
19 Sep 23
Examples disclosed herein relate to a method and apparatus for inspecting lamp dimensions.
Govinda Raj, Vilen K. Nestorov
Filed: 19 Sep 22